The invention discloses a
sputtering thin film temperature-pressure composite sensor and a manufacturing method thereof, which can measure
temperature and pressure of a high-low-temperature gaseous or
liquid medium. The
sputtering thin film temperature-pressure composite sensor comprises a joint, a sensitive element,
copper columns, a compensating plate, gold lead wires, sleeves, a
signal processing circuit board, an outer shell, lead wires, fastening screws, an
aviation socket and a socket base, wherein four thin-film resistors used for measuring pressure are processed on the sensitive element by adopting a
sputtering thin film technology, and two thin-film resistors used for measuring temperature are further processed in a tiny deformation region on the periphery of the pressure-measuring thin-film resistors; the four pressure-measuring thin-film resistors are connected with the compensating plate in a switch-over manner and are bridged by means of the gold lead wires, the
two temperature-measuring thin-film resistors lead out four of the gold lead wires to be switched into lead wires by means of the compensating plate and connected to the
signal processing circuit board, and bridge forming and compensation are completed on the
signal processing circuit board. The sputtering thin film temperature-pressure composite sensor is based on the original sputtering thin film temperature-pressure composite sensor manufacturing process, and hardly increases any production and application cost.