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316 results about "Master oscillator" patented technology

Definition of master oscillator. : a low-power generator of alternating current that is usually an electron-tube apparatus the output of which is fed into an amplifier.

All-fiber integrated high power coherent beam combination

A fiber laser amplifier system including a master oscillator that generates a signal beam. A splitter splits the signal beam into a plurality of fiber beams where a separate fiber beam is sent to a fiber amplifier for amplifying the fiber beam. A tapered fiber bundle couples all of the output ends of all of the fiber amplifiers into a combined fiber providing a combined output beam. An end cap is optically coupled to an output end of the tapered fiber bundle to expand the output beam.
Owner:NORTHROP GRUMMAN SYST CORP

Laser thin film poly-silicon annealing system

A gas discharge laser crystallization apparatus and method for performing a transformation of a crystal makeup or orientation in a film on a workpiece is disclosed, which may comprise a master oscillator power amplifier MOPA or power oscillator power amplifier configured XeF laser system producing a laser output light pulse beam at a high repetition rate and high power with a pulse to pulse dose control; an optical system producing an elongated thin pulsed working beam from the laser output light pulse beam. The apparatus may further comprise the laser system is configured as a POPA laser system and further comprising: relay optics operative to direct a first output laser light pulse beam from a first laser PO unit into a second laser PA unit; and, a timing and control module timing the creation of a gas discharge in the first and second laser units within plus or minus 3 ns, to produce the a second laser output light pulse beam as an amplification of the first laser output light pulse beam. The system may comprise divergence control in the oscillator laser unit. Divergence control may comprise an unstable resonator arrangement. The system may further comprise a beam pointing control mechanism intermediate the laser and the workpiece and a beam position control mechanism intermediate the laser and the workpiece. Beam parameter metrology may provide active feedback control to the beam pointing mechanism and active feedback control to the beam position control mechanism.
Owner:CYMER INC

Apparatus and method of remote gas trace detection

InactiveUS20030030001A1Radiation pyrometryLaser detailsFrequency modulation spectroscopyEngineering
This specification discloses a method and apparatus for the mobile and remote detection of a gas, such as methane, in the atmosphere. The apparatus includes a TDL based Light Detection and Ranging (LIDAR) driven at carrier frequency lying within the absorption line of the gas. The apparatus also drives the TDL with a modulation frequency to generate upper and lower sidebands in the output of the TDL and with a low ramp frequency to sweep the output of the TDL across twice the width of the pressure-broadened absorption line of the gas, preferably the first overtone absorption line in the case of methane detection. Suitable power for remote detection through use of the TDL is provided by a master oscillator / fiber amplifier transmitter has no moving or adjustable parts at all. An all-solid-state monolithic and integrated amplifier is achieved, which leads to a compact and virtually maintenance-free LIDAR system. The remote detection apparatus includes reference and calibration cells or chambers, and includes a light collector and detectors to detect the quantity and modulation of the light that passes the reference or calibration cells and that is received by the apparatus after reflection back toward the apparatus from an uncooperative target. The apparatus further includes a signal processor that applies a derivative spectroscopy technique, such as frequency modulation spectroscopy or wavelength modulation spectroscopy, to determine the presence of the gas in the atmosphere.
Owner:GAS TECH INST

Laser thin film poly-silicon annealing system

A gas discharge laser crystallization apparatus and method for performing a transformation of a crystal makeup or orientation in a film on a workpiece is disclosed, which may comprise a master oscillator power amplifier MOPA or power oscillator power amplifier configured XeF laser system producing a laser output light pulse beam at a high repetition rate and high power with a pulse to pulse dose control; an optical system producing an elongated thin pulsed working beam from the laser output light pulse beam. The apparatus may further comprise the laser system is configured as a POPA laser system and further comprising: relay optics operative to direct a first output laser light pulse beam from a first laser PO unit into a second laser PA unit; and, a timing and control module timing the creation of a gas discharge in the first and second laser units within plus or minus 3 ns, to produce the a second laser output light pulse beam as an amplification of the first laser output light pulse beam. The system may comprise divergence control in the oscillator laser unit. Divergence control may comprise an unstable resonator arrangement. The system may further comprise a beam pointing control mechanism intermediate the laser and the workpiece and a beam position control mechanism intermediate the laser and the workpiece. Beam parameter metrology may provide active feedback control to the beam pointing mechanism and active feedback control to the beam position control mechanism.
Owner:CYMER INC

