776 results about "Vibrating membrane" patented technology

The invention relates to a lighting device comprising a light source (31) which is mounted on a heat sink (32) having an outer contour (34). Furthermore, it comprises a cooling device (35) for dynamically cooling the light source via cooling of the heat sink by means of a fluid flowing alongside the contour of the heat sink, the cooling device having one or a plurality of cooling openings (36, 43). The cooling device is a vibrating membrane cooling system for generating a sequence of fluid pulses (39). The cooling openings are arranged alongside the heat sink. The light source comprises optical means (33) for collimating and directing light originating from the light source during operation, while the contour of the heat sink has a shape similar to that of the optical means.

The application describes a sterile aqueous inhalation solution containing the active agent tobramycin. The preparation has a high content of active agent (about 80 to 120 mg / ml of tobramycin) and contains an acidic adjuvant, but contains only a low concentration of sodium chloride (at most about 2 mg / ml). It can be injected or administered as an aerosol, for example with conventional nebuliser. It is particularly suitable for application in combination with a modern vibrating membrane nebuliser and allows the administration of a therapeutic single does in markedly less than 10 minutes.

The invention discloses an MEMS (micro electro mechanical system) microphone structure, which comprises a semiconductor substrate, a first dielectric layer, a lower electrode vibrating membrane and an upper electrode structure, wherein the semiconductor substrate is provided with a cavity, the first dielectric layer is provided with a through hole communicated with the cavity, the lower electrode vibrating membrane is positioned above the through hole, in addition, at least one part of the lower electrode vibrating membrane is in contact with the upper surface of the first dielectric layer, the lower electrode vibrating membrane is led out from a lower electrode connecting part, the upper electrode structure is provided with an insulating layer and comprises an annular support structure, a backboard and an upper electrode connecting part, the backboard is provided with a plurality of through holes, at least one part of the annular support structure downwards extends to the lower electrode vibrating membrane, the rest parts of the annular support structure downwards extend to the substrate, the backboard is hung above the lower electrode vibrating membrane through the annular support structure, in addition, an air gap is formed between the backboard and the lower electrode vibrating membrane, and an upper electrode is embedded in the insulating layer of the backboard and is led out from the upper electrode connecting part. The MEMS microphone structure has the advantage that the damage or the falling of the upper electrode and the vibrating membrane in the release process can be avoided.

The invention discloses an optical fiber extrinsic Fabry-Perot interference ultrasonic sensing and detection device, comprising a 1550nm light source, a 1550nm optical circulator, an optical fiber Fabry-Perot ultrasonic sensor, a photoelectric transition module, a signal amplification module, an oscillograph, a piezoelectric transducer and a signal generator. The basic structure of the optical fiber Fabry-Perot ultrasonic sensor is composed of a single mode optical fiber, a quartz vibrating membrane, an outer ceramic bushing, an inner ceramic bushing and a metal base. The light emitted by the 1550nm light source reaches the optical fiber Fabry-Perot ultrasonic sensor through the optical circulator, when ultrasonic wave acts on the ultrasonic sensor, as the light reflected by the optical fiber Fabry-Perot ultrasonic sensor is modulated by the ultrasonic signal, the reflected light reaches the photoelectric conversion module by the circulator and then is converted into an electric signal, and the ultrasonic signal can be observed by the oscillograph after amplification. The invention has simple structure, easy manufacture, low cost and high sensitivity, strong practicability, easy encapsulation and is convenient for mass production, and can be applied to related fields of industrial detection, power system safety and the like.

An electrostatic ultrasonic transducer includes a first electrode that has through-holes, a second electrode that has through-holes, and a vibrating membrane that is disposed such that the through-holes of the first electrode and the through-holes of the second electrode form a pair, interposed between a pair of electrodes composed of the first electrode and the second electrode, and having a conductive layer applied with a direct current bias voltage. The first electrode and the second electrode each have counter electrode portions that are formed in the through-holes to face the vibrating membrane, and a modulated wave, which is obtained by modulating a carrier wave in an ultrasonic frequency band with a signal wave in an audible frequency band, is applied between the pair of electrodes.

