The invention relates to a device for measuring an extremely-low gas flow based on the static expansion vacuum standard. The device comprises a backing
pressure measurement system, a first valve, a
gas pressure relief
system, a second valve, a calibration chamber, a third valve, a
small hole, a fourth valve, a fifth valve, a
getter pump, a sixth valve, a molecular pump, a backing pump and an
ionization gauge, wherein the backing
pressure measurement system is connected with the
gas pressure relief system through the first valve, the
gas pressure relief system is connected with the calibration chamber through the second valve, the
small hole is connected in parallel with the fourth valve to form a parallel structure and then one end of the parallel structure is connected with the calibration chamber through the third valve and the other end of the parallel structure is connected with a vacuum system, the
getter pump is connected with the calibration chamber through the fifth valve, the backing pump is connected in series with the molecular pump and then connected with the calibration chamber through the sixth valve, and the
ionization gauge is directly connected on the calibration chamber. The invention adopts the gas pressure generated by the static expansion vacuum standard to replace the introduced gas pressure of the gas flow meter in the constant
conductance method, so as to further improve the gas flow measurement accuracy.