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518results about How to "Lower run" patented technology

Charging control device and method, charging device, as well as program

A battery state monitoring portion intermittently monitors the low voltage battery for supplying power to electrical components arranged in a vehicle while the power supply to the low voltage system load other than a +B load is stopped, a DCDC converter is stopped, and a +B power supply mode in which the vehicle cannot travel is set. A charging control portion starts up the DCDC converter and charges the low voltage battery with the power of a high voltage battery as a power source of the vehicle through the DCDC converter when the voltage of the low voltage battery becomes lower than or equal to a charging start voltage when the +B power supply mode is set. The present invention can be applied to a charging device of a battery of an electric vehicle.
Owner:OMRON AUTOMOTIVE ELECTRONICS CO LTD

Automatic irrigation-drainage system for farmland

The invention relates to an automatic irrigation-drainage system for farmland. Irrigation water enters a water level control pond through a water level control valve; a floating ball drives the water level control valve to regulate the water supply amount until the supplied water is equal to the consumed water; the water level is stabilized at a certain water level when the water supply of the water level control valve is stopped at a water supply water level h1; the irrigation water enters a soil filling region at the upper part in a U-shaped concrete groove through a nonfine concrete cover plate and a sand inverted filter from the bottom of the inner part of the U-shaped concrete groove so as to form a soil saturated water layer lower than h1; the water in the saturated water layer is raised to the root layer of the crop in the form of capillary water; the water supply amount is increased or reduced along with water consumption amount so that the farmland is automatically irrigated; because the h1 is lower than the height h2 of the upper edge of the U-shaped concrete groove, no gravity water is leaked; once the soil saturated water layer is higher than the h1 because of raining, the water level control valve is turned off, the irrigation is stopped; if the water layer is higher than the upper edge h2 of the water level control pond, the water overflows to a water accumulation pond, and the water begins to be discharged; and the irrigation is recovered until the soil saturated water layer is lower than h1. The system has full automatic irrigation, high reliability and excellent durability.
Owner:FARMLAND IRRIGATION RES INST CHINESE ACAD OF AGRI SCI

Polymetallic-ore-dressing wastewater coagulating sedimentation device and method

The invention discloses a polymetallic-ore-dressing wastewater coagulating sedimentation device and a polymetallic-ore-dressing wastewater coagulating sedimentation method. The process comprises the following main devices: a coagulation reaction tank, a flocculation, sedimentation and separation integrated device and a separation wall. The process flows are as follows: the polymetallic-ore-dressing wastewater fully reacts with a coagulant in the coagulation reaction tank to enable the wastewater to be destabilized quickly and flocculated efficiently; the coagulated wastewater enters the flocculation, sedimentation and separation integrated device to fully react with coagulant aid to further perform flocculation coarsening and fast sedimentation, so that high-efficiency mud-water separation is realized; and the processed wastewater is discharged directly or deeply purified by the separation wall to be recycled. The device and the method can effectively solve the problems that in the polymetallic-ore-dressing wastewater treatment, the flocculent precipitation is instable, the flocculation time and sedimentation time are long and the like, and can quickly perform destabilization and realize high-efficiency flocculation, high-efficiency sedimentation and high-efficiency separation. The device and the process flow are simple and practical, the wastewater purifying efficiency can be remarkably improved and the effluent water quality is stable and reaches the standard.
Owner:CENT SOUTH UNIV

Method and device for carrying train operation monitoring by vehicular monitoring system

ActiveCN101054089ASolve the problem that the calculation distance cannot be correctedLower runAutomatic systemsAutomatic controlMonitoring system
A method and a device of implementing the train operation control by train-mounted monitoring system, which utilizes present monitor device on the train, increases point type equipments by ground line, disposes the point type receiving set on present monitor device, realizes the strict data checking directly by way of the point type receiving set by present monitor device, reduces the operation of manual intervention device, realizes calculating mode circuit data being saved by the mobile unit, transfers the circuit data by the ground point type transponder information of point type receiving set basis in the train running, carries out the automatic control mode of train running. Said device for implementing the train operation control by monitoring system includes three major parts of train running monitor device, point type receiving apparatus and ground point type equipment.
Owner:HUNAN CRRC TIMES SIGNAL & COMM CO LTD

