The invention discloses a packaging structure and a packaging method of a
semiconductor device. The packaging structure of the
semiconductor comprises a
chip, a
passivation layer positioned above the
chip, a pad positioned above the
passivation layer, a first through hole running through the
chip and the
passivation layer along a thickness direction to the outside of the pad, a
seed crystal layer positioned in the inner wall of the first through hole, a conductor layer positioned on the
seed crystal layer, a conductive layer filling up the first through hole, a second through hole, an insulating medium layer, a convex point lower
metal layer and convex points, wherein the
seed crystal layer, the conductor layer and the conductive layer in the first hole form a first conductive plug; the second through hole runs through the chip and the passivation layer along the thickness direction to the outside of the pad, is positioned around the first through hole and shares a side wall with the first through hole; the insulating medium layer is positioned above the chip, fills up the second through hole and is exposed out of the first conductive plug; the convex point lower
metal layer is positioned on the insulating medium layer on the first conductive plug and the periphery of the conductive plug; and the convex points are on the convex point lower
metal layer. In the packaging structure and the packaging method, ultra
high capacitance caused by TSV
interconnection is avoided and the electrical property of the
semiconductor packaging structure is improved.