A gas
discharge laser crystallization apparatus and method for performing a transformation of a
crystal makeup or orientation in the substrate of a workpiece is disclosed which may comprise, a multichamber
laser system comprising, a first
laser unit comprising, a first and second gas
discharge chamber; each with a pair of elongated spaced apart opposing electrodes contained within the chamber, forming an elongated gas
discharge region; a laser gas contained within the chamber comprising a
halogen and a
noble gas selected to produce
laser light at a center
wavelength optimized to the
crystallization process to be earned out on the workpiece; a power supply module comprising, a DC power source; a first and a second
pulse compression and
voltage step up circuit connected to the DC power source and connected to the respective electrodes, comprising a multistage fractional step up
transformer having a plurality of primary windings connected in series and a single secondary winding passing through each of the plurality of primary windings, and a
solid state trigger switch; and a laser timing and control module operative to time the closing of the respective
solid state switch based upon operating parameters of the respective first and second
pulse compression and
voltage step up circuit to effect operation of the first and second laser units as either a POPA configured laser
system or a POPO configured laser
system to produce a single output
laser light pulse beam. As a POPA laser system
relay optics may be operative to direct a first output
laser light pulse beam from the first laser unit into the second gas discharge chamber; and, the timing and control module operates to create a gas discharge between the second pair of electrodes while the first output laser light
pulse beam is transiting the second discharge region, within plus or minus 3 ns and as a POPO, combining
optics combine the output beams, and timing creates
pulse separation in the combined output a preselected time plus or minus 3 ns.