The invention provides a single-
crystal piezoelectric thin film-based
sound wave resonator and a fabrication method thereof. The fabrication method comprises the steps of 1) providing a single-crystalpiezoelectric substrate; 2) forming a patterned lower
electrode on an injection surface after
ion injection onto the single-
crystal piezoelectric substrate from the injection surface, or forming a uniform lower
electrode on the injection surface, and patterning the uniform lower
electrode to form a patterned lower electrode after
ion injection onto the single-
crystal piezoelectric substrate froma uniform lower electrode surface; 3) forming a first low sound-resistant material layer with a preset thickness on a patterned lower electrode surface; 4) providing a support substrate having a second low sound-resistant material layer with a preset thickness on a surface, bonding the structure obtained in the step 3) and the support substrate; 5) stripping a part of single-crystal piezoelectricsubstrate along a defect layer to obtain a single-crystal piezoelectric thin film; and 6) forming a patterned upper electrode on a surface, far away from the support substrate, of the single-crystal piezoelectric thin film. By the fabrication method, an air-cavity resonant structure is prevented, the
mechanical property is stable, a great
electromechanical coupling efficient is maintained, and theworking bandwidth of a filter can be improved.