Laser apparatus having multiple synchronous amplifiers tied to one master oscillator

Laser apparatus and methods involving multiple amplified outputs are disclosed. A laser apparatus may include a master oscillator, a beam splitter coupled to the master oscillator, and two or more output heads optically coupled to the beam splitter. The beam splitter divides a signal from the master oscillator into two or more sub-signals. Each output head receives one of the two or more sub-signals. Each output head includes coupling optics optically coupled to the beam splitter. An optical power amplifier is optically coupled between the beam splitter and the coupling optics. Optical outputs from the two or more output heads do not spatially overlap at a target. The master oscillator signal may be pulsed so that optical outputs of the output heads are pulsed and substantially synchronous with each other.
Owner:DISCO CORP

Generating sets of tailored laser pulses

In a master oscillator power amplifier, a driver (208) of a diode laser (202) is specially controlled to generate a set of two or more injection laser pulses that are injected into a power amplifier (204) operated in an unsaturated state to generate a set (50) of laser pulses (52) that replicate the temporal power profile of the injection laser pulses to remove a conductive link (22) and / or its overlying passivation layer (44) in a memory or other IC chip. Each set (50) includes at least one specially tailored pulse (52) and / or two or more pulses (50) having different temporal power profiles. The duration of the set (50) is short enough to be treated as a single “pulse” by conventional positioning systems (380) to perform on-the-fly link removal without stopping.
Owner:ELECTRO SCI IND INC

Frequency synthesizer and frequency synthesizing method

The present invention relates to a frequency synthesizer comprising a main unit and a side unit. The main unit comprises a main phase detector to obtain a main control signal, a main oscillator that generates a main synthesized frequency output signal representing the frequency synthesizer output signal based on said main control signal, and a mixer that mixes said main synthesized frequency output signal with a side synthesized frequency output signal to obtain said mixer output signal. The side unit generates said side synthesized frequency output signal and comprises a frequency signal generation unit that provides a linear frequency sweep signal or a fixed-frequency control signal at a fine frequency resolution from said fixed-frequency side reference signal, and a side oscillator that generates said side synthesized frequency output signal based on said frequency sweep signal or said fixed-frequency control signal.
Owner:SONY CORP

Self-referenced locking of optical coherence by single-detector electronic-frequency tagging

A coherent laser beam combining system wherein the output of a single master oscillator is split into a plurality of signals, the signals are electronically modulated at unique frequencies. One signal is designated a reference signal while the remaining signals are passed through phase adjusters. All signals are optically amplified, aligned and passed through a beam splitter to split off a small sample that is imaged onto a photodetector. The photodetector output is fed to a signal processor that produces phase error signals that drive the phase adjusters resulting in a high-powered optically coherent output signal.
Owner:THE GOVERNMENT OF THE UNITED STATES AS REPSESENTED BY THE SEC OF THE AIR FORCE

Reflected wave clock synchronization

A radar system has a phased-array antenna and plural local oscillators for controlling local transmit / receive units. The local oscillators are slaved to a master oscillator. The analog clock signal paths are subject to relative changes in electrical length. The electrical lengths of the signal paths are measured by phase-detecting forward- and reverse-direction clock signal flows. The phase-detected information for each signal path is a measure of the time delay. The radar command processor receives the measure of time delay and corrects the radar operation in response thereto.
Owner:LOCKHEED MARTIN CORP

Ultraviolet fiber laser system

Laser master oscillator—power amplifier system for generating high pulse energy, high average power laser pulses in the ultraviolet 191.25-201.25 nm and 243-246.25 nm spectral ranges, and in the visible 450-537.5 nm spectral range with controllable pulse duration and pulse repetition rate employ a master oscillator seed laser operating in the infra-red spectral range, and a single series connected chain of hybrid fiber—bulk crystalline amplifiers coupled to a non-linear frequency conversion unit to convert the laser pulses to the ultraviolet and visible spectral ranges.
Owner:VERALAS

Application of digital frequency and phase synthesis for control of electrode voltage phase in a high-energy ion implantation machine, and a means for accurate calibration of electrode voltage phase

An improved HE LINAC-based ion implantation system is disclosed utilizing direct digital synthesis (DDS) techniques to obtain precise frequency and phase control and automated electrode voltage phase calibration. The DDS controller may be used on a multi-stage linear accelerator based implanter to digitally synchronize the frequency and phase of the electric fields to each electrode within each stage of the accelerator. The DDS controller includes digital phase synthesis (DPS) circuits for modulating the phase of the electric field to the electrodes, and a master oscillator that uses digital frequency synthesis or DFS to digitally synthesize a master frequency and phase applied to each of the DPS circuits. Also disclosed are methods for automatically phase and amplitude calibrating the RF electrode voltages of the stages.
Owner:AXCELIS TECHNOLOGIES

