349results about "Cold traps/baffles" patented technology

A cold plate includes an enclosure with an inlet, an outlet, a base and a lid. The inlet and outlet are in fluid communication, so fluid can flow from the inlet though the enclosure to the outlet. The base is formed from a base plate, and the base plate includes an island facing into the enclosure. A plurality of pins extends from the island toward the lid. The pins can have a spiral shape, where the cross sectional profile of the pins change along the length of the pin.

Provided is a trap apparatus, disposed in an exhaust passage 22 for discharging an exhaust gas from a processing chamber 10 for processing a wafer W, thereby to trap exhaust from the exhaust gas, so that the exhaust trapped by a trap element can be efficiently removed to regenerate the trap element. The trap apparatus includes a housing 42 disposed in the exhaust passage, a trap element 48 disposed in the housing for trapping the exhaust, a trap heating unit 54 for heating the trap element, a coolant introducing unit 60 for introducing a coolant into the housing, a coolant discharging unit 62 for discharging the coolant from the housing, and a controller 88 which performs a control to introduce the coolant from the coolant introducing unit into the housing, while the trap element being heated by the trap heating unit, to remove the exhaust trapped by the trap element.

In a communication network system which unifies a system communication network and a master system communication network, each of a plurality of controlled devices is configured to transmit status data to a master controller and receive control data from the master controller so that the controlled device is operated based on the control data. The master controller comprises a control unit configured to receive status data of the controlled devices and transmit control data to the controlled devices, the control unit being configured to transmit the status data to a system controller and receive the control data from the system controller. The system controller comprises a second control unit configured to receive the status data of the controlled devices from the master controller, perform a processing operation based on the status data, and transmit a result of the processing operation to the master controller as the control data.

A cryostat for providing temperature regulation, one purpose being measuring physical properties of materials, the cryostat employing a superconducting magnet assembly for generating variable magnetic field in the sample space and a cryogenic cooler for cooling the sample space. The cryogenic cooler chamber configuration provides for efficient heat exchange between different stages of the cryogenic cooler without the need for physical heat links. This construction enables selective delivery of cooling power from the cryogenic cooler to the desired areas within the cryostat without using flexible physical thermal links. A counter flow exchanger and ambient temperature valves facilitate efficient use of the cryogenic cooler stages. The removal of large heat load generated by the superconducting magnet while operating in the sweeping mode is achieved, in part, by employing a solid plate thermal coupling element between the cryogenic cooler chamber and the magnet assembly.

An inverter (22) is provided between a power source (20) and a suction / discharge valve driving motor (14) that controls cycle time of suction and discharge of a refrigerator unit (10). An output frequency of the inverter (22) is controlled in accordance with output of a sensor (24) that detects temperature of a thermal load portion (11) of the refrigerator unit (10). This enables temperature adjustment of individual refrigerators with a highly reliable method without using an electric heater.

A method for manufacturing an article where the article has polymeric residue that is to be removed during the manufacture of the article. The article is introduced into a controlled environment of a processing tool that has at least first and second processing chambers. Free radicals are generated from one or more reactant gases and introduced into at least the first processing chamber where they react with the polymeric residue. A cryogenic cleaning medium is supplied into the second processing chamber where it removes the polymeric residue present after the free radicals react with the polymeric residue. The reactant gases are selected to facilitate removal of the polymeric residue with the cryogenic cleaning medium The first and second processing chambers may be dedicated to plasma processing or cryogenic processing or each may provide both plasma processing and cryogenic processing.

A cryopump provides for high pumping speed of Type III gases. An open configuration of a frontal array provides high conductance of gases into a radiation shield which is shaped to focus gases toward a second stage array. The second stage array has an open configuration of baffles coated with adsorbent. Substantially all of the adsorbent has a direct line of sight to the radiation shield or to the opening in the radiation shield, and substantially all of the baffles are coated with adsorbent. In one form, the second stage cryopump array comprises an array of discs fanned to define a generally ball shaped envelope.

A method for establishing a cryogenic insulation system wherein aerogel is provided to a sealable insulation space which is pressurized and depressurized, preferably using carbon dioxide gas, and cooled to cryogenic temperatures typically by the application of refrigeration from cryogenic liquid.

An inertance tube and a surge volume for a pulse tube refrigerator system may be integrally coupled together, such as by the inertance tube being at least in part a channel in a wall of the surge volume. The surge volume may have a helical channel in an outer wall that forms part of the inertance tube. The surge volume tank may be surrounded by a cover that closes off the channel to form the inertance tube as an integral part of the surge volume. The inertance tube may have a non-circular cross section shape, such as a square shape or non-square rectangular shape. The channel may be tapered, perhaps changing aspect ratio. Alternatively, the inertance tube may be a separate tube having a non-circular shape, which may be wrapped around at least part of the surge volume.