Controlling system and method for refrigerator with time interval run

A control system for refrigerator's running in time interval comprises temperature sensor, a time display unit of time interval settable ability, power circle, storage unit, clock unit and a CPU links to the above units, refrigerating circle, coolant tank and a calculator to calculate L3 from the preset temperature L1 and sensor temperature L2, a controller for different running programs according to L1, L2 and L3; a time calculator to calculate the data from clock unit and L2, L2 and L3. This invention makes it possible for the refrigerator to run more in the time interval at low power price and run less in the time interval at high power price.
Owner:HISENSE HOME APPLIANCES GRP CO LTD

Rail vertical irregularity estimation method and system based on extended Kalman filtering

InactiveCN104878668ALower runTimely detection of changes in vertical irregularitiesMeasuring apparatusVertical vibrationGyroscope
The invention discloses a rail vertical irregularity estimation method and system based on extended Kalman filtering. The system is characterized in that vibration acceleration sensors and gyroscopes are installed on a train body and a frame, the output ends of the vibration acceleration sensors, the gyroscopes and train speed sensors are connected to a central processing unit, and spatial sampling of train body vertical vibration, train body nodding angular speed, frame vertical vibration, frame nodding angular speed and the like is realized through train speed signals. A vehicle rail coupling system state equation is established according to a kinetic equation for a vehicle rail coupling model; a sensor observation equation is established according to signals acquired by all sensors; a filtering iterative equation is configured to obtain time updating equations and measurement updating equations of state estimation and estimation error covariance; an optimal state at each moment is obtained according to extended Kalman filtering, and rail irregularity estimation is finally obtained after inversion by using the time updating equation of the state estimation. The rail vertical irregularity estimation method and system based on extended Kalman filtering have the advantages of low cost, good engineering feasibility, simplicity in operation and online real-time detection.
Owner:NANJING UNIV OF SCI & TECH

Automatic storing-and-taking method and device for dense three-dimensional warehouse goods shelf

The invention discloses an automatic storage-and-taking method and device for a dense three-dimensional warehouse goods shelf. The automatic storage-and-taking method for the dense three-dimensional warehouse goods shelf comprises the steps that (1) tray supporting beams are arranged on the dense three-dimensional warehouse goods shelf, trays are placed on the tray supporting beams, and each tray serves as a basic storage unit; (2) rail supporting blocks are arranged on the dense three-dimensional warehouse goods shelf below the tray supporting beams, and rails are laid on the rail supporting blocks; (3) at least one transfer trolley is arranged on the rails, a lifting assembly is arranged on the transfer trolley, the lifting assembly can lift up the trays and goods on the trays together, and automatic storage and taking of the goods can be achieved. According to the automatic storage-and-taking method and device for the dense three-dimensional warehouse goods shelf, arrangement of goods shelves in a warehouse can be compact, and the storage amount of the goods in the warehouse can be greatly increased. The transfer trolley is small and exquisite in size and stable in operation, a plurality of transfer trolleys can be adopted to carry out simultaneous operation, the efficiency of ex-warehouse and efficiency of storage are obviously improved, the time for ex-warehouse and the time for storage can be shortened, failure rate is low in the process of operation, and reliability of ex-warehouse and reliability of storage are improved.
Owner:GUIYANG PUTIAN LOGISTICS TECH

Method for extracting lithium from lepidolite concentrate

The invention discloses a process for extracting lithium hydrate monohydrate and lithium carbonate by performing active roasting and sulfuric acid leaching on lepidolite concentrate. The method comprises the following steps: adding water into the lepidolite concentrate, calcium sulfate, barite powder or barium sulfate return slag and mixing; performing roasting in a preferable roasting furnace at a proper temperature for proper time; grinding and performing sulfuric acid leaching on a roasted material; performing primary purification, concentration and secondary purification on a leaching agent to obtain LiOH finished liquid; performing secondary crystallization and primary saturated liquid washing on the finished liquid to obtain a lithium hydrate monohydrate product; adding sodium carbonate for precipitating the lithium hydrate monohydrate crystallization mother liquor and washing liquid to obtain a lithium carbonate product. By adopting the process, lithium can be separated effectively from the lepidolite concentrate, and qualified lithium hydrate monohydrate and lithium carbonate products are produced. The process has the advantages of low energy consumption, less material flow, low production cost, low discharge capacity, high environmental friendliness, efficient realization of resource utilization, and capability of meeting industrial production.
Owner:谭春波

