Differential MEMS (Micro-electromechanical Systems) capacitive microphone and preparation method thereof
A condenser microphone and differential capacitor technology, applied in electrical components, electrostatic transducer microphones, sensors, etc., can solve the problems of increasing the noise of silicon microphones, limiting the overall noise level of silicon microphones, and achieving high microphone sensitivity and small air gap. , the effect of high microphone signal-to-noise ratio
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[0028] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0029] figure 1 It is a schematic diagram of a differential MEMS capacitive microphone according to an embodiment of the present invention, which includes: a substrate 301, a back cavity 305, an upper plate, a lower plate 302, a middle plate 303, a vibrating membrane 304, and a vibrating membrane 304 At least one opening 306 and a differential capacitance detection unit (not shown in the figure), wherein the edge of the vibrating membrane 304 is fixedly connec...
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