Junction diodes fabricated in standard
CMOS logic processes can be used as program selectors with at least one
heat sink or heater to assist
programming for One-Time Programmable (OTP) devices, such as electrical fuse, contact / via fuse, contact / via anti-fuse, or gate-
oxide breakdown anti-fuse, etc. The
heat sink can be at least one
thin oxide area, extended OTP element area, or other conductors coupled to the OTP element to assist
programming. A heater can be at least one
high resistance area such as an unsilicided polysilicon, unsilicided active region, contact, via, or combined in serial, or interconnect to generate heat to assist
programming. The OTP device has at least one OTP element coupled to at least one
diode in a
memory cell. The
diode can be constructed by P+ and N+ active regions in a
CMOS N well, or on an isolated active region as the P and N terminals of the
diode. The isolation between P+ and the N+ active regions of the diode in a
cell or between cells can be provided by dummy MOS gate, SBL, or STI /
LOCOS isolations. The OTP element can be polysilicon, silicided polysilicon,
silicide,
polymetal,
metal,
metal alloy, local interconnect,
metal-0, thermally isolated active region,
CMOS gate, or combination thereof.