171 results about "Outgassing" patented technology

Systems and methods of reducing outgassing of a substance within a reaction chamber of a reactor are disclosed. Exemplary methods include depositing a barrier layer within the reaction chamber and using a scavenging precursor to react with species on a surface of the reaction chamber. Exemplary systems include gas-phase deposition systems, such as atomic layer deposition systems, which include a barrier layer source and / or a scavenging precursor source fluidly coupled to a reaction chamber of the system.

A method of forming a silicon oxide layer is described. The method first deposits a silicon-nitrogen-and-hydrogen-containing (polysilazane) film by radical-component chemical vapor deposition (CVD). The silicon-nitrogen-and-hydrogen-containing film is formed by combining a radical precursor (excited in a remote plasma) with an unexcited carbon-free silicon precursor. A capping layer is formed over the silicon-nitrogen-and-hydrogen-containing film to avoid time-evolution of underlying film properties prior to conversion into silicon oxide. The capping layer is formed by combining a radical oxygen precursor (excited in a remote plasma) with an unexcited silicon-and-carbon-containing-precursor. The films are converted to silicon oxide by exposure to oxygen-containing environments. The two films may be deposited within the same substrate processing chamber and may be deposited without breaking vacuum.

There is described a hybrid bonding method for through-silicon-via based wafer stacking. Patterned adhesive layers are provided to join together adjacent wafers in the stack, while solder bonding is used to electrically connect the vias. The adhesive layers are patterned to enable outgassing and to provide stress relief.

Disclosed are photo or electron beam curable polymerizable compositions, and preparation thereof and devices containing such cured material. The composition contains completely or substantially completely hydrogenated hydrocarbon-based material completely free or substantially free of carbon-carbon double and triple bonds containing photo or electron beam curable terminal or pendant groups, low-outgassing photoinitiators, an optional viscosity adjustment component and an optional filler. The composition is visible light, UV or electron beam curable. It cures into a low-modulus, low outgassing polymer material. The composition can be used as an adhesive, sealant or lens potting material. It is ideal for use in lithographic tools and other optical devices involving deep or vacuum ultraviolet radiations, in particular, as lens potting materials for 248 nm, 193 nm and 157 nm lithographic tools, as well as other optical devices involving using high fluence irradiation.

A method of forming a dielectric layer is described. The method first deposits a silicon-nitrogen-and-hydrogen-containing (polysilazane) layer by radical-component chemical vapor deposition (CVD). The silicon-nitrogen-and-hydrogen-containing layer is formed by combining a radical precursor (excited in a remote plasma) with an unexcited carbon-free silicon precursor. A silicon oxide capping layer may be formed from a portion of the carbon-free silicon-nitrogen-and-hydrogen-containing layer to avoid time-evolution of underlying layer properties prior to conversion into silicon oxide. Alternatively, the silicon oxide capping layer is formed over the silicon-nitrogen-and-hydrogen-containing layer. Either method of formation involves the formation of a local plasma within the substrate processing region.

The invention, intended primarily for use in a steel flywheel power source (30), provides a vacuum system and a method of maintaining a vacuum inside a flywheel chamber (32) for the life of the power source (30). The vacuum system combines the use of cleaning and de-gassing treatments in the chamber (32) and vacuum tempering of the steel flywheel (31) with the use of a chemical type metal alloy nonevaporable getter, such as zirconium-vanadium-iron, that cooperatively matches the outgassing of the flywheel (31) and chamber (32) by sorbing those gases that are released. The getter may be reactivated throughout the life of the flywheel system by reheating it with an integral heater that is triggered by a timer instead of a vacuum gauge to increase the system reliability, using power taken directly from the energy stored in the flywheel. The electronics (45) of the flywheel power source are used to signal an alarm or prevent achieving or maintaining full speed of the flywheel when the vacuum in the chamber degrades.

A method for fabricating a rigid temporary support used for supporting inorganic substrates during processing includes providing an inorganic substrate comprising a first surface to be processed and a second surface opposite to the first surface. Next, applying a liquid layer to the second surface of the inorganic substrate and then curing the applied liquid layer and thereby forming a rigid temporary support attached to the second surface of the inorganic substrate. Next, processing the first surface of the inorganic substrate while supporting the inorganic substrate upon the rigid temporary support. The curing includes first exposing the applied liquid layer to ultraviolet (UV) radiation and then performing a post exposure bake (PEB) at a temperature sufficient to complete the curing of the applied liquid layer and to promote outgassing of substances.

Embodiments of the present disclosure generally relate to doping and annealing substrates. The substrates may be doped during a hot implantation process, and subsequently annealed using a nanosecond annealing process. The combination of hot implantation and nanosecond annealing reduces lattice damage of the substrates and facilitates a higher dopant concentration near the surface of the substrate to facilitate increased electrical contact with the substrate. An optional capping layer may be placed over the substrate to reduce outgassing of dopants or to control dopant implant depth.

A curable composition and a process for using the curable composition within a grating-coupled waveguide (GCW) sensor are disclosed. The composition can be used for facile replication of optical components, specifically those used in a label-independent detection system where operation of the waveguide is dependent on the detailed formation of micro and nano size patterns. The photo or electron beam curable composition has low viscosity (≦500 cPs) and cures to an optically clear material with high glass transition temperature (≧70° C.), low shrinkage on cure, low outgassing, and low extractables.

Methods for improving fluid flow in one or more flow features of a micro-fluid ejection head and micro-fluid ejection heads having improved fluid flow. One method includes bonding a substrate having a flow feature layer to an ejection head body using a relatively low stress, substantially flexible adhesive containing a relatively volatile polar organic compound. The adhesive is cured under conditions sufficient to induce outgassing of at least a portion of the relatively volatile polar organic compound on at least a portion of a flow feature surface sufficient to increase fluid wetting of the flow feature surface.

Implantable medical devices (IMDs) and their various components, including flat electrolytic capacitors for same, and methods of making and using same and providing for outgassing of gases released during capacitor charge and discharge cycles are disclosed. A gas vent and liquid electrolyte barrier into the electrolyte fill tube lumen that is used to fill the interior case chamber with electrolyte and then needs to be closed to prevent leakage of electrolyte. The fill port is shaped to comprise a fill port tube having interior and exterior tube ends and a fill port ferrule intermediate the ends of the fill port tube and comprising a fill port ferrule flange extending transversely to and away from the fill port tube. The fill port ferrule is mounted in an opening disposed in one of the case wall and the cover wall with the ferrule flange in sealing engagement therewith to locate the exterior tube end extending outwardly away from the fill port ferrule flange and the interior tube end within the interior case chamber. A microporous plug is injected into and fills the fill port lumen, the plug formed of a microporous material allowing the escape of gas released from the liquid electrolyte during capacitor charging while preventing escape of liquid or vaporized electrolyte.

A tire mountable apparatus and a method of fabricating a tire mountable apparatus is disclosed. The tire mountable apparatus includes a first layer, a second layer and a middle layer disposed between the first layer and the second layer. The tire mountable apparatus further includes an electrical device embedded in the middle layer of the tire mountable apparatus. The middle layer of the tire mountable apparatus completely surrounds the electrical device and is formed from a potting compound. The potting compound does not require exposure to heat, air, moisture, or light to cure and does not require solvent evaporation or outgassing of reaction products to cure. The tire mountable apparatus may be constructed by curing the potting compound between the first layer and the second layer.