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50results about How to "Reduce the value of parasitic capacitance" patented technology

Semiconductor FET and Method for Manufacturing the Same

InactiveUS20130221414A1Decrease overall value of dielectric constantReduce value of parasitic capacitanceSemiconductor/solid-state device manufacturingSemiconductor devicesEngineeringElectrical and Electronics engineering
The present invention provides a semiconductor FET and a method for manufacturing the same. The semiconductor FET may comprise: a gate wall; a fin outside the gate wall, both ends of the fin being connected with the source / drain regions on both ends of the fin; and a contact wall on both sides of the gate wall, the contact wall being connected with the source / drain regions via the underlying silicide layer, wherein an airgap is provided around the gate wall. Since an airgap is formed around the gate wall, and particularly the airgap is formed between the gate wall and the contact wall, it is possible to decrease the parasitic capacitance between the gate wall and the contact wall. As a result, the problem of excessive parasitic capacitance resulting from use of the contact wall can be effectively alleviated.
Owner:INST OF MICROELECTRONICS CHINESE ACAD OF SCI

Capacitance sensor

The invention discloses a capacitance sensor, comprising a sensor gauge head, inner electrodes and an outer electrode, wherein the inner electrode is composed of a plurality of independent electrodes; the inner electrodes are the same in inner and outer diameters and are coaxially arrayed; the inner electrodes respectively comprise a top compensation electrode, a multi-section measurement electrode and a bottom compensation electrode from top to bottom; each two sections of electrodes are connected through a connecting piece which is made of an insulating material; the outer electrode is sleeved at the outer parts of the inner electrodes through screw threads, is coaxially mounted with the inner electrodes and is commonly shared by each section of the electrode in the inner electrodes; and the sensor gauge head is connected with the outer electrode. According to the capacitance sensor disclosed by the invention, the influences on liquid level measurement of temperature, pressure, mediums and the like are eliminated and the precision of the liquid level measurement is improved; and furthermore, an electricity leakage phenomenon can be effectively avoided and the linearity of the sensor is guaranteed.
Owner:BEIHANG UNIV

Transistor and forming method thereof

The invention provides a transistor and a forming method of the transistor. The forming method of the transistor comprises the steps that a semiconductor substrate is provided, wherein an isolation structure is arranged in the semiconductor substrate, gate structures are arranged on the surfaces of the portions, on the two sides of the isolation structure, of the semiconductor substrate, and each gate structure comprises a gate dielectric layer on the surface of the semiconductor substrate and a gate electrode located on the surface of the gate dielectric layer; first side walls are formed on the two sides of the gate structure, wherein the first side walls are doped silicon nitride layers; second side walls are formed on the surfaces of the first side walls, and the etching rate of each second side wall is larger than the etching rate of each first side wall; a source electrode and a drain electrode are formed in the portions, located on the two sides of the gate structures, of the semiconductor substrate; metal silicide layers are formed on the surface of the source electrode and on the surface of the drain electrode; the second side walls are eliminated; a stress layer is formed on the surface of the semiconductor substrate. By the adoption of the forming method of the transistor, the stray capacitance on the two sides of the gate structures of the transistor can be reduced, and the stress borne by the trench area of the transistor is increased.
Owner:SEMICON MFG INT (SHANGHAI) CORP

On-chip integrated inductor

The invention provides an on-chip integrated inductor, comprising inductive coil, metal layer, isolation layer; A metal layer is provide between two adjacent inductive coils; An isolation layer is arranged between the inductive coil and the metal layer; Looking the adjacent two inductive coils in a down direction, The two coils are offset to each other and not superposed; The inductive coil and the metal layer are connected through perforations. The invention provided on-chip inductors reduces parasitic capacitance between perforation wires, Which improving quality factors, And expanding frequency bandwidth of inductance, Without increasing the chip area.
Owner:EAST CHINA NORMAL UNIVERSITY +1

Capacitance type temperature compensation oil level measurement sensor

The invention discloses a capacitance type temperature compensation oil level measurement sensor which has high positioning accuracy and can achieve the effects of reducing the parasitic capacitance in the dry capacitance and compensating for the fuel oil level measuring errors caused by temperature variation. The capacitance type temperature compensation oil level measurement sensor is characterized in that an oil level measurement module comprises three coaxial metal tubes; the oil level and the oil mass are obtained depending on variation of liquid media in the tubes; the oil level signal capacitance C in proportion to the oil immersion height is output; a temperature compensation module is fixed at the bottom ends of the metal tubes via a conductor tray and a guide rod, is formed by a temperature sensing module assembled in a protective cover tube, automatically corrects errors caused by temperature difference via the guide rod in the tubes, outputs resistance R and capacitance C of the oil level measurement module, converts the resistance R and the capacitance C to current signals IC and IR forming proportional relations with the capacitance C and the resistance R and transmits the current signals IC and IR to a fuel measurement control system via a socket connected with shielded conductors.
Owner:四川泛华航空仪表电器有限公司

