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Device and method for measuring pumping speed and outgasing rate of ionization gauge

A measurement device and measurement method technology, applied in the field of measurement, can solve the problem of inability to accurately calculate the absolute gas output rate of an ionization gauge, that is, the gas output rate, etc., and achieve small measurement uncertainty, calculation of pumping speed and gas output rate, pumping speed and gas output. Rate-accurate effects

Active Publication Date: 2010-05-19
NO 510 INST THE FIFTH RES INST OFCHINA AEROSPAE SCI & TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

This patented technology allows for accurate measurements over large ranges by measuring specific gases through an electric current method called electrospray (ES). It also includes precise calculations on how well these values are being delivered from this process.

Problems solved by technology

This patented technical problem addressed in the present describes how current methods used to determine if certain types of electrically conductive materials have been correctly identified with respect to their pump speeds during UHPT (ultraviolet ray tube) testing due to changes caused by temperature differences between specific atmospheric environments where these materials were tested compared against those without them.

Method used

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  • Device and method for measuring pumping speed and outgasing rate of ionization gauge
  • Device and method for measuring pumping speed and outgasing rate of ionization gauge

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Embodiment

[0046] 1) Start the air extraction unit 8, and exhaust the upper vacuum chamber 5 and the lower vacuum chamber 7;

[0047] 2) Start the flowmeter 1 pumping unit, and pump all the vacuum pipes of the flowmeter;

[0048] 3) Carry out overall baking and degassing of the measuring device, the baking temperature of the flowmeter 1, the measured ionization gauge 3, and the reference gauge 4 is 150°C, and the baking temperature of the upper vacuum chamber 5 and the lower vacuum chamber 7 is 300°C ℃, after the baking temperature gradually rises to the highest point at a uniform rate, keep it for 72 hours, and then gradually lowers to room temperature at a uniform rate, and the uniform rate of rising and falling of the baking temperature is 30°C / h;

[0049] 4) Continue pumping for 24-48 hours until the upper vacuum chamber 5 reaches 10 -8Ultimate vacuum in the order of Pa;

[0050] 5) Fill the flowmeter 1 with a pressure of 3.6×10 -3 Pa gas, adjust the variable conductance valve 2 t...

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Abstract

The invention discloses a device and a method for measuring the pumping speed and the outgasing rate of an ionization gauge, more particularly a device and a method for realizing the measurement of the pumping speed and the outgasing rate of an ionization gauge by adopting gas micro-flow technique, belonging to the technical field of measurement. The device is composed of a flow meter, a variable flow pilot valve, a measured ionization gauge, a reference gauge, an upper vacuum chamber, a flow limiting pore, a lower vacuum chamber and a gas pumping unit. According to the invention, the known gas flow is offered by a gas micro-flow meter in a constant conductance method, achieving wide measurement range of the flow and small uncertainness of the measurement; and the pumping speed and the outgasing rate of the measured ionization gauge can be computed accurately.

Description

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Claims

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Application Information

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Owner NO 510 INST THE FIFTH RES INST OFCHINA AEROSPAE SCI & TECH
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