The invention relates to the field of
optical fiber acoustic sensors, and particularly provides an
optical fiber MEMS microphone array acoustic detection plate and
system. The
optical fiber MEMS microphone array acoustic detection plate and
system are used for filling up the blank of acoustic detection and
sound localization through array combining of optical
fiber MEMS microphones. According to the optical
fiber MEMS microphone array acoustic detection plate and
system, an MEMS membrane is applied to optical
fiber acoustic sensors, the sensitivity of the optical fiber
microphone acoustic sensors is improved, the preparation and
assembly are more convenient, and the optical fiber MEMS
microphone array acoustic detection plate and system have the advantages of being small in size, free of
metal, high in sensitivity and the like; the optical fiber MEMS
microphone array acoustic detection plate and system can be better applied to monitoring occasions, locating occasions and other occasions which need high
invisibility, and can also be better applied to far-
distance space sound localization, non-contact fault audio detection of a mechanical device, remote sound
signal pickup and otherfields; meanwhile, the single-point optical fiber MEMS microphone acoustic sensors are subjected to array combining, and the sound signals can be detected and located.