A capacitance type microphone with a stress release membrane prepared at a low temperature and a preparation method thereof. The capacitance type microphone includes a substrate having at least a resonant cavity; a septum, arranged on the top of the resonant cavity and connected with the substrate for implementing a mechanical vibration when being excitated by an acoustic pressure wave; a back board, arranged on the top of the septum and having a plurality of perforations; an air gap is provided the back board and the septum; a capacitor is composed of the septum, the air gap and the back board. The method includes steps: forming the resonant cavity on the substrate; forming the septum on the top of the resonant cavity, wherein the septum is connected with the substrate; setting the back board on the top of the septum, wherein the back board has a plurality of perforations; forming the air gap between the back board and the septum. The invention is a MEMS capacitance type microphone processed by a completely low-temperature technique. It is capable of being used as a post IC circuit processing technique being compatible thereof. The structure of the vibration diaphragm of the capacitance type microphone is a stress-releasing structure, and is capable of reducing a parasitic capacitance. Comparing with the traditional initial stress release membrane, the invention improves the sensitivity of the microphone more effectively.

A flat speaker unit is provided herein. The flat speaker unit includes a first porous electrode, a second porous electrode, and a vibrating membrane with an electret layer disposed there between. In one embodiment, a plurality of supporting members may be configured between the vibrating membrane and the first porous electrode, or between the vibrating membrane and the second porous electrode. In one embodiment, a flat speaker device is provided with at least two flat speaker unit stacked together. By electrically connecting two ends of a signal source respectively to the first and second porous electrodes, or, in another embodiment, electrically connecting one end of the signal source to both of the first and second porous electrodes and connecting another end of the signal source to the vibrating membrane, a sound with low THD is generated accordingly from the flat speaker unit.

The present micro-electro-mechanical pressure sensor includes a substrate, a dielectric isolation layer, at least two electrodes, and a vibrating membrane. The substrate includes an acoustic cavity. The dielectric isolation layer is formed on the substrate, and the dielectric isolation layer includes a through hole corresponding to the acoustic cavity. The at least two electrodes are separately formed on the dielectric isolation layer. The vibrating membrane covers the through hole, and the vibrating membrane includes at least one carbon nanotube structure with two opposite ends. The two opposite ends of the carbon nanotube are respectively connected to at least a given one of the at least two electrodes.

The present invention relates to an electromechanical transducer capable of arbitrarily varying the amount of deflection of a vibrating membrane for every element.The electromechanical transducer includes a plurality of elements including at least one cell that includes a first electrode and a second electrode opposed to the first electrode with a gap sandwiched therebetween and a direct-current voltage applying unit configured to be provided for each element and to separately apply a direct-current voltage to the first electrodes in each element. The first electrodes and the second electrodes are electrically separated for every element.

The invention provides a piezoelectric ultrasonic transducer and a manufacturing method thereof. The piezoelectric ultrasonic transducer comprises a base, a vibrating membrane, a first electrode, a piezoelectric membrane and a second electrode, wherein the center of the base is provided with a cavity; the vibrating membrane is fixed to the base; the first electrode, the piezoelectric membrane and the second electrode are sequentially deposited on the vibrating membrane along a direction from the base to the vibrating membrane; the piezoelectric ultrasonic transducer is characterized in that the vibrating membrane comprises a first vibrating membrane and a second vibrating membrane, wherein the first vibrating membrane is positioned at the center; the second vibrating membrane is positioned at the outer side of the first vibrating membrane; the first vibrating membrane and the second vibrating membrane are arranged in a spaced manner and are connected with each other through an elastic structure layer; and the piezoelectric ultrasonic transducer is also provided with a through hole at a position corresponding to the elastic structure layer, wherein the through hole penetrates through the second electrode, the piezoelectric membrane and the first electrode. The piezoelectric ultrasonic transducer provided by the invention can improve output of sound pressure.

Provided is an acoustic transducer including: a semiconductor substrate; a vibrating membrane provided above the semiconductor substrate, including a vibrating electrode; and a fixed membrane provided above the semiconductor substrate, including a fixed electrode, the acoustic transducer detecting a sound wave according to changes in capacitances between the vibrating electrode and the fixed electrode, converting the sound wave into electrical signals, and outputting the electrical signals. At least one of the vibrating electrode and the fixed electrode is divided into a plurality of divided electrodes, and the plurality of divided electrodes outputting the electrical signals.