Timing control for two-chamber gas discharge laser system

Feedback timing control equipment and process for an injection seeded modular gas discharge laser. A preferred embodiment is a system capable of producing high quality pulsed laser beams at pulse rates of about 4,000 Hz or greater and at pulse energies of about 5 to 10 mJ or greater for integrated outputs of about 20 to 40 Watts or greater. The feedback timing control is programmed to permit in some circumstances discharges timed so that no significant laser energy is output from the system. Use of this technique permits burst mode operation in which the first discharge of a burst is a no-output discharge so that timing parameters for each of the two chambers can be monitored before the first laser output pulse of the burst. Two separate discharge chambers are provided, one of which is a part of a master oscillator producing a very narrow band seed beam which is amplified in the second discharge chamber. The chambers can be controlled separately permitting optimization of wavelength parameters in the master oscillator and optimization of pulse energy parameters in the amplifying chamber.
Owner:CYMER INC

Ultraviolet fiber laser system

Laser master oscillator-power amplifier system for generating high pulse energy, high average power laser pulses in the ultraviolet 191.25-201.25 nm and 243-246.25 nm spectral ranges, and in the visible 450-537.5 nm spectral range with controllable pulse duration and pulse repetition rate employ a master oscillator seed laser operating in the infra-red spectral range, and a single series connected chain of hybrid fiber-bulk optical amplifiers coupled to a non-linear frequency conversion unit to convert the laser pulses to the ultraviolet and visible spectral ranges.
Owner:VERALAS

All-fiber integrated high power coherent beam combination

A fiber laser amplifier system including a master oscillator that generates a signal beam. A splitter splits the signal beam into a plurality of fiber beams where a separate fiber beam is sent to a fiber amplifier for amplifying the fiber beam. A tapered fiber bundle couples all of the output ends of all of the fiber amplifiers into a combined fiber providing a combined output beam. An end cap is optically coupled to an output end of the tapered fiber bundle to expand the output beam.
Owner:NORTHROP GRUMMAN SYST CORP

Hybrid high power laser to achieve high repetition rate and high pulse energy

A fiber laser cavity that provides a new pulse shaping and spectral shaping technique is disclosed in this invention to achieve the purpose of resolving the difficulties arising from the issues related to Q-switched solid state lasers. The laser system achieves high repetition rate (1 kHz-100 kHz) and high pulse-to-pulse energy stability with small timing jitter of the laser pulses and scalable to the Joule pulse energy level. The laser system of this invention employs new approach with a hybrid fiber / waveguide master Oscillator-High Power Amplifier (MOPA) laser system in combination with the pulse shaping technology that allows not only to scale the fiber laser pulse energy to the multi-Joule level with high pulse-to-pulse energy stability but also achieve precise control of laser pulse timing jitter in a scale of <100 ps that is at least 5 to 10 time more accurate than for Q-switched systems where the same parameter reaches 500-1000 ps range.
Owner:LIU JIAN

Integrated spectral and all-fiber coherent beam combination

A fiber laser amplifier system including a plurality of master oscillators each generating a signal beam at a different wavelength. A splitter is provided for each master oscillator that splits the signal beam into a plurality of fiber beams where a separate fiber beam is sent to a fiber amplifier. A tapered fiber bundle couples the output ends the fiber amplifiers for each wavelength group into a combined fiber providing a combined output beam, where a separate combined output beam is provided for the wavelength for each master oscillator. An end cap is optically coupled to an output end of each of the tapered fiber bundles to expand the combined output beam. A spectral beam combination grating receives the combined beams from the tapered fiber bundles at different angles and outputs an output beam of all of the combined beams as a single beam being directed in the same direction.
Owner:NORTHROP GRUMMAN SYST CORP

