724 results about "Spatial image" patented technology

A partial section of an aerial image measuring unit is arranged at a wafer stage and part of the remaining section is arranged at a measurement stage, and the aerial image measuring unit measures an aerial image of a mark formed by a projection optical system. Therefore, for example, when the aerial image measuring unit measures a best focus position of the projection optical system, the measurement can be performed using the position of the wafer stage, at which a partial section of the aerial image measuring unit is arranged, in a direction parallel to an optical axis of the projection optical system as a datum for the best focus position. Accordingly, when exposing an object with illumination light, the position of the wafer stage in the direction parallel to the optical axis is adjusted with high accuracy based on the measurement result of the best focus position.

A method of repairing a semiconductor phase shift mask comprises first providing a semiconductor mask having a defect and then illuminating the mask to create an aerial image of the mask. Subsequently, the aerial image of the mask is analyzed and the defect in the mask is detected from the aerial image. An ideal mask image is defined and compared to the aerial image of the defective mask to determine the repair parameters. Unique parameters for repairing the mask defect are determined by utilizing the aerial image analysis and a look-up table having information on patch properties as a function of material deposition parameters. The mask is then repaired in accordance with the parameters to correct the mask defect. A patch of an attenuated material may be applied to the mask or a predetermined amount of material may be removed from the mask. The aerial image of the repair is analyzed to determine whether the repair sufficiently corrects the defect within predetermined tolerances.

A digital camera system including a first video capture unit for capturing a first digital video sequence of a scene and a second video capture unit that simultaneously captures a second digital video sequence that includes the photographer. A data processor automatically analyzes first digital video sequence to determine a low-interest spatial image region. A facial video sequence including the photographer's face is extracted from the second digital video sequence, and inserted into the low-interest spatial image region in the first digital video sequence to form the composite video sequence.

A method for separately calibrating an optical model and a resist model of lithography process using information derived from in-situ aerial image measurements to improve the calibration of both the optical model and the resist model components of the lithography simulation model. Aerial images produced by an exposure tool are measured using an image sensor array loaded into the exposure tool. Multiple embodiments of measuring aerial image information and using the measured aerial image information to calibrate the optical model and the resist model are disclosed. The method of the invention creates more accurate and separable optical and resist models, leading to better predictability of the pattern transfer process from mask to wafer, more accurate verification of circuit patterns and how they will actually print in production, and more accurate model-based process control in the wafer fabrication facility.

An apparatus that collects and processes physical space data while performing an image-guided procedure on an anatomical area of interest includes a calibration probe that collects physical space data by probing a plurality of physical points, a tracked ultrasonic probe, a tracking device that tracks the ultrasonic probe in space and an image data processor. The physical space data provides three-dimensional coordinates for each of the physical points. The image data processor includes a computer-readable medium holding computer-executable instructions. The executable instructions include determining registrations used to indicate position in both image space and physical space based on the physical space data collected by the calibration probe; using the registrations to map into image space, image data describing the physical space of the tracked ultrasonic probe used to perform the image-guided procedure and the anatomical area of interest; and constructing a three-dimensional volume based on the ultrasonic image data on a periodic basis.

Methods and systems for inspecting a reticle are provided. In an embodiment, a method may include forming an aerial image of the reticle using a set of exposure conditions. The reticle may include optical proximity correction (OPC) features. The method may also include detecting defects on the reticle by comparing the aerial image to a reference image stored in a database. The reference image may be substantially optically equivalent to an image of the reticle that would be printed on a specimen by an exposure system under the set of exposure conditions. The reference image may not include images of the OPC features. Therefore, a substantial portion of the defects include defects that would be printed onto the specimen by the exposure system using the reticle under the set of exposure conditions. The method may also include indicating the defects that are detected in critical regions of the reticle.

A digital camera functioning as an information presentation device is provided with a CG superimposition unit 17 which functions so that a virtual object is superimposed on a real space image captured by an imaging element 3, and is displayed on a display unit 23; a visual line detection unit 12 which detects a visual line of a person included in the real space image captured by the imaging element 3; and a superimposing position determination unit 11 which determines a superimposing position of the virtual object on the basis of the visual line detected by the visual line detection unit 12.

