The invention provides a microring
resonator with an improved coupled zone and a manufacturing method thereof, and belongs to the field of
integrated optics. The device comprises a substrate 1, a bonding layer 2, a straight
waveguide 4, a
dielectric layer 6 and a racetrack type
waveguide 7; the bonding layer 2 is disposed on the substrate 1, the
dielectric layer 6 is disposed on the bonding layer2, the straight
waveguide 4 is disposed in the
dielectric layer 6, a straight channel portion of the racetrack type waveguide 7 is located directly above the straight waveguide 4. The device is characterized by further comprising a burying groove 3, which is formed in the bonding layer 2 in a
coupling area, and located directly under the straight waveguide 4; and the
refractive index of the burying groove 3 is smaller than the
refractive index of the substrate 1. According to the microring
resonator with the improved coupled zone and the manufacturing method thereof, by adopting the burying groove structure, leakage loss of a
light field during transmission can be reduced, and transferring from the
light field to other media can be promoted, thereby improving
coupling efficiency, and an
advantage of promoting change from a multimode mode to mode reduction in a
ridge waveguide can be obtained.