The invention provides a high-precision and wide-range acceleration sensor with switchable detection
modes and a control method thereof, an
accelerometer working
plane layer comprises a sensitive
mass block and three resonators, the resonators at two sides comprise an
inertia force amplification lever structure and a group of differential comb tooth driving detection structures, and equal-interval plate capacitors provide electrostatic force between adjacent resonators to form
electrostatic coupling. When the acceleration is small, the circuit controls the three resonators to be at different potentials, so that
electrostatic coupling is generated among the three resonators to form a
modal localization detection mode, the acceleration is detected through an
amplitude ratio, and when the acceleration exceeds a preset critical value, the circuit controls to cancel the potential of the middle
resonator, so that the resonators are not mutually coupled any more and are in an independent
resonance state, that is, a mode localization mode is switched into a vibration beam mode, and the acceleration is detected through differential
resonance frequency. According to the invention, a high-precision
accelerometer with a wide range, high sensitivity and a large dynamic measurement range can be realized.