A method of simulating aerial images of large mask areas obtained during the exposure step of a photo-lithographic process when fabricating a semiconductor integrated circuit silicon wafer is described. The method includes the steps of defining mask patterns to be projected by the exposure system to create images of the mask patterns; determining an appropriate sampling range and sampling interval; generating a characteristic matrix describing the exposure system; inverting the matrix to obtain eigenvalues as well as the eigenvectors (or kernels) representing the decomposition of the exposure system; convolving the mask patterns with these eigenvectors; and weighing the resulting convolution by the eigenvalues to form the aerial images. The method is characterized in that the characteristic matrix is precisely defined by the sampling range and the sampling interval, such that the sampling range is the shortest possible and the sampling interval, the largest possible, without sacrificing accuracy. The method of generating aerial images of patterns having large mask areas provides a speed improvement of several orders of magnitude over conventional approaches.

Provided is photo retouching software which is easy for photo studio personnel to use. Upon opening photo image(s), special photo retoucher 11 converts photo image data thereof to working color space image data. At such time(s), if working ICC profile(s) is / are set which is / are different from ICC profile(s) previously embedded in such photo image file(s), color perceptual matching is carried out on the photo image data thereof based on such embedded ICC profile(s) and working ICC profile(s) when such photo image file(s) is / are opened. Furthermore, when such photo image(s) is / are displayed at monitor(s), such image data is converted to monitor color space image data through color matching using working ICC profile(s) and monitor ICC profile(s).

In one aspect, the present invention is a technique of, and a system and sensor for measuring, inspecting, characterizing and / or evaluating optical lithographic equipment, methods, and / or materials used therewith, for example, photomasks. In one embodiment, the system, sensor and technique measures, collects and / or detects an aerial image produced or generated by the interaction between the photomask and lithographic equipment. An image sensor unit may measure, collect, sense and / or detect the aerial image in situ—that is, the aerial image at the wafer plane produced, in part, by a product-type photomask (i.e., a wafer having integrated circuits formed during the integrated circuit fabrication process) and / or by associated lithographic equipment used, or to be used, to manufacture of integrated circuits. In this way, the aerial image used, generated or produced to measure, inspect, characterize and / or evaluate the photomask is the same aerial image used, generated or produced during wafer exposure in integrated circuit manufacturing. In another embodiment, the system, sensor and technique characterizes and / or evaluates the performance of the optical lithographic equipment, for example, the optical sub-system of such equipment. In this regard, in one embodiment, an image sensor unit measures, collects, senses and / or detects the aerial image produced or generated by the interaction between lithographic equipment and a photomask having a known, predetermined or fixed pattern (i.e., test mask). In this way, the system, sensor and technique collects, senses and / or detects the aerial image produced or generated by the test mask—lithographic equipment in order to inspect, evaluate and / or characterize the performance of the lithographic equipment.

Methods and systems for inspecting a reticle are provided. A method may include forming an aerial image of the reticle with an inspection system at a wavelength different from a wavelength of an exposure system. The method may also include correcting the aerial image for differences between modulation transfer functions (MTF) of the inspection system and the exposure system. In this manner, the corrected aerial image may be substantially equivalent to an image of the reticle that would be printed onto a specimen by the exposure system at the wavelength of the exposure system. In addition, the method may include detecting defects on the reticle using the corrected aerial image. The detected defects may include approximately all of the defects that would be printed onto a specimen by the exposure system using the reticle.

The invention relates to a device and method for composition based on a small quad-rotor unmanned aerial vehicle and belongs to the technical field of mobile robot positioning and navigation. The small quad-rotor unmanned aerial vehicle can rapidly enter a complex environment which a mobile robot cannot enter, carried laser radar is utilized to construct a two-dimensional map in real time according to an SLAM method, self localization and navigation of the unmanned aerial vehicle can be achieved by combining an IMU device and the like, and efficient exploration of a true complex area is achieved; the height of the small quad-rotor unmanned aerial vehicle can be conveniently adjusted to obtain two-dimensional maps on horizontal planes of different heights; the small quad-rotor unmanned aerial vehicle is rapid in movement speed and more flexible, movement and mapping of the small quad-rotor unmanned aerial vehicle are not subject to disturbance of obstacles on the ground, the range limitation of a detecting robot is broken through, the small quad-rotor unmanned aerial vehicle is extremely high in practical value, and accurate and rapid map construction can be achieved; compared with robot environment composition, the rotor wing robot can perform environment scouting more rapidly and more flexibly, and three-dimensional spatial images can be obtained.