Service integration settlement system for ground power supply and air conditioner set of civil airport

A service integration settlement system for a ground power supply and air conditioner set of a civil airport comprises the ground power supply of 400Hz, the air conditioner set, a power monitoring system, embedded controllers (containing rate calculating modules) and an upper computer settlement network, wherein the power monitoring system and the embedded controllers are installed at the gate position of the airport through an electric control cabinet to be connected with the ground power supply and the air conditioner set and have the functions of power monitoring, user right identification, real-time electric quantity collection, service timing, cost calculation, equipment fault monitoring and the like. The upper computer settlement network is a comprehensive body of a server, client terminals and network resources in the airport, can send generated cost information to all client terminals and has the functions of monitoring the working conditions of the downstream embedded controllers and power monitoring system. The service integration settlement system reduces using of an aircraft auxiliary power unit (APU) in ground operation and can accurately calculate electricity consumption and staff service time for the ground power supply of 400Hz and the ground air conditioner set of the airport to supply power for the aircraft.
Owner:CIVIL AVIATION UNIV OF CHINA

Preparation method of 2,4-dichlorin phenoxyacetic acid

The invention discloses a preparing method of weed killer 2, 4-dichlorobenzene oxide acetic acid, which comprises the following steps: (1) producing bi-chlorophenol sodium solution and sodium monochloracetate solution; (2) putting into bi-chlorophenol sodium solution in condensed still; heating to 90-110 deg. c; dropping sodium monochloracetate solution; reacting for 2-8h; connecting to oil-water separator in reacting period; refluxing; returning water phase to reactor; dividing out of oil phase; setting the mole ratio of bi-chlorophenol sodium and sodium monochloracetate at 1:0. 8-1. 2; disposing; getting the product. This invention possesses low cost, high receiving ratio and simple operation, which can realize self-control.
Owner:SHANDONG WEIFANG RAINBOW CHEM

Apparatus for moving optical functioning element

The invention relates to an apparatus for moving an optical functioning element at sufficient accuracy over a long period of use or in a case where the temperature changes, in which a voltage is applied only when moving an optical functioning element, wherein a moving member 4, which moves forward and rearward in one direction by a guiding member 5, and one end of an optical filter main body 41, which is fixed at the moving member 4, are brought into contact with the circumferential surface of a disk-shaped eccentric cam 3 that rotates by an ultrasonic motor 2, and a coil spring 6 is brought into contact with the other end of the optical filter main body 41, whereby pressing the moving member 4 to the eccentric cam 3 side. Also, the apparatus includes a position signal generating means that generates a signal to detect the position of the optical filter main body 41 and a controller that controls the ultrasonic motor 2 in compliance with the signal inputted from the position signal generating means and inputting means.
Owner:SUZUKI MAKOTO +2

Device and method for on-line measuring biochemical oxygen demand in sample

The invention relates to a device and a method for carrying out on-line detection of the biochemical oxygen demand (BOD) in a water body sample by utilizing a microbiological fuel cell. The detection device has the advantages of real-time and on-line continuous detection function, simple operation, long continuous working time, and lower use and maintenance costs. The upwelling microbiological fuel cell is taken as the core, a BOD sample enters the microbiological fuel cell directly or after being diluted, and a linear relation exists between the coulomb yield of the microbiological fuel cell and the BOD content of the sample, thereby obtaining the BOD content of the sample through detecting the electrical signal generated by the microbiological fuel cell and through analyzing the obtained data by a computer control system. The detection method includes detecting the oligotrophic BOD concentration with the BOD concentration value in the sample less than critical value, and the eutrophic BOD concentration with the BOD concentration value in the sample larger than critical value; the detection of the eutrophic BOD concentration can be completed by adopting a buffer solution dilution method or a pulse integration method.
Owner:INST OF PROCESS ENG CHINESE ACAD OF SCI

Material supply system in semiconductor device manufacturing plant

In a small scaled plant intended for flexible manufacturing, a pure water supply system is provided at a low cost without reducing a production efficiency. A pure water system produces a plurality of grades of pure water which are supplied through pipes connected to points of use for cleaning, CMP, lithography, and the like. Upon receipt of a request signal from each point of use for starting to use a certain grade of pure water, a controller determines whether or not a required amount exceeds the capacity of the grade of pure water which can be supplied by the pure water system. If not, the controller sends a use permission signal to the point of use for permitting the same to use the pure water. When a certain use point is using the requested grade of pure water, the controller may not permit the requesting point of use to use the pure water until a use end signal is sent from the use point which is using the pure water.
Owner:EBARA CORP

