The invention discloses an on-chip RC oscillator circuit, which belongs to the technical field of integrated circuits. The on-chip RC oscillator circuit includes a low power consumption temperature compensation circuit, a charge and discharge control circuit, a comparator circuit, an RS flip-flop and a buffer. In the low power consumption stable compensation circuit, the first NMOS transistor, the first PMOS transistor, the fourth PMOS transistor, the third resistor and the second NMOS transistor constitute a circuit that generates a bias current with a negative temperature coefficient; the second NMOS transistor, the second PMOS transistor The tube, the third PMOS tube, the third NMOS tube, and the second resistor form a loop that generates a positive temperature coefficient current; the two loops are connected through the second NMOS tube to achieve negative feedback, and the first capacitor and the first resistor are connected to the negative feedback loop. Le compensation improves stability, only four current branches are required to realize the positive and negative temperature coefficient current structure required for temperature compensation, and the power consumption is reduced; the first NMOS tube, the second NMOS tube, and the third NMOS tube work at sub-threshold The region realizes smaller bias current and lower power consumption.