An OLED display device includes: an array of light emitting pixels, each pixel having red, green, and blue OLEDs and at least one additional colored OLED that expands the gamut of the display device relative to the gamut defined by the red, green and blue OLEDs, wherein the luminance efficiency or the luminance stability over time of the additional OLED is higher than the luminance efficiency or the luminance stability over time of at least one of the red, green, and blue OLEDs; and means for selectively driving the OLEDs with a drive signal to reduce overall power usage or extend the lifetime of the display while maintaining display color accuracy. In accordance with various embodiments, the present invention provides a color display device with improved power efficiency, longer overall lifetime, expanded color gamut with accurate hues, and improved spatial image quality.

A system for aerial image detection and classification is provided herein. The system comprising_an aerial image database storing one or more aerial images electronically received from one or more image providers, and an object detection pre-processing engine in electronic communication with the aerial image database, the object detection pre-processing engine detecting and classifying objects using a disparity mapping generation sub-process to automatically process the one or more aerial images to generate a disparity map providing elevation information, a segmentation sub-process to automatically apply a pre-defined elevation threshold to the disparity map, the pre-defined elevation threshold adjustable by a user, and a classification sub-process to automatically detect and classify objects in the one or more stereoscopic pairs of aerial images by applying one or more automated detectors based on classification parameters and the pre-defined elevation threshold.

The invention discloses a method for locating a vehicle license plate in complex background. The method comprises the following steps: (1). Differentiating a gray scale mean of a fixed-size region and extracting a vehicle body image from a video; (2). preprocessing the vehicle body image such as gradation, gradient information enhancing, binarization and the like; (3). performing mathematical morphology operation on the processed vehicle body image, and performing primary screening by combining structural features of the vehicle license plate to obtain a plurality of candidate vehicle license plate regions; (4). converting the obtained candidate vehicle license plate regions into an HSV color spatial image; (5). adopting a BP neural network to perform color identification on the HSV color spatial candidate vehicle license plate image, and performing color edge detection by computing the mean color distance between two adjacent regions of a certain pixel; (6). judging edge color pair of an edge point, and eliminating the false vehicle license plate edge; and (7). performing final vehicle license plate location by the texture feature of the vehicle license plate. The method is suitable for complex background, and has higher location accuracy rate and higher robustness.

A mixed reality space image generation apparatus for generating a mixed reality space image formed by superimposing virtual space images onto a real space image obtained by capturing a real space, includes an image composition unit (109) which superimposes a virtual space image, which is to be displayed in consideration of occlusion by an object on the real space of the virtual space images, onto the real space image, and an annotation generation unit (108) which further imposes an image to be displayed without considering any occlusion of the virtual space images. In this way, a mixed reality space image which can achieve both natural display and convenient display can be generated.

A method for generating a simulated aerial image includes forming a reference aerial image of a first mask using an optical system, and capturing and processing the reference aerial image so as to generate a set of expansion functions representative of the optical system. The simulated aerial image of a second mask is then computed by applying the expansion functions to a design of the second mask.

Model OPC is developed based on eigen decomposition of an aerial image expected to be produced by a mask pattern on a surface of a resist. With the eigen decomposition method the aerial image intensity distribution around a point (x, y) is accurately described in the model. A scalar approach may be used in the eigen decomposition model which treats the light wave through the mask as a scalar quantity. A eigen decomposition alternatively may use a vector approach which utilizes a vector to describe the light wave and the pupil function. A predicted SPIF may be generated from the aerial image which may be used to verify the mask modeling process by comparing the predicted SPIF to an experimentally determined SPIF. The model OPC, once calibrated, may be used to evaluate performance of a mask and refine features of the mask.

