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Supersensitivity leakage detecting device with lower limit being 10<-16> Pam<3>/s and method

An ultra-sensitive, leak-detecting technology, used in the testing of measuring devices, machines/structural components, and liquid/vacuum tightness measurement, etc. The effect of bottom pressure

Inactive Publication Date: 2019-02-12
BEIJING DONGFANG MEASUREMENT & TEST INST
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The above leak detection methods all use the standard leak to provide the standard flow rate, and use the standard leak extrapolation method to detect the leak rate. Using this method for leak detection, the greater the difference between the detected leak rate and the standard leak, the lower the detection accuracy. Its leak rate error can reach an order of magnitude

Method used

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  • Supersensitivity leakage detecting device with lower limit being 10&lt;-16&gt; Pam&lt;3&gt;/s and method

Examples

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Effect test

example 1

[0038] S1. Turn on the power supply of the device and open the air source for supplying air to the flapper valve; start the detection program, and the program performs self-inspection on the status of the valve and pump;

[0039] S2. Turn on the vacuum gauge G1; install the leak of the tested sample on the fourth vacuum valve V4, and open the fourth vacuum valve V4 and the fifth vacuum valve V5;

[0040] S3. Start the mechanical pump RP1, open the first vacuum valve V1 and the second vacuum valve V2, and start the molecular pump TMP1 to pump air to the leak detection system after the value of the vacuum gauge G1 is less than 100Pa. The indicated value is 8.9×10 - 5 Pa, turn on the quadrupole mass spectrometer QMS;

[0041] S4. The vacuum indicated by the vacuum gauge G1 is 6.8×10 -6 At Pa, the QMS detects that the ion current of He is 5.0E-14A, and closes the fourth vacuum valve V4 and the fifth vacuum valve V5;

[0042] S5, open the third vacuum valve V3, start the getter...

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Abstract

The invention relates to a supersensitivity leakage detecting device with the lower limit being 10<-16> Pam<3> / s and a method. The supersensitivity leakage detecting device comprises a dry pump (RP1),a molecular pump (TMP1), a getter pump (NEG1), a vacuum gauge (G1), a four-stage mass spectrometer (QMS), a first vacuum valve, a second vacuum valve, a third vacuum valve, a fourth vacuum valve, a fifth vacuum valve, a detecting chamber (VC1), a constant conductance method flowmeter (FM), a gas source and a vacuum pipeline. According to the supersensitivity leakage detecting device, on the basisof a cumulative comparison method, the standard gas flow with the lower limit being 1.3*10<-16> Pam<3> / s is provided by the constant conductance method flowmeter, and thus the leakage detecting lowerlimit of the leakage detecting device is extended to 10<-16> Pam<3> / s.

Description

technical field [0001] The invention belongs to the technical field of vacuum measurement, in particular to a minimum detectable leak rate based on cumulative comparison of 10 - 16 Pam 3 / s ultra-sensitive leak detection device and method. Background technique [0002] Vacuum leak detection technology has been widely used in semiconductor, high-energy physics, aerospace, refrigeration, electric power, biomedical and other industries, and has become an important technology for product quality assurance. At present, the lower limit of leak detection for general commercial leak detectors is 10 -12 Pam 3 / s level, the document "Ultrasensitive leak detection during ultrahigh vacuum evacuation by quadrupole mass spectrometer", "J.Vac.Sci.Technol A" 2006 No. 1, pp. 91-94", introduces the use of quadrupole mass spectrometer combined The dynamic accumulation method realizes the method for ultra-sensitive leak detection, and this method adopts 10 -7 Pa·m 3 / s leak hole and a se...

Claims

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Application Information

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IPC IPC(8): G01M3/20
CPCG01M3/202G01M3/205
Inventor 卢耀文刘志宏闫睿董云宁杨传森
Owner BEIJING DONGFANG MEASUREMENT & TEST INST
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