Semiconductor structure and forming method thereof

The invention provides a semiconductor structure and a forming method thereof. The forming method of the semiconductor structure comprises the steps of providing a semiconductor substrate, forming an insulating layer for covering a sacrificial layer and a plurality of first gate structures, etching the insulating layer, and forming a first opening in the surface of the sacrificial layer between the adjacent first gate structures to expose partial surface of the sacrificial layer between the adjacent first gate structures, removing the sacrificial layer, and forming a dielectric layer on the surface of the semiconductor substrate, wherein the plurality of first gate structures, and the sacrificial layer located on the surface of the semiconductor substrate and flush with the surface of the first gate structure are formed on the surface of the semiconductor substrate; the surface of the dielectric layer is higher than that of the insulating layer, and an air gap is formed in the dielectric layer between the adjacent first gate structures. According to the semiconductor device formed by the method, the parasitic capacitance between the adjacent gate structures can be reduced and the performance of a semiconductor device can be improved.
Owner:SEMICON MFG INT (SHANGHAI) CORP

Contact pad

A contact pad belongs to protection circuit design field of semiconductor integrated circuit. The contact pad provided by the present invention comprises a pad metal layer, and further comprises a totally depleted layer area formed by simultaneously neutralizing and doping a first type trap and a second type trap for an active region; the totally depleted layer area is located under the pad metal layer and formed at an upper surface layer of a semiconductor substrate. Compared with the prior art, the totally depleted layer area increases a distance between an upper electrode and a lower electrode of the parasitic capacitance of the contact pad, reduces the value of the parasitic capacitance; simultaneously, the preparation of the totally depleted layer area can use the ion implantation of existing art, wherein the operation is simple and extra processes are not needed.
Owner:SHANGHAI HUAHONG GRACE SEMICON MFG CORP

Annular differential-mode inductor and production method thereof

The present invention relates to the field of magnetoelectric technology, in particular to a ring-shaped differential-mode inductor and a production method thereof. The ring-shaped differential-mode inductor includes a ring-shaped magnetic core and a coil, and the ring-shaped magnetic core is connected by a first magnetic core and a second magnetic core. In combination, the window in the middle of each turn coil forms a magnetic core channel, and the first and second magnetic cores are inserted into the magnetic core channel and then docked. The production method of the annular differential mode inductor comprises the following steps: winding the coil by a winding machine, respectively passing the first and second magnetic cores through the coil, while the second magnetic core is passed through the other end of the coil core channel, and the The starting and tail wires are stripped and soldered. In the present invention, the coil passes through the magnetic core after being wound by a winding machine. The winding process is simple, which solves the problem that the wire diameter is too large and cannot be wound. At the same time, it reduces the labor intensity of workers and improves production efficiency; The copper wire will be damaged or have pinholes during the process, which improves the yield.
Owner:湖口健诚电子电器有限公司

Touch display device and manufacturing method thereof

A touch display device and a manufacturing method thereof are provided. The touch display device has a touch sensing area and a virtual touch area, and comprises a first and a second metal layer, filter layers, and common electrode layers. The first metal layer is arranged below an upper glass substrate, and the first metal layer includes a first touch line that is located in the touch sensing area; the second metal layer is arranged below the first metal layer, and includes a second touch line and a second virtual line, wherein the second touch line is located in the touch sensing area, the second virtual line is located in the virtual touch area, and the second touch line and the first touch line form a touch sensing element; the filter layer located in the touch sensing area covers the second touch line, and the filter layer located in the virtual touch area does not cover the second virtual line; and the common electrode layer located in the touch sensing area is not in contact with the second touch line, and the common electrode layer located in the virtual touch area is in direct contact with the second virtual line to reduce the resistance of the common electrode layer. The present invention also discloses a manufacturing method for the touch display device.
Owner:AU OPTRONICS CORP

Sandwich type micro accelerometer with high signal to noise ratio

The invention discloses a sandwich type micro accelerometer with a high signal to noise ratio. The micro accelerometer comprises an upper electrode structure layer, an upper bonding contract area, a middle electrode structure layer, a lower bonding contract area and a lower electrode structure layer from top to bottom, wherein the upper electrode structure layer is provided with the upper bondingcontract area bonded with the middle electrode structure layer; the lower electrode structure layer is provided with the lower bonding contract area bonded with the middle electrode structure layer; the upper bonding contract area and the lower bonding contract area form a bonding contact layer; the upper electrode structure layer, the middle electrode structure layer and the lower electrode structure layer are fused and bonded in the upper bonding contract area and the lower bonding contract area to form a self-sealed structure; and the middle electrode structure layer comprises a moveable mass block. Stray capacitance values of the upper electrode structure layer, the lower electrode structure layer and the middle electrode structure layer on a device can be reduced to a large extent, and in case of a same electrode plate interval, the signal to noise ratio property of the sandwich type micro accelerometer can be remarkably improved.
Owner:四川知微传感技术有限公司

