An implementing mode of the invention provides an improved technology for depositing materials containing
tungsten. The technology utilizes an infusion technology and a gaseous phase deposition technology, such as
atomic layer deposition (ALD), to provide
tungsten-containing materials with obviously improved surface evenness and yield. In one implementing mode, a method for forming
tungsten-containing materials on a substrate is provided. The method comprises deposing a substrate, which contains a bottom
coating deposited thereon, in a technological chamber; exposing the substrate orderly in a precursor of tungsten and reducing gases so as to deposit a tungsten
nucleation layer on the bottom
coating, during the ALD technology; and depositing a tungsten
block layer on the tungsten
nucleation layer. The invention is characterized in that the reducing gases comprise a
hydrogen gas /
hydride flow ratio of 40:1, 100:1, 500:1, 800: 1, 1000:1 or more, and comprise
hydride such as
diborane, silicane or silicoethane.