Vacuum pumping system design for vacuum container
A vacuum container and vacuum pumping technology, applied in the direction of elastic fluid rotary piston type/swing piston type pump combination, steam condensation, mechanical equipment, etc., can solve the problems of normal use and maintenance, and achieve full range Pressure measurement, improve system operation reliability, and prevent anti-oil effect
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[0017] The present invention will be further described below in conjunction with the accompanying drawings.
[0018] figure 1 The vacuum pumping system shown mainly includes a low vacuum pumping system, a high vacuum pumping system, an ultra-high vacuum pumping system, a vacuum container measuring system and a vacuum container repressurization system.
[0019] The low vacuum pumping system mainly consists of dry pumps (1, 2), heat transfer vacuum gauges (3, 4, 17), valves (5, 6, 7, 8, 11, 12, 13, 14, 15, 18), Luo It consists of mechanical pump (9,10) and liquid nitrogen cold trap (16).
[0020] The high vacuum pumping system mainly includes cryopump regenerative pumping system, cryopump high vacuum pumping system, molecular pump leak detection (auxiliary) pumping system. The high vacuum pumping system mainly consists of valves (26, 27, 28, 29, 38, 39, 40, 41, 43, 45, 48, 42), cold cathode ionization vacuum gauges (30, 31, 32, 33), refrigeration Mechanical cryopump (34,37), ...
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