The invention belongs to the technical field of
semiconductor photoelectric devices, and particularly relates to a self-driven MSM
ultraviolet detector and a preparation method thereof. The
ultraviolet detector provided by the invention comprises a substrate; the patterned low-temperature
crystallization layer is arranged on the surface of the substrate; the high-temperature epitaxial layer is arranged on the surface of the patterned low-temperature
crystallization layer and an area, not covered with the patterned low-temperature
crystallization layer, of the surface of the substrate; the high-temperature epitaxial layer arranged on the patterned low-temperature crystallization layer has
metal polarity, and the high-temperature epitaxial layer arranged on the area, not covered with the patterned low-temperature crystallization layer, of the surface of the substrate has
nitrogen polarity; the interdigital
electrode is arranged on the high-temperature epitaxial layer; the interdigital
electrode is composed of two groups of electrodes, one group of electrodes is arranged in a
metal polarity area of the high-temperature epitaxial layer, and the other group of electrodes is arranged in a
nitrogen polarity area of the high-temperature epitaxial layer. According to the MSM
ultraviolet detector provided by the invention, the
responsivity and the overall performance of the detector are remarkably improved under a simple framework of an MSM structure, so that the MSM ultraviolet detector can perform self-driven detection.