Method and system for accessing multiple subsystems and public subsystem with distributed storage personalized data through single APP program

The invention relates to a method and system for accessing multiple subsystems and a public subsystem with distributed storage personalized data through a single APP program. According to the method and system, in the interagency networking service system, the personalized data of clients are distributed and stored in different agency databases, independent management and safety of the data are ensured, a special service is provided, and agency subsystems are formed; public data and service are focused on the public subsystem, and public service extension, development and synergism are achieved; the agency subsystem and client access authentication information structures are planned, a client login access verification mirror image is generated on the public subsystem, the uniform mobile internet APP program (Client) is provided for the clients, the APP program interacts with an APP access centralized response server (Server), the APP access request is analyzed, client login access verification is conducted, personalized service client agency subsystems and a service content organizational framework are determined, personalized data are obtained and processed, the personalized and public service is provided, and the clients can synergistically access agency private systems and a public system.
Owner:冯力新 +1

Control method for variable frequency air conditioner adopting duplex cylinder compressor

The invention discloses a control method for a variable frequency air conditioner adopting a duplex cylinder compressor. When the air conditioner is opened by a user, an infrared sensor conducts real-time detection; when a controller judges that the user leaves the room and the leave time arrives a preset time I, the temperature set by the user is adjusted to a temperature close to the outdoor environment temperature; when the controller judges that the user leaves the room and the leave time arrives a preset time II, the air conditioner stops. According to the method provided by the invention, the purpose of decreasing air conditioner energy consumption is realized.
Owner:安徽奥克斯智能电气有限公司

Application of low-carbon saving type pig house

The invention relates to application of a low-carbon saving type pig house, belonging to the field of application of a pig house. The pig house adopts a galvanized steel pipe greenhouse structure, and the roof of the pig house is covered with a plastic light transmission film and a sun-shading net material; a ventilation opening which can be opened and closed is arranged on each of a south wall body and a north wall body, a retractable ventilation skylight facing toward the south is arranged at the top of the pig house and is pulled and retracted through a longitudinal scroll at the top of the pig house; a fan is arranged on each of an east gable and a west gable of the pig house for supplementing ventilation; and a medium pressure atomization spraying system is arranged above a pigpen inthe pig house, a fermentation bed is arranged on the south side of the interior of the pigpen, fermentation bed padding is laid in a fermentation bed padding pit, an aeration fermentation system pipeline is buried at the bottom of the pit. The pig house adopts steel pipe materials and the structure which is helpful for convection and ventilation, and utilizes time-delay atomization spraying technology, fermentation bed pig raising technology and the aeration fermentation technology at the bottom of the fermentation bed, so that the pig house reduces construction cost and use cost, is energy-saving and environment-friendly, and reduces carbon emissions.
Owner:JIANGSU ACAD OF AGRI SCI

Internet-based communications verification system

A system is provided for the verified exchange of messages through an electronic message exchange system and for the verified archiving of such messages. More particularly, the message format of an initiating message, and optionally of subsequent messages in the exchange of messages, is structured to command the recipient of the message to accept or to express a lack of acceptance of the content of the transmitted message, or to reply in some other structured manner. The entirety of an exchange of messages between two (or more) parties, including the acceptance or non-acceptance of content at any stage of the exchange, is recorded in the secure archives of an authenticator, which facility can verify the authenticity, sequence, date, time and content of and parties to any exchange of messages sent within the inventive system, including acceptance or non-acceptance of content of a given message at any stage of the exchange.
Owner:DATAWITNESS ONLINE

Switching circuit, and a modulator, demodulator or mixer including such a circuit

A switching circuit comprising: first and second steering switches operable to make or break a path between first and second terminals thereof, and each steering switch further having a control terminal for controlling the switch, the first and second steering switches having their control terminals driven by first and second switching signals, the first and second switching signals having a first frequency and the second switching signal being in anti-phase with the first switching signal and a first chopping switch operable to make or break a path between first and second terminals thereof and being connected in series with at least one of the first and second steering switches and receiving at its first terminal an input to be modulated, wherein the control terminal of the chopping switch is driven by a first switching control signal such that the chopping switch is non-conducting while the first and second steering switches are changing between being conducting and being non-conducting.
Owner:MEDIATEK INC

