The invention relates to the technical field of
photon counting imaging detection, and particularly relates to a position-sensitive
anode detector and a manufacturing method thereof. The
detector comprises a
cathode window having a photoelectric
cathode, an MCP
electron multiplier, a position-sensitive
anode and a tubular shell. The position-sensitive
anode comprises an anode insulating substrate and a
metal film anode which is arranged on the anode insulating substrate. According to the
metal film anode, nxn independent anodes are arranged in parallel along a horizontal direction to form an anode array, each independent anode is square and an insulating channel is arranged between the adjacent independent anodes. Each independent anode
electrode lead perpendicularly penetrates through the anode insulating substrate. Manufacturing of the
detector is completed by the steps of sealing of the tubular shell,
indium tubular shell, vapor plating of the
cathode window
metal film, manufacturing the anode insulating substrate, manufacturing the metal film anode, assembling the detector component, manufacturing the photoelectric cathode and
indium sealing of the detector. The detector has a
large dynamic range and can work under the condition of single
photon incident light and can also work under the condition of strong incident light.