Linear adaptive optics system in low power beam path and method

A system and method for providing a wavefront corrected high-energy beam of electromagnetic energy. In the illustrative embodiment, the system includes a source of a first beam of electromagnetic energy; an amplifier for amplifying said beam to provide a second beam; a sensor for sensing aberration in said second beam and providing an error signal in response thereto; a processor for processing said error signal and providing a correction signal in response thereto; and a spatial light modulator responsive to said correction signal for adjusting said beam to facilitate a correction of said aberration thereof. In more specific embodiments, the source is a laser and the sensor is a laser wavefront sensor. A mirror is disposed between said modulator and said sensor for sampling said beam. The mirror has an optical thin-film dielectric coating on at least one optical surface thereof. The coating is effective to sample said beam and transmit a low power sample thereof to said means for sensing aberration. The processor is an adaptive optics processor. The spatial light modulator may be a micro electro-mechanical system deformable mirror or an optical phased array. In the illustrative embodiment, the source is a master oscillator and the amplifier is a power amplifier beamline. An outcoupler is disposed between the oscillator and the amplifier.
Owner:RAYTHEON CO

Master-oscillator power-amplifier (MOPA) excimer or molecular fluorine laser system with long optics lifetime

The lifetime of optical components used in deep-UV (DUV) excimer laser systems, including systems in a MOPA configuration, can be increased by reducing the intensity of pulses incident upon these components. In one approach, an output pulse can be “stretched” in order to reduce the peak power of the pulse. A pulse stretching component can be used, which can be mounted outside the laser enclosure with a horizontal beam path in order to provide a delay line with a minimum impact on the laser system footprint. The horizontal beam path also can minimize the number of optical components in the arm containing the high power beam. A beamsplitting prism can be used with the delay line to avoid the rapid degradation of coatings otherwise exposed to intense UV beams. The prism can expand the beam in the delay line in order to minimize beam intensity and losses due to reflection.
Owner:COHERENT GMBH

Self-synchronous locking of optical coherence by single-detector electronic-frequency tagging

A coherent laser beam combining system wherein the output of a single master oscillator is split into a plurality of N signals, and the N signals are electronically modulated at unique frequencies. There is no reference signal and all of the signals are passed through phase adjusters. All N signals are optically amplified, aligned and passed through a beam splitter to split off a small sample that is imaged onto a photodetector. The photodetector output is fed to a signal processor that separates the N signals and produces N phase error signals that drive the N phase adjusters resulting in a high-powered optically coherent output signal.
Owner:AIRFORCE GOVERNMENT OF THE UNITED STATES AS REPRESENTED BY THE SEC OF THE THE

MOPA laser apparatus with two master oscillators for generating ultraviolet radiation

Laser apparatus including two different, pulsed MOPAs, one having a fundamental wavelength of 1064 nm and the other having a fundamental wavelength of 1564 nm, provide trains of optical pulses. The 1064-nm pulses are frequency tripled to 355 nm and the 1564-nm pulses are frequency doubled to 782 nm. The 355-nm and 782-nm pulses are mixed to provide 244-nm pulses. The 244-nm pulses are mixed with residual 1064-nm pulses to provide 198-nm output pulses of the apparatus. The output pulses can be either digitally modulated or amplitude modulated by controlling the phase relationship between the 1064-nm and 1564-nm pulses.
Owner:COHERENT INC

High energy arbitrary waveform source

A high-energy optical beam generator providing a desired output waveform. The generator includes a master oscillator, such as a mode-locked laser, to generate an input beam, a first dispersive element to decompose the input beam into frequency components, a set of phase and amplitude modulators to modulate the frequency components individually, a set of power amplifiers to amplify the frequency components individually, and a second dispersive element to recombine the amplified and modulated frequency components into a single output beam. Phase control electronics control the modulators to provide the desired waveform for the output beam, based on its intended application and on sensed characteristics of the input beam and the output beam.
Owner:NORTHROP GRUMMAN SYST CORP

Matched crystal temperature compensation device

The invention relates to a device and a method for temperature compensation via the determination of cut-angles of a master and a slave crystal (mc, sc) employed in a master and slave oscillator (m, s). When the master and the slave oscillator (m, s) have been tuned to their center frequencies (fc_m, fc_s), then the temperature characteristic of the slave oscillator (s) is actively detuned with respect to the temperature characteristic of the master oscillator (m). In a detuned state a frequency ratio parameter (n_s) of the slave to the master output frequency (f_s / f_m) is determined and the cut-angle is determined by using this parameter (n_s) to read out the cut-angle dependent on the temperature (T) from a memory (MEM). The invention also relates to a temperature compensation device and method where two crystals of different cut-angles are used and a frequency ratio parameter is determined to determine the identity / symmetry or difference of the cut-angles. Particular useful applications of the invention are in dual-mode mobile telephones which require the use of at least two oscillators with different resonant frequencies.
Owner:OPTIS WIRELESS TECH LLC

