The invention discloses a differential parallel optical chromatographic microscopic measuring device and method, and belongs to the technical fields of optical
microscopic imaging and precise measurement. A dual CCD
wide field differential detection method is used, an unconjugated defocus CCD imaging detection
branch is introduced on the basis of single-path CCD conjugated quasi-focus imaging detection, illuminating phase-shift image fields of the structure are collected synchronously, the near defocus detection intensity
image field is subtracted from the far defocus detection intensity
image field to obtain distribution of the wide-field differential detection
image field, differential optical theory and the Fourier optical theory are used to establish a theoretical
association model between the differential intensity field and the sample surface height, and the intensity and the displaced linear
calibration curve are used to realize
wide field chromatographic measurement for the 3D morphology of a
microstructure. The device and method can realize parallel and stereo-chromatographic
rapid detection free of axial mechanical scanning, and provide a brand new effective measurement approach for non-contact, high-resolution and rapid chromatographic image and measurement of 3D surface morphology of a micromechanical, microelectronic or micro-optical
micro nano device or the internal structure of a transparent sample.