Differential parallel optical chromatographic microscopic measuring device and method

Abstract

The invention discloses a differential parallel optical chromatographic microscopic measuring device and method, and belongs to the technical fields of optical microscopic imaging and precise measurement. A dual CCD wide field differential detection method is used, an unconjugated defocus CCD imaging detection branch is introduced on the basis of single-path CCD conjugated quasi-focus imaging detection, illuminating phase-shift image fields of the structure are collected synchronously, the near defocus detection intensity image field is subtracted from the far defocus detection intensity image field to obtain distribution of the wide-field differential detection image field, differential optical theory and the Fourier optical theory are used to establish a theoretical association model between the differential intensity field and the sample surface height, and the intensity and the displaced linear calibration curve are used to realize wide field chromatographic measurement for the 3D morphology of a microstructure. The device and method can realize parallel and stereo-chromatographic rapid detection free of axial mechanical scanning, and provide a brand new effective measurement approach for non-contact, high-resolution and rapid chromatographic image and measurement of 3D surface morphology of a micromechanical, microelectronic or micro-optical micro nano device or the internal structure of a transparent sample.

Description

Technical field: [0001] The invention belongs to the technical field of optical microscopic imaging and precision measurement, in particular to a differential parallel optical tomographic microscopic measurement device and method. Background technique: [0002] Optical microscopic measurement devices have played an important role in promoting the process of human understanding and understanding of the microscopic scientific world. In the middle and late 1950s, M. Minsky, a postdoctoral fellow at Harvard University, invented a brand new optical microscopic device, that is, the common Focus microscope, which uses point illumination and point detection, and introduces a point-by-point scanning structure to realize three-dimensional imaging of the internal structure of the sample. In 1997, on the basis of long-term research and exploration in the field of confocal microscopy, M.A.A.Neil and T.Wilson of Oxford University in the United Kingdom proposed structured illumination micr...

AI Technical Summary

Problems solved by technology

[0004] In summary, the tomographic measurement of thick samples by the current structured illumination microscopy technology is generally realized by performing mechanical step scanning on it. The mechanical step scanning not only reduces the measurement efficiency, but also affects the measurement accuracy.

The above problems limit the scope of application of structured illumination microscopy

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