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2596results about How to "Improve alignment accuracy" patented technology

Lithographic apparatus, device manufacturing method, and device manufactured thereby

An alignment system uses a self-referencing interferometer that produces two overlapping and relatively rotated images of an alignment markers. Detectors detect intensities in a pupil plane where Fourier transforms of the images are caused to interfere. The positional information is derived from the phase difference between diffraction orders of the two images which manifests as intensity variations in the interfered orders. Asymmetry can also be measured by measuring intensities at two positions either side of a diffraction order.
Owner:ASML NETHERLANDS BV

Alignment method and apparatus therefor

A method of transferring a pattern of a mask onto shot areas on a substrate determines two sets of parameters in a single model equation. The parameters in one of the two sets relate to arrangement of a plurality of shot areas on the substrate, and the parameters in the other set relate to the shot areas per se. The mask and the substrate are moved relatively in accordance with the determined parameters.
Owner:NIKON CORP

Alignment method and method for producing device using the alignment method

An alignment method for aligning each shot area on a photosensitive substrate with a reticle according to array coordinate predicted by a statistical technique with an improved alignment precision without inviting degradation of throughput, wherein a plurality of alignment marks 29-1, 30-1, 34-1, 35-1 in a short area 27-1 and so forth provided on the n-th wafer 8 (1<=n<=N-1) are measured to carry out the alignment of the shot area with the reticle considering the misalignment of the wafer 8 and the distortion of the shot area 27-1 and so forth, and one alignment mark in a shot are 27-1 or another provided on the (n+k)th wafer 8 (1<=k<=N-n) is measured to carry out the alignment of the shot area with the reticle considering the misalignment of the wafer 8 found from the measurement results, and the distortion of the shot area 27-1 and so forth obtained when the nth wafer 8 is processed.
Owner:NIKON CORP

Aligning system photolithography equipment

The invention discloses an alignment system applied in a lithography device, which uses three periods phase grating with crude precision combination in a substrate marker or a substrate station reference marker, uses a first order diffraction light of the three periods as an alignment signal, simultaneously realizes a big capture range and gets high alignment precision, gets labeled deformation information and other useful information, and through the optimum design of the match and / or the layout of the three periods, the influence on an alignment position by asymmetrical deformation of the marker is effectively reduced.
Owner:SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD

Methods for patterning substrates having arbitrary and unexpected dimensional changes

Methods for patterning a plurality of electronic elements on a deformable substrate. The method uses an optical measurement device for optically measuring an existing geometric pattern on a substrate. The existing pattern is written on an nth layer of the substrate. A computing device, coupled to the optical measurement device, calculates a correction between the existing geometric pattern and an expected pattern for the nth layer. An image transformation component, coupled to the computing device, performs an image transformation on an electronic pattern to be used in an (n+1)th layer, based on the calculated correction, to generate a corrected electronic pattern. A writing component, coupled to the image transformation component, writes the corrected electronic pattern onto the (n+1)th layer using a programmable digital mask system. The writing component contains a radiation source which is coupled to an optical system for guiding radiation from the radiation source to the programmable digital mask and from there to the substrate.
Owner:SONY CORP +1

Automatic system for temporal alignment of music audio signal with lyrics

An automatic system for temporal alignment between a music audio signal and lyrics is provided. The automatic system can prevent accuracy for temporal alignment from being lowered due to the influence of non-vocal sections. Alignment means of the system is provided with a phone model for singing voice that estimates phonemes corresponding to temporal-alignment features or features available for temporal alignment. The alignment means receives temporal-alignment features outputted from temporal-alignment feature extraction means, information on the vocal and non-vocal sections outputted from vocal section estimation means, and a phoneme network, and performs an alignment operation on condition that no phoneme exists at least in non-vocal sections.
Owner:NAT INST OF ADVANCED IND SCI & TECH

Novel wavelength division multiplexing demultiplexing optical assembly applied to high-speed parallel long-distance transmission

