The invention discloses an
ion implantation monitoring method and relates to the field of semiconductors. The
ion implantation monitoring method can accurately monitor whether the
ion implantation amount reaches to the preset requirement, the defect that
intrinsic resistance fluctuation of a substrate causes a monitoring result ultra-limit is effectively overcome, the monitoring accuracy is improved, and the device performance and yield are improved. The
ion implantation monitoring method comprises the steps of (a) providing a monitoring piece and forming a partially-covered
mask layer on the monitoring piece; (b) performing
ion implantation processing, and implanting a preset amount of
impurity ions into the monitoring piece, wherein a region which is not covered by the
mask layer on the monitoring piece is an
impurity implantation region, and a region which is covered by the
mask layer is an
impurity non-implantation region; (c) stripping the
mask layer on the monitoring piece; (d) performing oxidation treatment on the monitoring piece; (e) respectively resting the
oxide layer thicknesses of the impurity implantation region and the impurity non-implantation region, and monitoring the impurity amount in
ion implantation according to
oxide layer thickness values of the impurity implantation region and the impurity non-implantation region.