The invention discloses a
silicone substrate high-
linearity low-phase-shift ultra-broad-band digital attenuator which comprises a 1dB attenuating module, a 2dB attenuating module, a 4dB attenuating module, a 8dB attenuating module and a 16dB attenuating module. Two NMOS
field effect transistors which are of a channel parallel-connection
resistor structure and of a
solid suspension structure and manufactured through SiGe
BiCMOS technology are adopted to be used as control switches, five sets of complementary digital signals are used for controlling the five attenuating modules independently to work, a low-pass network is used for conducting
phase compensation,
inductance is used for matching between the adjacent attenuating modules, matching between the input end of the1dB attenuating module and 50
omega input impedance and matching between the output end of the 16dB attenuating module and 50
omega output impedance are realized
through transmission wires, the working frequency range is 1-25GHz, and low-differential-loss low-phase-shift attenuation of
signal amplitudes under 32 states can be realized with the 1dB length stepping in the attenuating range of 0-31dB. The
silicone substrate high-
linearity low-phase-shift ultra-broad-band digital attenuator has the advantages of being low in differential loss, low in accessory phase shift, high in
linearity, low in production cost and low in
chip area, and can be used for large-amplitude
signal processing and
single chip integration.