2607results about How to "Enhance layering" patented technology

The present invention provides an organic EL display device having a planarizing layer, which is prevented from being distorted. The above organic EL display device has a planarizing layer, which retains 5% or less the oligomer used to form this layer.

A method for forming a Ti-containing film on a substrate by plasma-enhanced atomic layer deposition (PEALD) using tetrakis(dimethylamino)titanium (TDMAT) or tetrakis(diethylamino)titanium (TDEAT), includes: introducing TDMAT and / or TDEAT in a pulse to a reaction space where a substrate is placed; continuously introducing a NH3-free reactant gas to the reaction space; applying RF power in a pulse to the reaction space wherein the pulse of TDMAT and / or TDEAT and the pulse of RF power do not overlap; and repeating the above steps to deposit a Ti-containing film on the substrate.

A method for protecting a layer includes: providing a substrate having a target layer and forming a protective layer on the target layer, said protective layer contacting and covering the target layer and containing a hydrocarbon-based layer constituting at least an upper part of the protective layer, which hydrocarbon-based layer is formed by plasma-enhanced atomic layer deposition (PEALD) using an alkylaminosilane precursor and a noble gas without a reactant.

A method for protecting a layer includes: providing a substrate having a target layer; depositing a protective layer on the target layer, which protective layer contacts and covers the target layer and is constituted by a hydrocarbon-based layer; and depositing an oxide layer on the protective layer so that the protective layer in contact with the oxide layer is oxidized. The hydrocarbon-based layer is formed by plasma-enhanced atomic layer deposition (PEALD) using an alkylaminosilane precursor and a noble gas without a reactant.

A plasma enhanced atomic layer deposition (PEALD) system is described, wherein the system comprises a processing space and a high vacuum, ultra-clean transfer space. During processing, the substrate to which the thin conformal film is formed is exposed to the processing space. During substrate transfer, the substrate is exposed to the high vacuum space. Processing gases are introduced sequentially and alternately to the process chamber and the pressures and gas flows within, to and from, and between the process chamber and the high vacuum transfer space are controlled to keep the transfer space ultra-clean.

In a FinFET integrated circuit design, a combined cell structure contains two single cell structures at a first design hierarchy having fin shapes, the cell structures are placed adjacent to each other. The combined fin shapes of the two single cell structures at the first design hierarchy lead to a violation of a design rule related to fin topology in the overlapping region. A fin generation tool thus decides not to place the fins in the first design hierarchy. The fin generation is delegated another design hierarchy resulting in the generation of a single combined fin for both single cells.

It is an object of the present invention to provide a manufacturing apparatus that reduces a manufacturing cost by enhancing efficiency in the use of an EL material and that is provided with a vapor deposition apparatus which is one of manufacturing apparatuses superior in uniformity in forming an EL layer and in throughput in the case of manufacturing a full-color flat panel display using emission colors of red, green, and blue. According to one feature of the invention, a mask having a small opening with respect to a desired vapor deposition region is used, and the mask is moved accurately. Accordingly, a desired vapor deposition region is vapor deposited entirely. In addition, a vapor deposition method is not limited to movement of a mask, and it is preferable that a mask and a substrate move relatively, for example, the substrate may be moved at a μm level with the mask fixed.

A plasma enhanced atomic layer deposition (PEALD) apparatus and a method of forming a conductive thin film using the same are disclosed. According to the present invention of a PEALD apparatus and a method, a process gas inlet tube and a process gas outlet tube are installed symmetrically and concentrically with respect to a substrate, thereby allowing the process gas to flow uniformly, evenly and smoothly over the substrate, thereby forming a thin film uniformly over the substrate. A uniquely designed showerhead assembly provides not only reduces the volume of the reactor space, but also allows the process gases to flow uniformly, evenly and smoothly throughout the reation space area and reduces the volume of the reaction space, and the smaller volume makes it easier and fast to change the process gases for sequential and repeated process operation.

The present invention lessens the amount of air entering between mating membranes of a pressure sensor. The pressure sensor of the present invention includes a transducer portion and separate patient or medical fluid transfer portion or dome. The transducer portion is reusable and the dome is disposable. The dome defines a fluid flow chamber that is bounded on one side by a dome membrane. Likewise, the transducer is mounted inside a housing, wherein the housing defines a surface that holds a transducer membrane. The two membranes mate when the dome is fitted onto the transducer housing. The pressure sensor enhances the seal between the mated membranes by creating higher localized contact stresses. The pressure sensor also reduces the amount of gas that permeates from the fluid chamber across the dome membrane and between the interface by making the dome membrane from a material having a low vapor transmission.