The invention provides a generator capable of collecting acoustic energy, which combines a Helmholtz acoustic resonance cavity and a triboelectric nanometer generating component. The triboelectric nanometer generating component with thin membrane structures is arranged on the outer wall or at the opening position of the Helmholtz acoustic resonance cavity. Sound passes through the acoustic resonance cavity to allow an electrode layer and a frictional layer of the triboelectric nanometer generating component to mutually contact and separate and to generate electric energy on two electrode layers. The generator does not need to be provided with a vibrating membrane, and can reduce unnecessary acoustic energy loss, and efficiently convert sound energy into electric energy; the generate can be used as a sound sensor which does not need a power supply, and is a self-driven passive sound sensor.

The invention relates to an absolute pressure transducer chip which comprises an absolute pressure transducer integrated on a complementary metal-oxide-semiconductor transistor (CMOS) chip. The absolute pressure transducer comprises a pressure sensitive unit, the pressure sensitive unit comprises a field-effect tube and a vibrating membrane, the field-effect tube comprises a floating gate, the vibrating membrane is provided with polycrystalline silicon or metal materials serving as grids in inserting mode and is used for inducing absolute pressure change, the floating gate is embedded in a dielectric layer of the CMOS chip, and a cavity is formed on the vibrating membrane and sealed. In the absolute pressure transducer chip, a sacrificial layer and the electric conductive vibrating membrane are manufactured on a metal electric conductive layer of an integrated circuit formed by aid of the CMOS standard manufacture process, and finally a pressure transducer micro-unit is manufactured, the existing CMOS process is not changed, and the absolute pressure transducer chip is good in compatibility. In addition, the invention further relates to a production method of the absolute pressure transducer chip.

The invention provides a noise power-generating device and noise power-generating equipment consisting of the same. The noise power-generating device comprises a sound wave collecting pipe, wherein one end of the sound wave collecting pipe is opened; an air-isolating and sound-transmitting thin film is sealed at the opening of the sound wave collecting pipe; a trumpet-shaped inlet is also formed at the opening of the sound wave collecting pipe; a sound-isolating plate is arranged outside the sound wave collecting pipe 4; one end of the sound-isolating plate is connected with the trumpet-shaped inlet 1; the other end of the sound-isolating plate is connected with the closed end of the sound wave collecting pipe 4; the sound-isolating plate and the outer wall of the side surface of the sound wave collecting pipe form a cavity; a plurality of columns of acoustical-electrical converting units which are uniformly arranged along the axial direction are arranged on the side surface of the sound wave collecting pipe; each of the acoustical-electrical converting unit comprises a helmholtz resonator with a resonating cavity and an acoustical-electrical converter connected with the helmholtz resonator; the acoustical-electrical converter comprises a vibrating film arranged in the cavity in the tail end of the resonating cavity and connected with a coil through a connecting rod; a coil is sleeved on a magnetic pole; and the magnetic pole is arranged on the sound-isolating plate. The coil is connected with an output bus through a current-collecting wire, so that the mechanical energy of noise is converted into electric energy.

A bowl-shaped cover (1) with a hole at the bottom replaces the cover with a sound hole of the conventional earphone, thus creating a constant space. The earphone sound vibrates the cover (1) by beating the inside of the cover (1) and then the vibration is transmitted to a rubber drumhead (vibrating membrane) (2) which is attached onto the cover (1). The rubber drumhead (vibrating membrane) (2) of the earphone works as a soft earmuff and makes wearing feel soft and comfortable. The present invention relates to the earphone that converts sound into vibration and also isolates sound.

