The invention discloses
ion beam
coating equipment and a
coating method thereof. The
ion beam
coating equipment comprises a transfer chamber and a substrate loading and unloading chamber, a coating chamber and a cleaning chamber which are connected to the transfer chamber, isolation valves are arranged among the substrate loading and unloading chamber, the coating chamber and the cleaning chamber, and a
transfer mechanism is arranged in the transfer chamber. According to the
film coating method, the equipment is adopted for coating treatment. In the
ion beam coating equipment, the substrate loading and unloading chamber is used for storing different types of substrates, the transfer chamber is used for transferring the substrates among the substrate loading and unloading chamber, the coating chamber and the cleaning chamber, the coating chamber can be used for coating a plurality of substrates at the same time and can also be used for preparing various types of film
layers, and the cleaning chamber is used for removing
dirt and oxides on the surfaces of the substrates, and the
adhesive force between the film and the substrate is improved. According to the
ion beam coating equipment, continuous cleaning and continuous coating of the substrate can be achieved,
continuous production can be achieved, the production efficiency can be improved, the production cost can be reduced, and the requirements of the substrate (such as an
infrared device) for the large-size, low-damage and low-temperature coating process can be met.