The present invention discloses a variable area capacitive-type bimodal optimized tuning-fork-type micromechanical
gyroscope, relates to a tuning-fork-type micromechanical
gyroscope, and belongs to the field of micro electro
mechanical system (MEMS). The variable area capacitive-type bimodal optimized tuning-fork-type micromechanical
gyroscope includes a glass substrate and a
metal electrode; and further comprises a MEMS structure, the MEMS structure can fully use variable area detection comb differential capacitances in a space structure to increase the
arrangement number of the variable area detection comb differential capacitances in a limited space.
Modal optimization of a detection mode can be realized by connection of an
anchor point and a coupled rhombus beam, and
modal optimization of a drive mode can be realized by connection of the
anchor point and a lever. A U-
shaped beam can be used to reduce puadrature
coupling error brought by dimension error caused by
processing technology defects. The variable area capacitive-type bimodal optimized tuning-fork-type micromechanical gyroscope can realize the
modal optimization of the drive mode and the detection mode, can realize the linear conversion of detection
capacitance variation and displacement variation under the premise of no reducing of the sensitivity, can effectively solve the small measuring range problem of a varied spacing
capacitance microgyroscope, and can reduce the quadrature coupler error.