The invention relates to a soft support bridge type silicon micro-piezoelectric ultrasonic transducer chip which comprises a silicon substrate with a square conical hole which is small at the top andbig at the bottom in the center; a silicon layer and a first oxidation layer are sequentially covered on the front surface of the silicon substrate, and a second oxidation layer is covered on the backsurface; the corresponding silicon layer and the first oxidation layer above the square hole of the front surface of the silicon substrate constitute a square vibration membrane, one pair of oppositesides of the square vibration membrane respectively etch a vertical narrow slot, and the vertical projection of each narrow slot is positioned on the inner side of the hole edge above the front surface of the silicon substrate; a lower electrode, a piezoelectric membrane and an upper electrode are sequentially deposited on the square vibration membrane; a polyimide membrane is deposited on various parts on the front surface of the silicon substrate; and the square vibration membrane which is etched with the vertical narrow slots and the polyimide membrane commonly constitute a soft support anti-sound leakage bridge type vibration membrane. The anti-sound leakage bridge type structure is used on the vibration membrane of the transducer; in order to avoid sound leakage through the narrow slots, the soft polyimide membrane is deposited on the narrow slots, which has little effect on vibration of the vibration membrane and can still keep high sensitivity.

A micro-silicon microphone of capacity type is prepared using back electrode plate with conduction function as one electrode of capacity and using vibration membrane with conduction function as another electrode of capacity, using multiple insulation support to support vibration membrane, firm-jointing said supports with vibration membrane and back electrode plate and arranging narrow groove on said vibration membrane for making vibration membrane be not sensitive on residual stress.

The invention discloses a vibrating membrane filtration device which comprises a vibration generation device fixedly connected with a support, a membrane component and a vibration transmission device used for connecting the vibration generation device and the membrane component; the vibration generation device is a motor; the vibration transmission device comprises a bottom plate, a counterweight, an elastic spindle, a transmission shaft and an eccentric block; one end of the elastic spindle is fixedly connected with the center of the bottom plate, and the other end thereof is fixedly connected with the membrane component; the counterweight and the eccentric block are respectively and fixedly connected with both ends of the center of the bottom plate; the rotating shaft of the motor is connected with the eccentric block through the transmission shaft; and the membrane component is provided with a concentrated water pipe, a water inlet pipe and a water outlet pipe, and a filter membrane is arranged in the membrane component. The invention can effectively prevent the filter membrane from being blocked, maintains stable water flux, effectively solves the technical difficult problems of low membrane flux and membrane blockage of wastewater during the filtration process so that a membrane separation technology can be better applied in an industrial wastewater treatment method, thereby not only improving the water treatment efficiency, but also reducing the water treatment cost.

A speaker diaphragm supporting structure includes a basket defining a flared front opening and an internal shoulder portion, and having annular magnet mounted to a rear side thereof; a voice coil located in the annular magnet; a diaphragm including a soft suspended flange for fixing to the flared front opening of the basket, a rigid vibrating membrane having a centered voice coil fixing hole for gluing to around the voice coil, a plurality of supporting legs integrally formed on a rear side thereof and a fixing ring portion glued to rear ends of the supporting legs; and a flexible suspension member having an outer circumferential edge set on the internal shoulder portion of the basket and an inner circumferential edge glued to the fixing ring portion, so that the suspension member is held to around an outer side of the annular magnet.

The piezoelectric combining jet device includes a silicon base, a cavity, a jet, a vibrating membrane and a piezoelectric actuator. It features the piezoelectric actuator comprising piezoelectric material, and one upper electrode and one lower electrode adhered separately to the upper and lower surfaces of the piezoelectric material. The piezoelectric combining jet device is made through an electrochemical etching process, which includes preparing a porous silicon layer, releasing porous silicon to form cavity, inducing coupled plasma etching to form the jet, low pressure chemical vapor depositing the vibrating silicon diaphragm, and sol-gel process to prepare the piezoelectric film. The piezoelectric combining jet device with cavity, jet, vibrating silicon diaphragm and piezoelectric film prepared on the identical silicon base has high reliability and consistency.

The present invention relates to a method and apparatus for speckle noise reduction in laser scanning projection display. In particular, a MEMS device with a vibrating membrane through which light rays are refracted with temporally varying angles is provided for reducing the effect of speckling.