A method for secure communications between a client and one of a plurality of servers performed on an intermediary device coupled to the client and said plurality of servers. In one aspect, the method comprises: establishing an open communications session between the intermediary device and the client via an open network; negotiating a secure communications session with the client; establishing an open communications session with said one of said plurality of servers via a secure network; receiving encrypted data from the client via the secure communications session; decrypting encrypted application data; forwarding decrypted application data to the server via the secure network; receiving application data from the server via the secure network; encrypting the application data; and sending encrypted application data to the client. In a further aspect, an apparatus including a network interface communicating with the public network and the secure network at least one processor, programmable dynamic memory addressable by the processor, and a communications channel coupling the processor, memory and the network communications interface is provided. The apparatus further includes a proxy TCP communications engine, a proxy SSL communications engine, a server TCP communications engine; and a packet data encryption and decryption engine.

A method of fabricating an integrated spatial light modulator with contact structures. The method includes providing a first substrate having a bonding surface, providing a device substrate having a device surface, and depositing a first layer on the device surface, the first layer having an upper surface opposite the device surface. The method also includes patterning the first layer to define a plurality of contact structure openings, depositing a conductive layer on the upper surface of the first layer, reducing the thickness of the conductive layer, and removing at least a portion of the first layer to expose a plurality of contact structures. The method further includes depositing a standoff layer on the first layer, forming standoff structures from the standoff layer, and joining the bonding surface of the first substrate to the standoff structures to form a bonded substrate structure.

To provide a semiconductor device in which a layer to be peeled is attached to a base having a curved surface, and a method of manufacturing the same, and more particularly, a display having a curved surface, and more specifically a light-emitting device having a light emitting element attached to a base with a curved surface. A layer to be peeled, which contains a light emitting element furnished to a substrate using a laminate of a first material layer which is a metallic layer or nitride layer, and a second material layer which is an oxide layer, is transferred onto a film, and then the film and the layer to be peeled are curved, to thereby produce a display having a curved surface.

An explicit signaling element for controlling decoded picture output and applications when picture output is not desired. A signal element, such as a syntax element in a coded video bitstream, is used to indicate (1) whether a certain decoded picture is output; (2) whether a certain set of pictures are output, wherein the set of pictures may be explicitly signaled or implicitly derived; or (3) whether a certain portion of a picture is output. The signal element may be a part of the coded picture or access unit that it is associated with, or it may reside in a separate syntax structure from the coded picture or access unit, such as a sequence parameter set. The signal element can be used both by an encoder and a decoder in a video coding system, as well as a processing unit that produces a subset of a bitstream as output.

The present invention provides a method for forming a wiring having a minute shape on a large substrate with a small number of steps, and further a wiring substrate formed by the method. Moreover, the present invention provides a semiconductor device in which cost reduction and throughput improvement are possible due to the small number of steps and reduction of materials and which has a semiconductor element with a minute structure, and further a manufacturing method thereof. According to the present invention, a composition including metal particles and organic resin is irradiated with laser light and a part of the metal particles is baked to form a conductive layer typified by a wiring, an electrode or the like over a substrate. Further, a semiconductor device having the baked conductive layer as a wiring or an electrode is formed.

An improved system and method for dequantizing progressively quantized signals in scalable image and video coding. A decoder performs simple dequantization, such as normal uniform dequantization, on coded content using a quantization index and a nominal quantization step size to obtain a nominal reconstruction level. The result is then adjusted by adding the reconstruction offset to obtain the final reconstruction value.

The present invention provides integrated framing in pluggable optical transceivers to extend the OTN framework into metro, regional, and core applications. Additionally, the present invention provides integrated FEC and optical layer OAM&P features into pluggable optical transceivers. This integration is done with existing pluggable transceivers defined by MSAs such as, but not limited to, XFP, XPAK, XENPAK, X2, XFP-E, and SFP+. Further, the present invention can be extended to new, emerging pluggable transceiver standards and specifications. The integration of framing, FEC, and optical layer OAM&P is done so that the pluggable transceiver preserves the specifications in the MSAs. This allows systems designed for existing pluggable transceivers to realize carrier-grade, robust performance without needed additional equipment such as transponders and without redesigning host equipment such as the line card to support new specifications.