The invention discloses a chemical mechanical planarization device and a wafer transmission device and method. The wafer transmission device comprises at least one wafer polishing transmission mechanical arm, the wafer polishing transmission mechanical arm comprises a horizontal transmission mechanism, a vertical transmission mechanism and a wafer grabbing device, a polishing transfer table, a cleaning transfer table and a polishing loading table are arranged in the movable range, in the horizontal straight line moving direction, of the wafer grabbing device, according to the wafer transmission device, the wafer can be directly transmitted among the polishing transfer table, the polishing loading table and the cleaning transfer table, due to the fact that transfer is not needed, the wafertransfer frequency is reduced, the wafer transmission time is shortened, the transmission efficiency is improved, and the probability of damage generated by wafer transmission is reduced. Due to layout of the chemical mechanical planarization device, the transmission stroke is reduced, and machining efficiency of the chemical mechanical planarization device is obviously improved on year-on-year basis.