The invention relates to an electromagnetic
nozzle based on an MEMS process. The electromagnetic
nozzle based on the MEMS process comprises a conducting coil, a soft magnetic material, a
silicon material, a control
chip, a conducting fluid and an
electrode pair, wherein the conducting coil is arranged in the soft magnetic material, the
silicon material coats the soft magnetic material, the positive
electrode and the negative
electrode of the conducting coil are respectively connected with the positive electrode and the negative electrode of the
electrode pair, the control
chip is arranged at the top of the
silicon material, the conducting fluid flows out of the bottom of a spray hole penetrating through the control
chip, the silicon material and the soft magnetic material, and the
electrode pair is connected with the control chip at the top after penetrating through the soft magnetic material and the silicon material, thereby achieving micro-flowing control on the conducting fluid. After the micro electromagnetic
nozzle manufactured based on the MEMS process is electrified, the conducting coil in series connection generates a
magnetic field, the
electrode pair generates an
electric field, and an electromagnetic force formed by an
electromagnetic field drives the conducting fluid in the nozzle to vertically flow downwards; the electromagnetic nozzle based on the MEMS process has the characteristics of simple structure, high precision and frequency,
low noise, low heat and high reliability.