The invention discloses a piezoresistive high-frequency high-temperature
dynamic pressure sensor, which consists of a piezoresistance sensitive component, a sensor
metal shell, and a high-frequency
broadband amplifier, wherein the piezoresistance sensitive component consists of a
silicon piezoresistance sensitive component and a glass ring piece; the
silicon piezoresistance sensitive component is formed by a circular-flat
silicon diaphragm which is sequentially covered by a SiO2 layer and a Si3N4 layer on the front; the middle part of the front of the silicon piezoresistance sensitive component is provided with a
Wheatstone bridge, while the silicon diaphragm is exposed at the periphery of the silicon piezoresistance sensitive component and is firmly welded to the glass ring piece; the back of the silicon piezoresistance sensitive component is provided with a
metal reflective film, and a strain
resistor on the
Wheatstone bridge is led out by a gold wire internal down-lead; the other side of the glass ring piece is fixed to an annular concave pit surface on a
ceramic isolation substrate; the
ceramic isolation substrate is sintered and fixed at a pressure inlet port of the sensor
metal shell; and after the gold wire internal down-lead on the piezoresistance sensitive component is led to an adapter plate in an inner chamber of the sensor, signals are amplified by the high-frequency
broadband amplifier and are led out through an output cable at the
tail of the sensor. The piezoresistive high-frequency high-temperature
dynamic pressure sensor still has good characteristics when bearing superhigh temperature and superhigh frequency
impact.