Integrated control system for arc suppression coil

The invention discloses an integrated control system for an arc suppression coil. A new neutral-point earthing system equivalent operation model is built; and a resonant earthing system can be precisely tuned, and neutral-point displacement voltage can be precisely controlled only by changing damping resistance connected in parallel to two ends of the arc suppression coil for two times. According to the integrated control system for the arc suppression coil, system capacitance and conductivity can be precisely measured. Meanwhile, with the method, a precise inductance value for restricting the neutral-point displacement voltage by being far away from a resonance point for a follow-tuning type arc suppression coil under an overcompensation or undercompensation state is given, and a precise susceptance value for restricting the neutral-point displacement voltage to be connected in parallel under a full compensation or non-full compensation state of a pre-tuning type arc suppression coil is also given. The integrated control system is suitable for any resonant earthing power grid system and any arc suppression coil device. The integrated control system has the advantages of wide applicable range, small influence on the system operation and the like, is simple to operate and is easy to realize.
Owner:刘宝稳

Energy-saving operating mode for recovering heat of central air-conditioner and supplying domestic hot water

The invention relates to an energy-saving operating mode for recovering heat of a central air-conditioner and supplying domestic hot water. The system for recovering heat of the central air-conditioner and supplying domestic hot water comprises a central controller automatic control system, a cold water unit, a cooling tower, a domestic hot water charging system, a heat recovery unit system and a constant-temperature hot water supply system. The system for recovering heat of the central air-conditioner and supplying domestic hot water has the following advantages that: (1) the system can be used for producing domestic hot water by two operating ways according to seasons: in spring and autumn transition season, the heat recovery system can be used for producing domestic hot water continuously by utilizing the recovered heat and also producing basically same amount of coldness to charge the original chilled water system simultaneously during operation, while the operation of other refrigerating units can be stopped or reduced; in summer, the heat recovery system and other cold water units operate simultaneously, and the cooling water of other units is utilized for pre-heating insulating water tanks to charge water; (2) two insulating water tanks are arranged to charge, heat and supply water alternatively, thus a set of complete hot water heating and supplying system is formed, and constant-temperature domestic hot water can be supplied stably; and (3) the system has remarkable economical efficiency.
Owner:李瑞杰 +1

Method for controlling low temperature refrigeration of air conditioner

The invention provides a method for controlling low temperature refrigeration of an air conditioner. The method comprises the following steps: (1) measuring middle temperature T3 of an outer unit condenser; (2) comparing T3 with first preset values T1 and T3 and a second preset value T2 respectively, wherein T1 is greater than T2; (3) when T3 is greater than T1, raising output voltage U of an external motor so as to increase the rotating speed of an external fan; when T3 is smaller than T2, decreasing the U so as to reduce the rotating speed of the external fan. According to the method for controlling the low temperature refrigeration of the air conditioner, the output voltage U of the external motor is adjusted according to the middle temperature T3 of the condenser so as to adjust the rotating speed of the external fan, and then the T3 is stabilized in a range of T2 to T1. The T3 can reflect the system operation pressure of the air conditioner better, thus the T3 stabilized in the certain range can ensure the working pressure of the condenser, thus the system operation pressure is controlled better; therefore, stable operation of the system is ensured during the low temperature refrigeration of the air conditioner, thus the start and stop times of a compressor are reduced, and the comfort of room is improved.
Owner:GUANGDONG CHIGO HEATING & VENTILATION EQUIP CO LTD

User demand response dispatching system and method of smart grid

The invention relates to a user demand response dispatching system and method of a smart power grid. The system comprises a power station information acquisition module, a user information acquisition module, a user node configuration module, a data processing module, a user demand response list generation module and a user demand response dispatching module, wherein the power station information acquisition module, the user information acquisition module and the user node configuration module are independently connected with the data processing module; the data processing module is connected with the user demand response list generation module; and the user demand response list generation module is connected with the user demand response dispatching module. The method comprises the following steps: according to the power supply and power generation characteristic information of each power station node, user node characteristic information and user node demand parameters, obtaining the priority of user nodes and the priority of user node demand response time; generating a demand response list of each user; and according to the demand response list, dispatching power energy to each user node by each power station node.
Owner:SHANGHAI UNIV

Variable-speed constant-frequency wind power generation device having energy storing device