Control of a presentation computer is accomplished by a wireless optical pointer that projects an encoded control cursor onto a projection screen in an interactive presentation system. The optical pointer is selectively operable in a position-dependent, control cursor spot projection mode by actuation of a first push button switch that enables remote initiation of various computer keyboard commands and / or pointing device (mouse, touch pad, track ball) position-dependent cursor operations, e.g., select, move, left click, right click and double click. Operation of the pointer in a presentation function selection mode is initiated by actuation of a second push button switch in which a predetermined spatial image pattern can be projected onto the screen by gesturing, thereby enabling remote annotating or highlighting an object on the display screen. Optionally, operation of the pointer in the presentation function selection mode can be initiated by stylus actuation of a control switch which allows the presenter, while standing in close proximity or within reach of a presentation screen, to underline a word, highlight an object, circle an object, strike out a word or object, insert a note next to a word or object, or annotate an object or word with a check mark. These actions are performed by manually drawing a stylus across the area of the presentation screen that is to be annotated, marked or highlighted.

Provided is a method, apparatus, and medium for controlling a mobile device based on the image of a real space including the mobile device, more particularly, a method and apparatus for moving a mobile device based on the image of a real space photographed by a remote control of a user. The apparatus includes an image acquisition unit acquiring the image of the real space including the mobile device using an image input unit of a remote control; an image output unit outputting the acquired image on an output unit of the remote control; a position detection unit recognizing the mobile device from the output image and detecting a position of the mobile device using the remote control; a target position detection unit converting a target position of the mobile device, which is selected by a user on the output unit, into a target position in the real space; and a movement control unit moving the mobile device to the target position in the real space.

An image processing apparatus is connected to a print unit adapted to print an image, and can output an image to be printed to the print unit. The apparatus includes an image sensing unit adapted to capture a real space image, a generation unit adapted to generate a virtual space image according to a viewpoint position and orientation of the image sensing unit, and a composition unit adapted to obtain a mixed reality space image by combining the real space image captured by the image sensing unit and the virtual space image generated by the generation unit. In addition, a display unit is adapted to display a mixed reality space image obtained by the composition unit, and an output unit is adapted to output a mixed reality space image, which is obtained by the composition unit, to the print unit in response to an input of a print instruction. The generation unit generates a virtual space image to be displayed by the display unit according to a first procedure, and generates a virtual space image to be outputted by the output unit according to a second procedure which is different from the first procedure.

A staring imaging system inputs a 2D spatial image containing multi-frequency spectral information. This image is encoded in one dimension of the image with a cyclic Hadamarid S-matrix. The resulting image is detecting with a spatial 2D detector; and a computer applies a Hadamard transform to recover the encoded image.

A system to sense an aerial image produced by optical equipment used in, for example, semiconductor fabrication. In one embodiment, the system includes a photo-electron emission device which, in response to an aerial image projected thereon, emits electrons in a pattern corresponding to the light intensity distribution produced by the aerial image. Electron optics provides an enlarged pattern of the pattern in which the electrons are emitted. A sensing unit senses the enlarged pattern. In another embodiment, the system employs a photo-conducting layer to project the aerial image thereon. The photo-conducting layer, in response to the projection of the aerial image thereon, produces local charge depletion corresponding to the light intensity distribution. A steering device delivers electrons to the photo-conducting layer to produce local re-charging currents in proportion to the local charge depletion. A pattern corresponding to the aerial image may be obtained from the re-charging currents.

In a case where a position and / or orientation of a shooting viewpoint is calculated by using information about image coordinates of markers placed in a scene, the present invention enables a user to easily determine positions of the markers so that the position and orientation can be calculated more accurately. Information about markers placed in a physical space is obtained and area information about mixing accuracy between a physical space image and a virtual space image is obtained based on the information about the markers, so that a virtual space image is generated in accordance with the obtained area information.

The present invention is intended to display page space layout images substantially similar to the page space images of actual newspapers and magazines and, on the basis of these images, display news items having legible character size. Display blocks for displaying images based on the electronic information having the image information of a page space having a plurality of news items and the news-item contents information associated with each news item and operation means such as a jog lever are arranged. Page space images of a newspaper for example are displayed on these display block and news-item markers corresponding to news items are displayed. When the news-item marker corresponding to a desired news item is selected, an image of the news-item contents information associated with the news-item indicated by the displayed news-item marker is displayed on the display block.