The invention discloses a polar coordinate sampling-based cross
transfer function quick
decomposition method. The method comprises the following steps of 1) obtaining optical parameters of an imagingsystem; 2) obtaining coordinates (ri, theta j) of sampling points on a
spatial domain by adopting a polar coordinate sampling method; 3) calculating
light source mutual intensity functions, defined inthe specification, and
pupil functions, defined in the specification, corresponding to the sampling points through non-uniform inverse
Fourier transform; 4) calculating a cross
transfer function value, defined in the specification, of the
spatial domain corresponding to the sampling points, and establishing a sampling matrix defined in the specification; 5) establishing a group of
orthogonal basis functions defined in the specification, calculating function values, defined in the specification, of the
orthogonal basis functions in corresponding polar coordinate sampling positions, and establishing a matrix Q=[q1, q2, ...qk]; 6) performing QR
matrix decomposition, defined in the specification, on the matrix Q; 7) calculating a projection matrix and performing
singular value decomposition on the projection matrix P to obtain P=UU*; 8) obtaining a kernel function, defined in the specification, of the cross
transfer function, defined in the specification, on the
spatial domain. Quick analysis can be performed to obtain the TCC kernel function, so that
light intensity distribution calculation is quick and efficient, and actual photoetching
process design demands are met.