Microprocessor comprising operating modes with low current consumption

The present invention relates to an integrated circuit comprising a central processing unit clocked by a clock signal, a main oscillator circuit supplying a first clock signal and a peripheral circuit supplying a periodic wake up signal, the central processing unit comprising a first operating mode at full power, in which the first clock signal is applied to the central processing unit, and an active halt mode in which the main oscillator circuit and the central processing unit are deactivated, the central processing unit being awakened by the periodic wake-up signal. According to the present invention, the integrated circuit comprises a secondary oscillator circuit for supplying a second clock signal of lower frequency than the first clock signal and a circuit for managing clock signals arranged for, upon the wake-up of the central processing unit at the end of the active halt mode, waking up the secondary oscillator circuit and applying the second clock signal to the central processing unit so as to clock the central processing unit to the lower frequency of the second clock signal and thus obtain a second operating mode with reduced current consumption relative to the first operating mode.
Owner:STMICROELECTRONICS SRL

Bandwidth-limited and long pulse master oscillator power oscillator laser systems

Laser systems have a line-narrowed master oscillator and a power oscillator for amplifying the output of the master oscillator. The power oscillator includes optical arrangements for limiting the bandwidth of radiation that can be amplified. The limited amplification bandwidth of the power oscillator is relatively broad compared to that of the output of the master oscillator, but narrower than would be the case without the bandwidth limiting arrangements. The bandwidth narrowing arrangements of the power oscillator function primarily to restrict the bandwidth of amplified spontaneous emission generated by the power oscillator.
Owner:COHERENT GMBH

Injection locking clock generator and clock synchronization circuit using the same

An injection locking clock generator can vary the free running frequency of an injection locking oscillator to broaden an operating frequency range of an oscillation signal injected to itself, thereby performing an injection locking with respect to all frequencies of an operating frequency range. The clock generator includes a main oscillator configured to generate oscillation signals of a frequency corresponding to a control voltage, and an injection locking oscillator configured to generate division signals synchronized with the oscillation signals by dividing the oscillation signals, wherein a free running frequency of the injection locking oscillator is set according to the frequency of the oscillation signals.
Owner:SK HYNIX INC

Supply-regulated vco architecture

A supply-regulated VCO exhibits reduced or no supply sensitivity peaking. The VCO includes an oscillator whose supply current is regulated to control the oscillating frequency of the oscillator. A VCO input signal controls the supply current so that there is a relationship between the input signal and the oscillator output frequency. Power supply noise that might otherwise affect oscillator operation is shunted from a supply current input lead of the oscillator to ground by a bypass capacitor. In one example, an auxiliary circuit supplies an auxiliary supply current to the oscillator, thereby reducing the amount of supply current a supply regulation control loop circuit must supply. In another example, a supply regulation control loop circuit supplies a control current to a main oscillator, but the bypass capacitor is not coupled to this oscillator but rather is coupled to a slave oscillator that is injection locked to the main oscillator.
Owner:QUALCOMM INC

Control system for a two chamber gas discharge laser

The present invention provides a control system for a modular high repetition rate two discharge chamber ultraviolet gas discharge laser. In preferred embodiments, the laser is a production line machine with a master oscillator producing a very narrow band seed beam which is amplified in the second discharge chamber.Novel control features specially adapted for a two-chamber gas discharge laser system include: (1) pulse energy controls, with nanosecond timing precision (2) precision pulse to pulse wavelength controls with high speed and extreme speed wavelength tuning (3) fast response gas temperature control and (4) F2 injection controls with novel learning algorithm.
Owner:CYMER INC

MOPA laser apparatus with two master oscillators for generating ultraviolet radiation

Laser apparatus including two different, pulsed MOPAs, one having a fundamental wavelength of 1064 nm and the other having a fundamental wavelength of 1564 nm, provide trains of optical pulses. The 1064-nm pulses are frequency tripled to 355 nm and the 1564-nm pulses are frequency doubled to 782 nm. The 355-nm and 782-nm pulses are mixed to provide 244-nm pulses. The 244-nm pulses are mixed with residual 1064-nm pulses to provide 198-nm output pulses of the apparatus. The output pulses can be either digitally modulated or amplitude modulated by controlling the phase relationship between the 1064-nm and 1564-nm pulses.
Owner:COHERENT INC
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