An implantable cardiovascular blood pump system is provided, suitable for use as a left ventricular assist device (LVAD) system, having an implantable cardiovascular pump, an extracorporeal battery and a controller coupled to the implantable pump, and a programmer selectively periodically coupled to the controller to configure and adjust operating parameters of the implantable cardiovascular pump. The implantable cardiovascular blood pump includes a coaxial inflow cannula and outflow cannula in fluid communication with one another and with a pumping mechanism. The pumping mechanism may be a vibrating membrane pump which may include a flexible membrane coupled to an electromagnetic actuator assembly that causes wavelike undulations to propagate along the flexible membrane to propel blood through the implantable cardiovascular pump. The implantable cardiovascular pump may be programmed to operate at frequencies and duty cycles that mimic physiologic flow rates and pulsatility while avoiding thrombus formation, hemolysis and / or platelet activation.

The invention discloses a variable frequency and jet flow oscillator which is used for controlling the high-frequency switching of jet flow in different pipelines. The upper end face of a single-film double-cavity vibration exciter is in parallel fit with the lower surface of an oscillation jet flow component, and the upper surface of the oscillation jet flow component is in parallel fit with thelower surface of a cover plate; the upper surface of the cover plate is provided with an inlet passage; an oscillation jet flow component cusp is arranged between a first outlet passage and a second outlet passage on the oscillation jet flow component; a vibrating membrane vertical to the upper end face in the single-film double-cavity vibration exciter; the single-film double-cavity vibration exciter is divided into a first cavity and a second cavity through the vibrating membrane; the first cavity is provided with a first cavity inlet; the second cavity is provided with a second cavity outlet; and the first cavity outlet, and the second cavity outlet are connected with a first control port and a second control port of the oscillation jet flow component respectively. The working frequency of the jet flow oscillator is actively controlled by changing the excitation frequency of the oscillator and the adjusted working frequency is stable and reliable.

An electromechanical transducer of the present invention includes a first electrode, a vibrating membrane formed above the first electrode through a gap, a second electrode formed on the vibrating membrane, and an insulating protective layer formed on a surface of the second electrode side. A region where the protective layer is not formed is present on at least part of a surface of the vibrating membrane.

A reliable flat speaker unit and a speaker device with the same are provided herein. A conductive electrode of a vibrating membrane of the speaker unit is disposed on both utmost sides of the speaker unit to isolate the speaker unit from environmental moisture, which can significantly improve the reliance of the speaker device. A barrier layer can optionally be disposed on the external side of the conductive electrode to further isolating the speaker unit from moisture, which can improve the reliance and the lifetime of the speaker device. In an embodiment, at least a getter is disposed inside the flat speaker unit to absorb moisture therein. The speaker unit at least includes a electret vibrating membrane with a conductive electrode, a plurality of supporting members, and a electrode structure with a plurality of holes.

A flat speaker comprising a vibrating plate including a spiral voice coil, a lead portion extracted from the vice coil and reinforced by the reinforcing member, and an electric supply line; an edge portion supporting the vibrating plate; and a yoke, supporting the edge portion, on which the permanent magnet arranged to face the voice coil. The flat speaker 1 of the invention includes a vibrating membrane 2 of an insulating base film 3 with a spiral or meandering voice coil 4 formed on one or both faces thereof, a permanent magnet 5 arranged on corresponding location facing the voice coil 4; and a yoke 6 on which the permanent magnet 5 is arranged. The vibrating membrane 2 is avoided from hitting the permanent magnet by providing a perforated sheet on the back face of the yoke to control acoustic resistance.

The invention discloses a differential MEMS (Micro-electromechanical Systems) capacitive microphone and a preparation method for the microphone, wherein the capacitive microphone comprises a substrate, a back cavity, an upper electrode plate, a lower electrode plate, a middle electrode plate and a vibrating membrane. An edge of the vibrating membrane is fixedly connected onto the substrate, at least one open pore is arranged on the vibrating membrane, and the back cavity is arranged below the vibrating membrane; the middle electrode plate is arranged between the upper electrode plate and the lower electrode plate, a first capacitor is formed by the upper electrode plate and the middle electrode plate, and a second capacitor is formed by the lower electrode plate and the middle electrode plate; the middle electrode plate is fixedly connected onto the vibrating membrane and used for changing the position of the middle electrode plate when the vibrating membrane is vibrated along with a sound, so that capacitance values of the first capacitor and the second capacitor can be changed; and a differential capacitor pair is formed by the first capacitor and the second capacitor, and is used for an electric connection in a differential mode and can carry out gathering and processing for an electrical signal.