49 results about "Saw (device)" patented technology

The invention relates to a surface acoustic wave (Surface Acoustic Wave, SAW) device on the basis of a flexible substrate and a preparation method thereof. The SAW device comprises a substrate, a bottom electrode layer, a piezoelectric layer and a top electrode layer. A working area is formed by the bottom electrode layer, the piezoelectric layer and the top electrode layer. The SAW device is characterized in that the flexible substrate is arranged below the bottom electrode layer; and the flexible substrate is provided with an opening. The SAW device and the preparation method thereof have the characteristics that 1, due to the adoption of the flexible substrate, the obtained device is light, can be mounted on a curved surface, can be continuously produced in a roll-to-roll mode, and has simple manufacturing process and low cost; and 2, the flexible substrate is subjected to reverse side body deep etching to form the opening so that sound waves are spread in the piezoelectric layer in a plate wave mode, a high resonant frequency can be obtained, and meanwhile, the energy of the sound waves is limited in the working area so that a high device Q value can be obtained. Moreover, when a plate wave mode resonator is applied to a liquid sensor, the Q value cannot be reduced due to the radiation of the energy into the liquid.

A SAW device includes an IDT which is provided on the principal surface of a quartz crystal substrate having Euler angles (−1.5°≦φ≦1.5°, 117°≦θ≦142°, |ψ|90°×n (where n=0, 1, 2, 3)) and excites a Rayleigh wave (wavelength: λ) in a stopband upper end mode. Inter-electrode-finger grooves are recessed between electrode fingers of the IDT. An IDT line occupancy η and an inter-electrode-finger groove depth G satisfy a predetermined relationship in terms of the wavelength λ, such that the SAW device has a frequency-temperature characteristic of a cubic curve having an inflection point between a maximum value and a minimum value in an operation temperature range. The inflection point is adjustable to a desired temperature or a desired temperature range depending on the IDT line occupancy η within an operation temperature range.

The subject invention is related to wireless proximity sensor and sensing system for detecting the position of an object. The system includes a transceiver for providing wireless communication with a passive wireless surface acoustic wave (SAW) proximity sensor. The wireless proximity sensor receives a wireless signal from the transceiver, which powers the SAW device and in turn transmits a signal back to the transceiver that includes information about the position of an object. The wireless proximity sensor uses one or more SAW devices with a sensing element made of magnetostrictive material, in conjunction with one or more magnets and one or more targets that are positioned relative to an object. The movement of the target(s) in relation to the proximity sensor operatively produces a mechanical response due to the shift in the magnetic field of the sensing element. The sensing element in turn enhances the magnetic field of the SAW device to which it is attached, and this information is transmitted to the transceiver as information about the position of an object.