The invention discloses a flexible multi-joint GaAs
solar battery and a manufacturing method of the flexible multi-joint GaAs
solar battery, and belongs to the technical field of
semiconductor materials. Firstly, a flexible substrate and a battery epitaxial structure which is bonded with
metal in the same way and composed of a base battery, a middle battery and a top battery are respectively prepared, and a first battery substrate is manufactured at the outer side of the top battery; secondly, a Ti layer, a Pt layer and an Au layer are sequentially plated on the back of the base battery of the battery epitaxial structure in an
vacuum evaporation mode, and the battery epitaxial structure is bonded with a
metal layer fully covering the outer surface of a
polyimide coating; thirdly, Si3N4 deposits on the surface of the bonded
metal layer, and then the first battery substrate on the battery epitaxial structure is removed through alkaline
corrosion liquid; fourthly, two upper electrodes and an antireflection film are manufactured on the top battery of the battery epitaxial structure; finally, after a manufactured
chip and a Si
wafer are bonded on a second substrate through
photoresist, and then the second substrate is removed through alkaline
corrosion liquid. The manufactured flexible multi-joint GaAs
solar battery is wholly flexible, can be applied to surfaces of different shapes, and is not broken easily.