A cryopump and a regenerating method of the cryopump whereby temperatures of a first stage and a second stage can be securely increased to target temperatures and time required for regenerating can be shortened are provided. At the time of regenerating, the temperature of the second stage cooling stage is controlled based on the temperature detected by the second temperature detection part. In the case where the temperature of the first stage cooling stage reaches the limiting temperature, namely critical temperature, of the first stage displacer, the rotation in the reverse direction of the reversible motor is controlled or stopped and thereby the regenerating process is stopped for a while.

A method for reducing particulate generation from regeneration of cryogenic vacuum pumps. The method comprises controlling a pressure ramp rate inside the cryopump during an initial introduction of a regeneration gas into the cryopump. Preferably, the pressure ramp rate is controlled by maintaining a first pressure ramp rate, preferably between about 0.03 T / s and 0.15 T / s, until a first pressure of about 0.3 T is reached inside the cryopump and maintaining a second pressure ramp rate between about 1 T / s and 5 T / s until the surface in the cryopump reaches an intermediate temperature between about 40 K and 100 K. Preferably, the temperature ramp rate is also controlled by heating the surface at a temperature ramp rate between about 0.1 K / s and about 0.5 K / s until the intermediate temperature has been reached. Preferably, the temperature ramp rate is controlled by regulating the flow of an inert gas into the cryopump using a flow restriction device. Alternatively, the second stage cryoarray temperature is increased at the rate of between 0.1 K / s and 0.5 K / s using a PID controlled heater.

An apparatus and method for charging a gas storage and dispensing vessel with gas to a predetermined pressure level, e.g., a gas to be employed in a semiconductor manufacturing operation such as a hydride, halide or organometallic reagent gas. In the gas charging, a source gas is liquefied, e.g., in a cryotrap, and then gasified in closed flow communication with the vessel to introduce the gas thereinto, and such liquefaction / gasification steps are carried out alternatively and repetitively, to charge the vessel in a step-wise, progressive fashion with gas, until a full fill state is achieved, with the contained gas at the predetermined pressure level.

Systems and methods for improving the performance of dilution refrigeration systems are described. Filters and traps employed in the helium circuit of a dilution refrigerator may be modified to improve performance. Some traps may be designed to harness cryocondensation as opposed to cryoadsorption. A cryocondensation trap employs a cryocondensation surface having a high thermal conductivity and a high specific heat with a binding energy that preferably matches at least one contaminant but does not match helium. Multiple traps may be coupled in series in the helium circuit, with each trap designed to trap a specific contaminant or set of contaminants. Both cryocondensation and cryoadsorption may be exploited among multiple traps.

The invention discloses a smoking machine-mainstream flue gas cold trap integrated device and a using method thereof. The integrated device comprises a smoke holder, a cold trap device, a cambridge filter and a single-passage smoking machine that are sequentially connected by pipelines; the cold trap device comprises a mainstream flue gas trap pipe and is internally provided with a refrigerant; the mainstream flue gas trap pipe is dipped in the refrigerant; and the mainstream flue gas trap pipe is a quartz pipe of a spiral shape. After the sucking of a cigarette is completed, an organic solvent is added in the mainstream flue gas trap pipe and the mainstream flue gas trap pipe is vibrated sufficiently; the mainstream flue gas condensate is extracted repeatedly; subsequently, the extract is combined; and then the mainstream flue gas sample is analyzed. The method has higher and safer trap efficiency on the aroma-active components in the mainstream flue gas, effectively avoids the generation of various side effects during the flue gas sample treatment process, simplifies the treatment process, shortens time and has higher repeatability. The method has important application prospect in the fields of analyzing cigarette quality and researching flue gas fingerprints.

A cryopump includes a radiation shield provided with a main inlet at one end thereof and a sub-inlet in a side thereof; and a cryopanel assembly cooled to a temperature lower than that of the radiation shield. The cryopanel assembly includes an upper structure having at least one cryopanel and a lower structure having at least one cryopanel. The upper and lower structures are arranged inside the radiation shield along a direction away from the main inlet. A frost accommodating space connected to the sub-inlet may be arranged between the upper and lower structures such that an amount of captured gas on an upper end cryopanel of the lower structure is greater than an amount of captured gas on a lower end cryopanel of the upper structure.

Disclosed is a two-stage pulse tube cryopump cooling system in which the pulse tubes and valves are inline, with the hot ends of the pulse tubes at the top and the valve mechanism is at the bottom and the hot ends and buffer volume are cooled by an inline coolant line from the compressor input to the compressor output and attached in heat exchange relationship with the buffer volume.

The production and usage of hyperpolarized 129Xenon which comprises providing solid xenon with either an internal (dissolved) or external (imbedded) nuclear spin relaxant, loading and positioning the solid xenon in a low temperature refrigerator operating in the range of 5 mK to 30 mK with a surrounding magnetic field of between about 10 and 20 Tesla enabling high xenon spin polarizations between about 10% and 50% to be obtained in a time of about 1-3 days owing to the properties of the relaxant, separating the xenon from the relaxant or otherwise rendering the relaxant inoperable after polarizing and thereby switching off further relaxation and insuring preservation of the polarization of the xenon in solid, liquid or gaseous form for storage or external use for long times, ranging from weeks to the order of minutes, depending on the usage conditions.