The invention provides a variable-speed constant-frequency wind power generation device having an energy storing device. An output shaft of a wind turbine with a fixed propeller pitch is connected to an input shaft of a permanent magnet generator; the permanent magnet generator is coaxially connected to a regulating motor; an armature winding of the permanent magnet generator is connected to a power grid through a primary synchronization switch; the armature winding of the regulating motor is connected to an alternating current end of an engine aside converter; a direct current end of the engine aside converter is connected to the direct current end of a net aside converter; the energy storing device is connected to the direct current end of the engine aside converter through a charge-discharge device; an alternating end of the net aside converter is connected to a low-voltage end of a transformer; and a high-voltage end of the transformer is connected to the power grid through a secondary synchronization switch. The invention applies the energy storing device in the permanent magnet wind power generation device, therefore realizing the stable variable-speed constant-frequency running as well as flexibly changing the active power and the reactive power output by a power generation device based on the self-regulation capability when the maximum wind power is transformed so as to ensure the power balance of the power grid.
Owner:HARBIN ENG UNIV

Air-conditioning air guiding mechanism and air conditioner

ActiveCN103307725AReduce motor operationComfortable air supplyAir-flow control membersLouverSmall range
The invention provides an air-conditioning air guiding mechanism and an air conditioner. The air guiding mechanism comprises a base, an air outlet assembly and a driving assembly; the air outlet assembly comprises a connecting rod part and a plurality of air guide louvers arranged on the connecting rod part; both ends of the connecting rod part are connected with the base in a sliding manner; the driving assembly is connected to the middle part of the connecting rod part and is used for driving the connecting rod part to be bent and deformed so as to change an air guide angle of each air guide louver; and the indoor unit of the air conditioner adopts the air guiding mechanism. The air-conditioning air guiding mechanism provided by the invention has a simple structure, is low in cost and can implement large-range dispersed air supply and small-range centralized air supply only by adopting one motor to drive the air guide louvers; when the air-conditioning air guiding mechanism is applied to the indoor unit of the air conditioner, the air supply range can be selected according to the requirements of users and the individual requirements of consumers are met; and moreover, a continuous uniform air supply region is spatially formed by the air guide louvers, so the air-conditioning air guiding mechanism is more comfortable to supply air.
Owner:GD MIDEA AIR-CONDITIONING EQUIP CO LTD +1

Intelligent-type pneumatic actuating mechanism with fault diagnosis function

ActiveCN103899830AQuick repairDynamically grasp the running situationOperating means/releasing devices for valvesElectricityEngineering
The invention discloses an intelligent-type pneumatic actuating mechanism with a fault diagnosis function and belongs to the technical field of fault self-diagnosis of an adjusting valve of automated device. The intelligent-type pneumatic actuating mechanism comprises a support and a pressure film chamber, a push rod is movably mounted in the support, an air pressure signal inlet and a clamping sleeve straight-through joint are arranged on the support, the air pressure signal inlet is communicated with the pressure film chamber, a feedback component I is arranged on the push rod, a long hole I is arranged on a feedback plate I of the feedback component I, a fault detector is mounted on the support, a feedback component II and a potentiometer component are arranged in the fault detector, a roller of the feedback component II extends into the long hole I of the feedback plate I, a hollow pipe communicated with the pressure film chamber is arranged in a sealed shell of the fault detector, a pressure sensor is arranged on the hollow pipe, a shielding box component is arranged in the fault detector, a microprocessor is mounted in the shielding box component, and the pressure sensor and the potentiometer component are electrically connected with the microprocessor. The intelligent-type pneumatic actuating mechanism can realize online detection, find problems in advance and guarantee normal running of a device, so that cost is reduced.
Owner:XUZHOU AKA CONTROL VALVE CO LTD

Substrate transfer processing apparatus

A substrate transfer processing apparatus capable of processing a substrate at high speed is provided. A mounting table on which a substrate is mounted includes a plate-shaped main body and a recessed part formed in a rear surface of the plate-shaped main body. Since the mounting table is lightweight as compared to the mounting table before the recessed part is formed therein, the load on a motor is small and the running cost is low even when the mounting table is moved at high speed. Because the plate-shaped main body is made of granite, the mounting surface can be made flat and smooth by polishing. Since the mounting surface is flat and smooth, the accuracy in positioning the substrate is high.
Owner:ULVAC INC
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