The invention belongs to the optical measurement field and relates to a
solid-state
zoom lens-based non-
contact laser thickness measuring device and method. The device is composed of a
laser, a lightintensity adjustable attenuator, a first collimating lens, a micro lens, a
spatial filter, a second collimating lens, a diaphragm, a
beam splitting prism, a first aberration correcting lens, a first
solid-state
zoom lens
assembly, a second
solid-state
zoom lens
assembly, a second aberration correcting lens, an object to be tested, a focusing lens, a photoelectric
detector, a
data transmission line, a
signal control,
data processing and display module, and a
control signal transmission line. The solid-state
zoom lens-based non-
contact laser thickness measuring device of the invention is simplerand more compact than a conventional
zoom lens group; and the solid-state
zoom lens-based non-
contact laser thickness measuring device of the invention is more stable, has superior performance, and is close to a
diffraction limit compared with a
liquid lens. According to the solid-state zoom lens-based non-contact
laser thickness measuring device and method, the
focal length of the solid-state zoom lens can be adjusted through a full-electronically controlled closed-loop, so that the focusing position of an outgoing beam on the object to be tested is changed; the position of the maximum valueof reflected
light intensity is recorded through using a
laser self-collimation effect; and therefore, the thickness measurement of the object to be measured can be realized, and the object to be measured is not required to be accurately moved or adjusted during a measurement process.