The invention is to provide a vibratory double-axially sensing micro-
gyroscope, which includes a base, on center of which a supporting hub is arranged, and plural suspending arms are extended outwardly with equal altitude and in radial direction from the supporting hub and, at the outside end of the suspending arm, a platform is formed, and a
capacitance sensing
electrode or a static-
electricity driving
electrode is plated respectively at each side of the platform top, below which a static-
electricity driving
electrode or a
capacitance sensing electrode is arranged; take a preferred embodiment of the present invention for example, if the
capacitance sensing electrode is arranged at top of the platform and the static-
electricity driving electrode is arranged below the platform, then the suspending arm and the platform will vibrate vertically by the attraction of the static-electricity when applying driving
voltage, and the vibratory
phase difference between two adjacent suspending arms and the platform is 180 degrees; when the
gyroscope is rotated horizontally, the suspending arm and the platform will generate horizontal displacement caused by
Coriolis force and, by measuring the change of capacitance value, the magnitude of the
angular velocity of vibration is obtained; since its structure has symmetrical property, so it has sensing ability in both X or Y axes and, because it has superior stability and is able to
resist environment
noise and vibration, its sensing capability is enhanced and, since its
machining method is simple, so it is adapted for
mass production for having lower manufacturing cost.