Semiconductor structure and forming method therefor

The invention discloses a semiconductor structure and a forming method therefor, and the method comprises the steps: providing a substrate; forming metal gate structures on the substrate on the substrate, wherein each metal gate structure comprise a gate dielectric layer, a work function layer located on the gate dielectric layer, and a metal layer located on the work function layer; forming a barrier layer at the tops of the metal gate structures; forming an interlayer dielectric layer on the substrate between the metal gate structures; forming a contact hole plug passing through the interlayer dielectric layer; and carrying out the annealing treatment of the substrate after the forming of the contact hole plug. After the forming of the metal gate structures, the barrier layer is formed at the tops of the metal gate structures. The barrier layer is used for protecting the metal gate structures in the subsequent annealing treatment, and prevents the atoms liable to diffuse in the annealing treatment to diffuse to the work function layers of the metal gate structures, thereby avoiding the impact on the work function values of the work function layers, and achieving optimization of the electrical performances of a semiconductor device.
Owner:SEMICON MFG INT (SHANGHAI) CORP +1

Bonding welding disk lowering parasitic capacitance and preparing method thereof

The invention discloses a bonding welding disk lowering parasitic capacitance and a preparing method thereof, belonging to the technical field of manufacturing semiconductors. The bonding welding disk provided by the invention comprises a welding disk metal layer, a fist semiconductor doping well region, a second semiconductor doping zone and a first semiconductor high-doping zone, wherein, the fist semiconductor doping well region is formed by doping the semiconductor, the second semiconductor doping zone is formed in the fist semiconductor doping well region, and the first semiconductor high-doping zone is formed on the upper surface layer of the second semiconductor doping zone; junction capacitance formed between the first semiconductor doping well region and the second semiconductor doping zone, the junction capacitance formed between the second semiconductor doping zone and the first semiconductor high-doping zone and the junction capacitance formed between the first semiconductor doping well region and the semiconductor substrate are connected in series to lower the equivalent parasitic capacitance value of the bonding welding disk; meanwhile, the second semiconductor doping zone has simple preparing method and increases little cost of the preparing technology of the bonding welding disk.
Owner:SHANGHAI HUAHONG GRACE SEMICON MFG CORP

Bonding welding disk lowering parasitic capacitance and preparing method thereof

The invention discloses a bonding welding disk lowering parasitic capacitance and a preparing method thereof, belonging to the technical field of manufacturing semiconductors. The bonding welding diskprovided by the invention comprises a welding disk metal layer, a fist semiconductor doping well region, a second semiconductor doping zone and a first semiconductor high-doping zone, wherein, the fist semiconductor doping well region is formed by doping the semiconductor, the second semiconductor doping zone is formed in the fist semiconductor doping well region, and the first semiconductor high-doping zone is formed on the upper surface layer of the second semiconductor doping zone; junction capacitance formed between the first semiconductor doping well region and the second semiconductor doping zone, the junction capacitance formed between the second semiconductor doping zone and the first semiconductor high-doping zone and the junction capacitance formed between the first semiconductor doping well region and the semiconductor substrate are connected in series to lower the equivalent parasitic capacitance value of the bonding welding disk; meanwhile, the second semiconductor dopingzone has simple preparing method and increases little cost of the preparing technology of the bonding welding disk.
Owner:SHANGHAI HUAHONG GRACE SEMICON MFG CORP

Semiconductor structure and forming method thereof

A semiconductor structure and a forming method thereof are provided. The forming method involves a first dielectric layer, a metallide and a second dielectric layer. The first dielectric layer is located on a substrate, covers the side walls of a gate, and has first grooves. The first grooves extend from the first dielectric layer of device regions to the first dielectric layer of isolation regions, and the top and side wall surfaces of source-drain doping layers are exposed at the bottoms of the first grooves. The metallide is located on the surfaces of the source-drain doping layers exposedat the bottoms of the first grooves. The second dielectric layer is located in the grooves of the isolation regions, and exposes the metallide on the top surfaces of the source-drain doping layers. The second dielectric layer can reduce the projection pattern area of the electrical connection structure of the isolation regions on the side wall surface of the gate, so as to reduce the value of parasitic capacitance formed by the electrical connection structure, the gate and the first dielectric layer between the electrical connection structure and the gate and improve the performance of the formed semiconductor structure.
Owner:SEMICON MFG INT (SHANGHAI) CORP +1
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