The invention provides an integrated
probe type microsphere cavity sensor, comprising an integrated input
optical fiber, a
microsphere cavity and an integrated output
optical fiber. The sensor is characterized in that the sphere shaped
microsphere cavity is integrated with the integrated input
optical fiber and the integrated output optical
fiber into a whole; the microsphere cavity is used as an optical transmission vector and an external parameter probe; the integrated input optical
fiber is used as an optical
signal input end; the integrated output optical
fiber is used as an optical
signal output end; and the microsphere cavity sensor is a sensor integrating
laser input,
optical coupling, optical transmission and optical detection. The integrated
probe type microsphere cavity sensor overcomes the defect that the traditional micro-cavity performs optical
mode excitation and structure separation depending on a conical optical fiber, has the advantages of simple structure, optical integrated
coupling, high reliability, small volume, light weight, abrasion resistance, high accuracy, low cost, low
power consumption and high
electromagnetic interference resistance, and can be used in the fields of gas density measurement, liquid concentration measurement, bio-
protein cell detection and the like.