The invention relates to the technical field of
microscopy of materials and provides a high-
transmittance atomic beam microscopic apparatus including a gas tank, a gas
pipe, a
vacuum chamber formed byconnecting a first chamber and a second chamber, a jet head, a splitter, a gas
transmittance window slice, an atom
diffraction slice, through holes in a first-stage
Fresnel zone plate transmission area, through holes in a second-stage
Fresnel zone plate transmission area, a first
detector, a sample, a sample table, a computer, a second
detector, a first gas suction port, a first
vacuum pump set,a second gas suction port and a second
vacuum pump set. The first
detector and the second detector respectively detect the atoms that are reflected by the surface of the sample and work under a differential pair mode. The atom
diffraction slice with through holes is easy to manufacture, wherein the through holes are orderly arranged according to corresponding Fresnel zones, so that the total areaof through holes in the cross section are of a certain
atomic beam flow can be increased, and the
transmittance of the
atomic beam flow is increased. The apparatus can form a sharp focusing beam spotand inhibit higher-order
diffraction, thereby increasing the
signal-to-
noise ratio of the apparatus.