The invention discloses a temperature compensation
system and a temperature compensation method for a
capacitance type micro-mechanical
accelerometer. The temperature compensation
system for the
capacitance type micro-mechanical
accelerometer comprises a
capacitance type micro-mechanical acceleration sensor, a driving
signal generating circuit, a capacitance /
voltage switching circuit, an analog band-pass filter, a first digital / analog (D / A) converter, an analog / digital (A / D) converter, a second D / A converter, a third D / A converter and a
field programmable gate array chip. The temperature compensation method for the capacitance type micro-mechanical
accelerometer comprises three steps of: carrier wave generating / synchronously demodulating,
resonance frequency locking and zero offset temperature compensating. According to the invention, the temperature change of a capacitance type micro-mechanical acceleration sensor is detected by the means that the
resonance frequency of the capacitance type micro-mechanical acceleration sensor changes along with the change of the temperature, and the temperature compensation
system is used for compensating the temperature by the means that the
resonance frequency is taken as a compensation reference
signal of an output
signal of a capacitance type micro-mechanical accelerometer system. Therefore, the temperature compensation cost is reduced, the influence of
temperature measurement errors on compensation precision is eliminated, and the temperature compensation precision is improved.