61 results about "Surface potential measurement" patented technology

A inspecting and measurement method and inspecting and measurement apparatus for semiconductor devices and patterns such as photomasks using an electron beam which can measure the charged potential of a sample with higher precision than in the prior art, and a inspecting and measurement apparatus which can measure charged potential by means of a simple construction. When an S curve is observed in a semiconductor device to be inspectioned and measured, fluctuations of the charged potential of the inspection sample surface are suppressed by optimizing the energy of a primary electron beam used for irradiation. When the surface potential of the semiconductor device is measured, a more precise potential measurement than that of the prior art can be performed which is almost unaffected by the charged potential of an insulation film surface. Further, the surface potential can be measured without installing a special apparatus for wafer surface potential measurement such as an energy filter, so the cost of the apparatus can be reduced.

In a plasma processing apparatus, a member for propagating high frequency from a high frequency power supply and / or to which the high frequency is applied. A power feed rod is electromagnetically shielded between a matching unit and a bottom plate of a chamber by a coaxial cylindrical conductor connected to a ground potential. A surface potential system disposed in an appropriate distance from the power feed rod in radius direction is installed in the cylindrical conductor, and measures in a non-contact state the electrostatic surface potential of the power feed rod through electrostatic capacitance and provides a controller with a surface potential detection signal including surface potential measurement value information. The controller performs a required signal processing or operation processing on the basis of the surface potential detection signal from the surface potential system, thereby obtaining the measurement value of the DC potential on the power feed rod.

The invention discloses a measurement system and a measurement method of a secondary electron emission yield of dielectric material. The measurement system comprises a Faraday cup and a pulse electron gun, wherein an incident beam generated by the pulse electron gun outside the Faraday cup irradiates on a sample through an electronic entrance port on a tube, and an automatic voltage regulator circuit is electrically connected between a sample back electrode and an earth wire, so that the level on the sample surface is kept constant relative to a potential difference between the electron guns. The voltage regulating range of the voltage adjustor circuit is controlled by a feedback control circuit in real time, so as to ensure that charging potential of the sample is compensated in real time, and current probes for measuring net collection current and secondary electron current are respectively connected between the sample and a voltage controlled power source of the voltage regulator circuit, and connected with the Faraday cup. According to the measurement system and the method disclosed by the invention, are simple extra consumer power equipment such as an ion source and the like and related experimental links are not needed, the measurement efficiency is high, and the measurement is continuous without stopping to carry out work such as energy dissipation, surface level measurement and the like after each irradiation pulse, and the measurement error is small.

An inspection and measurement method and apparatus for semiconductor devices and patterns such as photomasks using an electron beam capable of measuring the potential of a sample with higher precision than conventional systems. When an S curve is observed in a semiconductor device to be inspected, fluctuations of the potential of the inspection sample surface are suppressed by optimizing the energy of a primary electron beam used for irradiation. When the surface potential of the semiconductor device is measured, a more precise measurement can be obtained without adverse effects from an insulation film surface. Further, the surface potential can be measured without installing a special apparatus for wafer surface potential measurement such as an energy filter, so the cost of the apparatus can be reduced.

A system and method is disclosed for obtaining measurements of the electric fields around skin wounds and lesions on mammals noninvasively. The system and method is comprised of a vibrating metallic probe tip that is placed close to the skin in the air. By applying a series of known voltages to the metal probe tip or to the skin beneath it, the skin's local surface potential can be measured and the lateral electric field can be calculated from the spatial distribution of surface potential measurements. Surface artifacts that can affect the measurements are removed and active feedback is used to maintain a constant distance between the probe and the skin surface.

The invention discloses an integrated measuring device for surface dielectric properties of solid insulating materials. The device includes a secondary electronic measurement module, a sample stage module, a corona charging module, a surface potential measurement module and a vacuum / high pressure system; the secondary electronic measurement module includes an electronic gun and a collector; the electronic gun is arranged right above the collector, and the central axes of the electronic gun and the collector are on a same straight line; the sample stage module is provided with a sample flatform, and the bottom surface of the sample flatform is provided with sliding tracks in X, Y and Z axis directions; the corona charging module includes a high voltage electrode and a corona needle, and thehigh voltage electrode is connected to the corona needle; the surface potential measurement module includes a high voltage interface and a static probe, and the static probe is connected to the highvoltage interface; and the vacuum / high pressure system includes an outer cavity body, a gas interface, a vacuum interface, a gas cylinder and a vacuum pump, the gas interface and the vacuum interfaceare arranged on the wall of the outer cavity body and communicate with the outer cavity body, the gas cylinder is connected to the gas interface, and the vacuum pump is connected to the vacuum interface.

The present invention provides a hand-held, noninvasive diagnostic device for measuring the electric fields in mammalian skin and other epithelial structures. The device includes an outer housing that contacts the skin, providing stability and allowing the device to move along with minor movement of the skin. Recessed within the outer housing is a probe that acts as a sensor to measure the electric field in the skin through an aperture in the bottom surface of the outer housing. By applying a series of known voltages while the probe is vibrating, the skin's local surface potential can be measured and the lateral electric field can be calculated from the spatial distribution of surface potential measurements. Active feedback is used to maintain a constant distance between the probe and the skin surface.

The present invention provides a pattern inspection technique that enables measurement and inspection of a fine pattern by a charged particle beam to be performed with high throughput. A metrology system of fine pattern according to the pattern inspection technique has: a the column that includes a charged particle source, an electron optics for scanning a desired observation area on a sample with a charged particle beam emitted from the charged particle source, and a detector for detecting charged particles generated secondarily from the sample scanned by the charged particle beam; information processing means for measuring information about geometry of a pattern formed on the sample based on information on the intensity of the charged particles obtained by the detector; and a sample introduction unit for introducing the sample into the inside of the column; wherein a charge neutralizer unit for generating ions and charge neutralizing the sample with the ions and surface potential measuring means for measuring a surface potential of the sample surface are provided on a path that is inside the sample introduction unit and transports the sample to the column.

The invention discloses a non-intrusive surface potential measuring device for surface flashover. The device comprises a test cavity, a flashover initiation device, a surface potential measurement device and a signal acquisition and analysis device, the flashover initiation device and the surface potential measurement device are arranged in the test cavity and are respectively arranged at two sides of a sample to be tested, and the signal acquisition and analysis device is arranged outside the test cavity and is connected with the surface potential measurement device. According to the invention, flashover initiation and surface potential measurement are synchronously carried out under the condition of the controllable temperature, humidity and vacuum degree, the defect that traditional surface potential measurement can only work after flashover is finished is overcome, research on the surface charge accumulation characteristic in the pressurization stage before flashover and the surface charge dynamic characteristic in the flashover period can be achieved by analyzing the surface potential measurement result, and support is provided for evaluation of the dielectric flashover resistance in the future.

An image forming apparatus includes: an imaging device that forms a toner image based on image data and transfers the toner image to a recording medium; a fixing device including a pair of rotatable members that defines a contact pressing portion that allows the recording medium with the toner image to pass through, and heats and presses the recording medium with the toner image; a surface potential measuring device that measures a surface potential of at least one of the pair of rotatable members; and a controller that performs control to give an alert notification that at least one of the pair of rotatable members which contacts with the toner image to be fixed should be replaced, when a result of the surface potential measured by the surface potential measuring device has exceeded a predetermined value.