The present invention provides a conduit trap, which can also operate as condensation recovery device when installed in a refrigeration system drainage line. The conduit trap is generally a hollow body defining a fluid path that includes an upper conduit 20, having a waste outlet 30 and optionally a condensation collection outlet 32. A lower conduit 22 extends downwardly from the upper conduit and has a narrowing that creates an inner sealing region for receiving a sealing means, such as float 50. Condensation can be directed from the refrigeration system through the conduit trap for recovery or for disposal without exposing the refrigeration drainage line and occupied space in which the refrigeration unit is located to sewer gasses even in dry weather when a gravity based, fluid-filled trap would fail.

A cylinder used for a cold head of a regenerative cryocooler, the cylinder includes an inside having a hollow-shaped configuration for a regenerative material, wherein the thickness of the cylinder at a high temperature end is greater than the thickness of the cylinder at a low temperature end.

An apparatus traps residual products before the products can be formed in or flow to a vacuum pump in semiconductor device manufacturing equipment. The apparatus is connected between a process chamber and the vacuum pump and includes first and second cooling plates alternately disposed inside a hollow cylindrical housing. The first cooling plates each have a base and a grid projecting from a surface of the base, and define a vent hole extending through a central portion of the base. Each of the second cooling plates have a base and a grid projecting from a surface of the base, and define a plurality of vent holes extending through an outer peripheral portion of the base. Gaseous products flowing from a process chamber and through the housing are transformed into powder that adheres to the cooling plates.

A cryopump includes: a cryopump chamber having an inlet port through which a gas to be pumped is introduced; a refrigerator provided with a second cooling stage provided in the cryopump chamber; an intermediate member thermally coupled to the second cooling stage; and a cryopanel having a connecting part connected to the intermediate member at a position farther from the inlet port in the direction in which the gas is introduced than the second cooling stage, and extending from the connecting part toward the inlet port. For example, a cryopump having a suspended panel structure is provided.

A cryopump is disclosed. The cryopump includes a cryopump main body connected to a vacuum chamber via an inlet. The cryopump main body includes a vacuum container. A shielding section, a two-stage type cryogenic cooler, a baffle, and first cryopanel and second cryopanels are provided in the vacuum container. A top surface of the first cryopanel is disposed at a position nearest to a surface of the baffle. The top surface of the first cryopanel is disposed almost parallel to the surface of the baffle.

This disclosure describes a sample drying system and method that provides a high rates of evaporation and sublimation that is commonly employed in compound processing procedures. The drying increases the sample-solute concentration and removes the solvent completely to produce the dried sample as a non-volatile solute precipitate. Re-circulating of drying gas is disclosed along with a solvent cold trap.

A method of enhancing a freezing capacity of a low-temperature delivery vehicle is that cool cold devices by a freezing machine, each of which has an eutectic material therein, to a temperature lower than eutectic temperatures of the cold devices, and then put the cold devices in a chamber of a vehicle, which the vehicle has a refrigerator to provide a cold airflow to the chamber via an outlet on a wall of the chamber. The cold devices have to be taken out after a predetermined period and cooled again to recycle. The low-temperature delivery vehicle of the present invention has a van body having a chamber therein, a refrigerator having an outlet on a wall of the chamber to provide a cold airflow to the chamber, and a plurality of cold devices in the chamber of the van body.

The invention relates to a vacuum pumping system for a vacuum container, which comprises a low vacuum pumping system, a high vacuum pumping system, an ultra-high vacuum pumping system, a measuring system of the vacuum container and a repressing system of the vacuum container. A liquid nitrogen cold trap is mounted in a vacuum pumping pipeline, thereby preventing oil return of the system and avoiding polluting the vacuum container; two sets of low vacuum pumping mechanical pumps which can work simultaneously or independently are adopted, thereby improving the running reliability of the system;two sets of turbo-molecular pumps which can work simultaneously or independently are adopted, thereby improving the running reliability of the system; two sets of refrigeration machine low-temperature pumps which can work simultaneously or independently are adopted, thereby improving the running reliability of the system; a low-temperature pump regeneration pumping system is matched, thereby being capable of carrying out precooling before the start-up of the low-temperature pumps; the vacuum pumping system is matched with an air relief valve, thereby preventing the oil return of the system; the whole pumping system is clean; and a variety of vacuum gauges are mounted in the pipeline of the vacuum pumping system and the vacuum container, thereby realizing full-range pressure measurement.

A system and method for trapping and collecting volatile compounds is described. The system and method generally include a trapping column including adsorption materials positioned within a lumen of the trapping column, an oven for heating the trapping column, and a cold-trap condenser. When a sample containing a volatile compound is passed through the lumen of the trapping column, the volatile compound is captured on or in the adsorption material. The captured volatile compound is subsequently released from the trapping column by simultaneously heating the column in the oven while a gas is pushed through the lumen of the column, and the released volatile compound is collected in the cold-trap condenser.