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Process and device for coating steel strip through ECR microwave plasma chemical vapor deposition

A technology of chemical vapor deposition and microwave plasma, applied in the direction of gaseous chemical plating, metal material coating process, coating, etc., can solve the problems of not seeing continuous strip steel coating, not finding, etc., to avoid pollution, ionization degree The effect of high and low substrate temperature

Inactive Publication Date: 2009-08-26
BAOSHAN IRON & STEEL CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

For steel and plate substrates, only two patents for surface treatment of steel plates have been seen at present, such as the report that Japan adopts microwave plasma to carry out surface treatment on the surface of steel plates, and its purpose is to remove the oxide layer on the surface (such as Japanese patent Ishioka, M., et al., METHOD FOR REDUCING OXIDE OF METALLICPLATE, NKK CORP; SUGIYAMA KAZUO, 1998, JP.10259420.) and surface treatment for precoated plates (Yui, K., et al., METHOD AND APPARATUS FOR CONTINUOUSPLASMA TREATMENT OF PRECOATED METAL PLATE, NIPPON STEEL CORP, 1988, JP.63190682.); There is no report of using microwave plasma technology for continuous strip steel coating, and no report of using ECR enhanced microwave plasma technology for continuous strip steel coating

Method used

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  • Process and device for coating steel strip through ECR microwave plasma chemical vapor deposition
  • Process and device for coating steel strip through ECR microwave plasma chemical vapor deposition
  • Process and device for coating steel strip through ECR microwave plasma chemical vapor deposition

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0054] Embodiment one. Cold-rolled steel strip is coated with SiO 2

[0055] In this example, SiH4 is selected as the precursor, oxygen is passed through, and SiO2 film is deposited in the ECR microwave plasma chemical vapor deposition coating unit.

[0056] The ratio of SiH4 / O2 is 8 / 24, and Si:O is closest to 1:2 at this flow rate.

[0057] The cold-rolled sheet passes at 20m / min, which can achieve 50-100nm SiO 2 coating products.

[0058] When the width of the cold-rolled sheet is in the range of 300mm, the fluctuation of the film thickness is within 3%. The deposited SiO 2 Thin film structure diagram (FTIR diagram) such as image 3 As shown, it can be seen that what is deposited is SiO 2 film.

Embodiment 2

[0059] Embodiment 2. Galvanized steel coil coated with SiO 2

[0060] In this example, choose SiH 4 As a precursor, oxygen is introduced to deposit SiO in the ECR microwave plasma chemical vapor deposition coating unit 2 film.

[0061] SiH 4 / O 2 The ratio is 8 / 24, and Si:O is closest to 1:2 at this flow rate.

[0062] 50-100nm SiO can be achieved when the galvanized sheet passes through at 20m / min 2 coating products.

[0063] When the width of the cold-rolled sheet is in the range of 300mm, the fluctuation of the film thickness is within 3%. Its film structure is as Figure 4 and Figure 5 As shown, it can be seen that what is deposited is SiO 2 film.

Embodiment 3

[0064] Embodiment three. Plating TiO on stainless steel coils 2

[0065] In this example, titanium isopropoxide TIPT (Ti(O-i-C 3 h 7 ) 4 )) As a precursor, oxygen is introduced to deposit TiO in the ECR microwave plasma chemical vapor deposition coating unit 2 film.

[0066] TIPT is heated to 100 degrees, through argon, into the coating chamber; when the ratio of TIPT and oxygen is 1:2. Generate plasma for coating. Stainless steel plate passes at 20m / min, 50nm TiO can be achieved 2 coating products.

[0067] It can be seen from the above examples that surface technology will be the focus of the next steel technology research and development, especially the best process for realizing "personalized products". The user's demand for performance and the pressure of environmental protection make the vacuum coating technology as "the next generation of continuous strip steel coating technology" has attracted great attention, and has become a worldwide research and development...

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Abstract

The invention discloses a process and device for coating a steel strip through ECR microwave plasma chemical vapor deposition and relates to the field of chemical plating. After being unfolded in the air and chemical pre-treatment or plasma pre-treatment, the steel strip enters an ECR microwave plasma chemical vapor deposition unit through a vacuum tunnel and a vacuum sealing device and then a precursor, a carrier gas and a reaction gas are introduced into the ECR microwave plasma chemical vapor deposition unit to generate plasma to coat the strip steel with a film; and after coating, the steel strip passes through a closed device and enters the air to be coiled completely and the whole coating process is finished. The process and the device can be used in the field of steel vacuum coating or on laboratory equipment. Given the industrialization of vacuum coating, the process and the method can be further promoted and have wide prospects.

Description

technical field [0001] The invention belongs to the field of chemical plating through the decomposition of gaseous compounds and the reaction product of the surface material does not remain in the plating layer, and more specifically to the field of chemical vapor deposition technology characterized by a plating method. Background technique [0002] In the current automobile, construction, engineering and home appliance industries, steel plates with good surface properties are the key materials for these industries, and the existing strip steel coating technologies mainly include hot-dip galvanizing, electro-galvanizing, electro-tin plating, color coating and other coating processes , usually including chemical pretreatment and phosphating, passivation, anti-fingerprint coating and other pre- and post-treatment processes. [0003] In recent years, the market's demand for steel plates with better surface properties has been increasing. At the same time, users have higher and ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C16/511C23C16/02C23C16/52
Inventor 杨立红
Owner BAOSHAN IRON & STEEL CO LTD
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