High-precision and wide-range acceleration sensor with switchable detection modes and control method thereof

Abstract

The invention provides a high-precision and wide-range acceleration sensor with switchable detection modes and a control method thereof, an accelerometer working plane layer comprises a sensitive mass block and three resonators, the resonators at two sides comprise an inertia force amplification lever structure and a group of differential comb tooth driving detection structures, and equal-interval plate capacitors provide electrostatic force between adjacent resonators to form electrostatic coupling. When the acceleration is small, the circuit controls the three resonators to be at different potentials, so that electrostatic coupling is generated among the three resonators to form a modal localization detection mode, the acceleration is detected through an amplitude ratio, and when the acceleration exceeds a preset critical value, the circuit controls to cancel the potential of the middle resonator, so that the resonators are not mutually coupled any more and are in an independent resonance state, that is, a mode localization mode is switched into a vibration beam mode, and the acceleration is detected through differential resonance frequency. According to the invention, a high-precision accelerometer with a wide range, high sensitivity and a large dynamic measurement range can be realized.

Description

technical field [0001] The invention belongs to the technical field of micro-inertial sensors in MEMS systems, in particular to a high-precision, large-range acceleration sensor with switchable detection modes and a control method thereof. Background technique [0002] The Micro-Electro-Mechanical System (MEMS) accelerometer is a very important part of the MEMS inertial sensor. As early as the 1970s, the Roylance research team published the first article on the MEMS accelerometer . Today, MEMS accelerometers have been developed for nearly half a century. With the improvement of performance and the development of industrialization, MEMS accelerometers have gradually been applied to all aspects of life such as consumer electronics, medical safety and automobile safety from the earliest military, aviation and aerospace fields. [0003] In the past ten years, the resonant accelerometer with frequency detection as the core has become one of the focus objects. Compared with the ...

AI Technical Summary

Problems solved by technology

However, as far as the research status summarized above is concerned, although the resonant accelerometer based on frequency detection meets the technical indicators of large range and high stability, it cannot achieve higher accuracy due to various restrictions, while the modal based on amplitude ratio detection Although the localized accelerometer obtains ultra-high sensitivity through the new detection principle, it sacrifices the measurement range, making it difficult to balance large range, large dynamic measurement range and high precision.

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