The invention relates to a novel wavelength division multiplexing demultiplexing optical assembly applied to high-speed parallel long-distance transmission. The output end of a laser group is sequentially provided with a lens group, an optical regulating plate group, a lower layer silicon lens array and a lower layer optical filter group, wherein the output end of the lower layer optical filter group is provided with a lower layer free space wavelength division multiplexing device, the output end of the lower layer free space wavelength division multiplexing device is provided with an optical isolator, the output end of the optical isolator is provided with a focusing lens, the output end of the focusing lens is connected with an input optical fiber, an output optical fiber is connected with a collimating lens, the output end of the collimating lens is connected with a prism, the output end of the prism is provided with an upper layer free space wavelength division multiplexing device, the output end of the upper layer free space wavelength division multiplexing device is provided with the upper layer optical filter group, the output end of the upper layer optical fiber group is provided with an upper layer silicon lens array, and the output end of the upper layer silicon lens array is provided with a detector group. The optical signal multiplexing and demultiplexing is realized by using the optical filter array structure.
Owner:INNOLIGHT TECHNOLOGY (SUZHOU) LTD

Method and system for efficient pacing of speech for transription

A method and system for improving the efficiency of real-time and non-real-time speech transcription by machine speech recognizers, human dictation typists, and human voicewriters using speech recognizers. In particular, the pacing with which recorded speech is presented to transcriptionists is automatically adjusted by monitoring the transcriptionists' output by comparing the output acoustically or phonetically to the presented recorded speech as well as monitoring the resulting transcription, and accordingly adjusting the pacing.
Owner:COGI

Rapid fine alignment method for SINS

The invention relates to a rapid alignment method with high precision for a strap-down inertial navigation system, belonging to the alignment method for the strap-down inertial navigation system. The method comprises the following steps of: collecting an output signal from an inertia measurement component, and obtaining the angular velocity and the specific force information of a vehicle; performing coarse alignment by the strap-down inertial navigation system; performing calculation by the strap-down inertial navigation system; performing precise alignment by the strap-down inertial navigation system; filter outputting and correcting; and finishing the precise alignment. The invention can be used for improving alignment precision and rapidness of the low-cost strap-down inertial navigation system; realizes azimuth alignment; and has the advantages of high feasibility and operability, and low cost.
Owner:NANJING UNIV OF AERONAUTICS & ASTRONAUTICS

Lens holder and laser array unit using the same

In a laser array unit in which a plurality of laser beams emitted from a laser array is received by a lens array, the lens holder for fixedly bonding the lens array is formed such that the length of the surface on which the lens array is bonded in the direction orthogonal to the optical axis direction of the lens is longer than the length of the surface to be bonded to a certain other fixing member in the same direction.
Owner:ADTEC ENG +1

Dental x-ray apparatus and method of positioning a patient therein

A dental x-ray apparatus is provided that includes an x-ray system having an x-ray source and x-ray detection means; positioning means for positioning a patient's head in a predefined position with respect to the x-ray system; and at least one video camera for generating video images of the patient's head.
Owner:DENTAL IMAGING TECH +1

Method and structure for aligning mechanical based device to integrated circuits

A method for bonding substrates together. The method includes providing a first substrate comprising a first surface. The first substrate comprises a plurality of first chips thereon. Each of the chips has integrated circuit devices. The first substrate includes a first alignment mark on the first substrate and a second alignment mark on the first substrate. The method also includes providing a second substrate comprising a silicon bearing material and second surface. The second substrate comprising a plurality of second chips thereon. Each of the chips comprises a plurality of mechanical structures. The second substrate has a first silicon based pattern on the second substrate and a second silicon based pattern on the second substrate. The method includes moving the first alignment mark of the first substrate to the first silicon based pattern on the second substrate and aligning the second alignment mark of the first substrate to the second silicon based pattern on the second substrate. A portion of at least one of the first substrate or the second substrate is illuminated with electromagnetic radiation. The method includes detecting a portion of the electromagnetic radiation and using the detected portion of the electromagnetic radiation to align the first substrate with the second substrate. The method also includes coupling the first substrate with the second substrate by contacting the first surface with the second surface and bonding the first surface with the second surface.
Owner:MIRADIA INC

Optical beam transformer module for light coupling between a fiber array and a photonic chip and the method of making the same

Optical modules and methods for making optical modules are described. In one embodiment, an optical module includes a substrate assembly including a photonic chip mounting region, and a groove extending towards the photonic chip mounting region. A waveguide is disposed within the groove. A plurality of spacers is on the chip mounting region, each spacer having a predetermined height. A photonic chip is placed on the plurality of spacers and above the chip mounting region, and an optical coupler is between the photonic chip and the waveguide.
Owner:HO SENG TIONG

