87results about How to "Increase ion density" patented technology

The present invention provides an inductively coupled, magnetically enhanced ion beam source, suitable to be used in conjunction with probe-forming optics to produce an ion beam without kinetic energy oscillations induced by the source.

A method of processing a workpiece in a plasma reactor includes establishing a torroidal path for a plasma current to flow that passes near and transverse to the surface of said workpiece, maintaining a plasma current in the torroidal path by applying RF power to a portion of the torroidal path away from the surface of the workpiece, and increasing the ion density of the plasma current in the vicinity of the workpiece by constricting the area of a portion of the torroidal path overlying the workpiece.

A plasma reactor for processing a semiconductor workpiece, includes a reactor chamber having a chamber wall and containing a workpiece support for holding the semiconductor support, the electrode comprising a portion of the chamber wall, an RF power generator for supplying power at a frequency of the generator to the overhead electrode and capable of maintaining a plasma within the chamber at a desired plasma ion density level. The overhead electrode has a capacitance such that the overhead electrode and the plasma formed in the chamber at the desired plasma ion density resonate together at an electrode-plasma resonant frequency, the frequency of the generator being at least near the electrode-plasma resonant frequency. The reactor further includes a set of MERIE magnets surrounding the plasma process area overlying the wafer surface that produce a slowly circulating magnetic field which stirs the plasma to improve plasma ion density distribution uniformity.

The present invention provides a liquid crystal display device that allows a reduction in a voltage holding ratio (VHR) of a liquid crystal layer and an increase in an ion density (ID) in the liquid crystal layer to be suppressed and thereby addresses issues of faulty display such as white missing pixels, alignment inconsistencies, and burn-in. The liquid crystal display device according to the present invention, having a feature of suppressing the reduction in a voltage holding ratio (VHR) and the increase in an ion density (ID) in a liquid crystal layer and thereby suppressing occurrence of faulty display such as burn-in, is particularly useful as VA-mode and PSVA-mode liquid crystal display devices for active-matrix driving and may be used for liquid crystal display devices such as a liquid crystal TV, a monitor, a mobile phone, and a smart phone.

A plasma reactor for processing a workpiece, includes a vacuum chamber defined by a sidewall and ceiling, and a workpiece support pedestal having a workpiece support surface in the chamber and facing the ceiling and including a cathode electrode. An RF power generator is coupled to the cathode electrode. Plasma distribution is controlled by an external annular inner electromagnet in a first plane overlying the workpiece support surface, an external annular outer electromagnet in a second plane overlying the workpiece support surface and having a greater diameter than the inner electromagnet, and an external annular bottom electromagnet in a third plane underlying the workpiece support surface. D.C. current supplies are connected to respective ones of the inner, outer and bottom electromagnets.

A method for producing a nanostructured, in particular a ceramic-like functional coating on a substrate is described. To that end, using at least one plasma source, a pulsed plasma is produced with which a matrix phase and at least one nano-scale interstitial phase embedded in it are deposited on the substrate via a material input. Preferably a plurality of pulsed plasma sources that are time-correlated or synchronized with each other are used. Also proposed is a nanostructured functional coating, in particular one producible by this method, which is free of chlorine and / or sulfur, and which contains at least one metal and / or at least one element selected from the group oxygen, hydrogen, nitrogen, carbon, helium, argon or neon.

Disclosed is a microwave plasma processing apparatus (100) that generates a plasma of a processing gas in a chamber (1) by microwaves radiated from microwave radiating holes (32) of a plane antenna (31) and transmitted through a microwave-transmissive plate (28), thereby to carry out plasma processing of a processing object with the plasma. The microwave-transmissive plate (28) has a microwave transmitting surface having a recessed / projected area (42) in an area corresponding to a peripheral region of the processing object, and having a flat area (43) in an area corresponding to a central region of the processing object (W).

The present invention provides a liquid crystal display device that is free from a reduction in the voltage holding ratio (VHR) of the liquid crystal layer and an increase in ion density (ID) and that enables problems of defective display, such as white spots, uneven alignment, and image-sticking, to be eliminated. In particular, the present invention provides a liquid crystal display device in which a liquid crystal composition containing a liquid crystal compound having a specific structure is used in the liquid crystal layer and in which an optically anisotropic body formed through polymerization of a polymerizable liquid crystal composition containing a specific amount of a polymerizable liquid crystal compound having a specific structure is used as an in-cell retardation layer.

The invention relates to an ultrasonic atomization atmospheric-pressure glow-discharge ionization apparatus. The apparatus comprises an ultrasonic atomization apparatus, an atmospheric-pressure glow-discharge apparatus, a high-voltage power supply and a sample inlet interface, wherein the ultrasonic atomization apparatus comprises a sample inlet pipe, a sample container, a liquid inlet pump, an ultrasonic atomizer and a spraying nozzle; the sample inlet pipe is connected with the sample container and the liquid inlet pump; the liquid inlet pump is used for extracting a water sample of a liquid sample; the liquid outlet end of the liquid inlet pump is connected with the ultrasonic atomizer; and the atmospheric-pressure glow-discharge apparatus comprises a discharging needle, a high-voltage glow reaction chamber and a sample inlet conical opening. By virtue of ultrasonic atomization, the liquid sample, which is not suitable for volatilization, can be directly sampled, without requiring complex pretreatment, so that sensitive and rapid mass spectrometry can be realize; and therefore, the ultrasonic atomization atmospheric-pressure glow-discharge ionization apparatus is wide in application prospect in rapid mass spectrometry of food, pesticides, environment and the like.

Local plasma density, e.g., the plasma density in the vicinity of the substrate, is increased by providing an ion extractor configured to transfer ions and electrons from a first region of magnetically confined plasma (typically a region of higher density plasma) to a second region of plasma (typically a region of lower density plasma). The second region of plasma is preferably also magnetically shaped or confined and resides between the first region of plasma and the substrate. A positively biased conductive member positioned proximate the second region of plasma serves as an ion extractor. A positive bias of about 50-300 V is applied to the ion extractor causing electrons and subsequently ions to be transferred from the first region of plasma to the vicinity of the substrate, thereby forming higher density plasma. Provided methods and apparatus are used for deposition and resputtering.

There is provided an ion reflector for use with a mass spectrometer for directing a flow of ions between two distinct axes of travel. The reflector includes an electric field capable of causing a flow of ions focused through a first spatial region to be focused toward a second spatial region, whereby the first and second spatial regions are aligned with respective axes of travel.

The present invention provides a liquid crystal display device that prevents a decrease in the voltage holding ratio (VHR) and an increase in the ion density (ID) in the liquid crystal layer, and resolves the problems of display defects, such as white streaks, variations in alignment, and image sticking. Since a liquid crystal display device according to the present invention has a feature of preventing a decrease in the voltage holding ratio (VHR) and an increase in the ion density (ID) in the liquid crystal layer, and suppressing the occurrence of display defects such as image sticking, the liquid crystal display device is particularly useful for active matrix driving liquid crystal display devices with an IPS mode or an FFS mode and can be applied to liquid crystal display devices such as liquid crystal televisions, monitors, cellular phones, and smart phones.