Aligning system of photoetching apparatus and steping combined system of said aligning system thereof

The invention discloses mask-alignment aligning system and its grade combining system. The aligning system includes light source module, illumination module, imaging module, and detecting module. The grade combining system makes positive negative grade frequency spectrum facula of the alignment mark diffraction spectrum process corresponding overlap coherent, uses polychromatic light separating system to separate multiple wavelength light signal, measures light intensity or phase change at the corresponding position of the multiple wavelength multistage secondary diffracted facula to gain alignment mark position information. The invention has high alignment precision and stability.
Owner:SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD

Contacts of board-to-board connector

An electrical connector assembly includes a socket connector soldered on one circuit board and a plug connector soldered on another circuit board. The socket connector includes an insulating socket base and a plurality of first terminals received in the first terminal-receiving slots of the insulating socket base. Each first terminal successively extends to form a first terminal lead, a first inverted U-shaped portion, a base U-shaped portion and an auxiliary-clamping portion. One leg of the base U-shaped portion includes a first elastic-contact portion. The plug connector includes an insulating plug base and a plurality of second terminals received in the second terminal-receiving slots of the insulating plug base. Each second terminal successively extends to form a second terminal lead and a second inverted U-shaped portion having a second elastic-contact portion. The second inverted U-shaped portion of the second terminal is inserted into the base U-shaped portion of the first terminal, and the first elastic-contact portion contacts the second elastic-contact portion when mating. The invention can provide stable mating and electrical connection and is in compliance with recent downsizing trends.
Owner:MOLEX INC

Flip chip device having soldered metal posts by surface mounting

A disclosed semiconductor device having MPS-C2 (Metal Post Solder-Chip Connection) structure can be mounted on a PCB by an SMT mounter. A chip is disposed on a substrate. The substrate has a plurality of connecting pads and a plurality of accessory pads, and the chip has a plurality of corresponding metal posts and a plurality of accessory bumps. The dimensions on the soldered flat tops of the accessory bumps are corresponding to the soldered areas of the accessory pads where each soldered flat top has a plurality of angular corners and an edge between two adjacent angular corners where the length of the edge is twice greater than the pad pitch. Therefore, the displaced or rotational displaced metal posts can be pulled back and self-aligned during reflow processes so that an SMT mounter with poor alignment accuracy can be implemented for flip-chip bonding the semiconductor device having MPS-C2 structure to replace the conventional expensive flip-chip die bonder and to achieve higher productivity. Furthermore, the shape of the flat top surfaces of the metal posts does not have to match with the shape of the connecting pads.
Owner:POWERTECH TECHNOLOGY

PTZ correction method

The present invention relates to a PTZ correction method, belonging to the technical field of PTZ calibration. Firstly, the image of a preset position is collected as a template image, and an azimuth, a pitch angle and a camera zoom ratio at that time are recorded; then the template image is subjected to modeling, and the outline of a target object is extracted with the center point of the template image as a center; then a PTZ and a camera are set to carry out image collection with the preset position of the template image in collection, the collected image and the template image are compared, and the offset pixel of the target object is calculated; and finally the PTZ offset angle is calculated according to the obtained offset pixel, and the PTZ offset angle is added to the PTZ preset position, and a corrected absolute angle is obtained. The machine vision technology is used to identify a target point, the PTZ posture can be quickly adjusted, an external sensor is not needed, the alignment precision of the PTZ is improved, and the target deviation error in shooting the image is reduced.
Owner:LUOYANG INST OF ELECTRO OPTICAL EQUIP OF AVIC

Method of fabricating two-step self-aligned contact

A method of fabricating a self-aligned contact is provided. A first dielectric layer is formed on a substrate having a contact region therein. Next, a lower hole corresponding to the contact region is formed in the first dielectric layer. Thereafter, a second dielectric layer is formed on the first dielectric layer, and then an upper hole self-aligned to and communicated with the lower hole is formed in the second dielectric layer, wherein the upper hole and the lower hole constitute a self-aligned contact hole. Afterwards, the self-aligned contact hole is filled with a conductive layer.
Owner:UNITED MICROELECTRONICS CORP

Method for acquiring initial course attitude of fiber optic gyro strapdown inertial navigation system

The invention relates to a method for acquiring an initial course attitude of a fiber optic gyro strapdown inertial navigation system. The method is characterized by: extracting gravitational acceleration information from an acceleration meter through filtering processing and compensation, projecting an earth gravitational vector to an inertial coordinate system, with rotational-angular velocity information of the earth included in a projecting component, taking the earth gravitational vector in the inertial coordinate system as reference information, and making use of the output of a gyro and the acceleration meter to estimate an initial attitude angle. On the basis of ensuring that an initial horizontal angle satisfies a precision requirement, the method of the invention substantially improves the precision of an initial course angle of the fiber optic gyro strapdown inertial navigation system.
Owner:HARBIN ENG UNIV

Method for manufacturing thermally-assisted magnetic recording head with light source unit

Provided is a method for manufacturing a thermally-assisted magnetic recording head with “composite slider structure”. In the method, the waveguide is irradiated with a first light from opposed-to-medium surface side, and the passing first light is detected on back surface side to obtain an image of the light-receiving end surface, and a light-receiving center position is determined from the image. Further, the light source is irradiated with a second light from opposite side to joining surface, and the passing second light is detected on the joining surface side to obtain an image of the light-emitting end surface, and a light-emitting center position is determined from the image. Then, the slider and the light source unit are moved based on the determined positions of the light-receiving and light-emitting centers, aligned and bonded. As a result, alignment can be performed with high accuracy in a short process time under simplified process.
Owner:TDK CORPARATION

Initial alignment method of speedometer-assisted strapdown inertial navigation system during running

The invention discloses an initial alignment method of a speedometer-assisted strapdown inertial navigation system during running. The method comprises coarse alignment and fine alignment. The method disclosed by the invention can effectively solve the problem of initial alignment of a vehicle during running. High-precision alignment can be quickly realized by the strapdown inertial navigation system under the help of the speedometer without special movements or stop of the vehicle or external assistant information such as road signs.
Owner:SOUTHEAST UNIV

Alignment method for attaching chip or flexible circuit board to circuit substrate

The invention discloses an alignment method for attaching a chip or a flexible circuit board to a circuit substrate, which is characterized by comprising the following steps of: designing two identification points on the circuit substrate in advance; after the circuit substrate is transferred to a framing table board and positioned, shooting images of the two identification points by using a camera, converting the images of the two identification points into position coordinates of an image coordinate system by using an image processing system; converting image coordinates of the two identification points into mechanical coordinate values of a mechanical coordinate system by using a relationship between the image coordinate system and the mechanical coordinate system; finding out an X-directional offset, a Y-directional offset and a deflection angle around a Z axis between the actual positions of the two identification points and a target position through calculation; and finally adjusting the two identification points to the target position by using an X-directional movement mechanism, a Y-directional movement mechanism and a rotating mechanism around the Z axis, so that the chip or the flexible circuit board is aligned with a conducting terminal of the circuit substrate. By the invention, the alignment precision of a chip on glass (COG), a film on glass (FOG) and a chip on film (COF) is greatly improved.
Owner:苏州凯蒂亚半导体制造设备有限公司

Organic electroluminescence display panel

The invention relates to the technical field of organic electroluminescence display, and discloses an organic electroluminescence display panel. The organic electroluminescence display panel comprises a plurality of R sub pixel units, a plurality of G sub pixel units, a plurality of B sub pixel units and a plurality of W sub pixel units. Each R sub pixel unit comprises four R sub pixel elements, each G sub pixel unit comprises four G sub pixel elements, each B sub pixel unit comprises four B sub pixel elements, and each W sub pixel unit comprises four W sub pixel elements. Different colors are emitted by every two adjacent sub pixel units. The R sub pixel elements, the G sub pixel elements, the B sub pixel elements and the W sub pixel elements form a pixel area of the display panel, each sub pixel unit comprises four sub pixel elements which emit the same light colors, and the alignment precision of MASK in the preparation process can be improved. Meanwhile, due to the fact that the area of each sub pixel element is 1 / 4 of the area of each sub pixel unit, the resolution ratio of the organic electroluminescence display panel can be greatly improved to 4 times of the original resolution ratio.
Owner:BOE TECH GRP CO LTD
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