The invention discloses a modeling method of a
microwave GaN power device. The modeling method of the
microwave GaN power device comprises the following steps: creating a small
signal equivalent circuit model of the GaN power device, obtaining the parameters of the
small signal model; according to actually-measured multi-bias
scattering parameters, optimizing the parameters of the
small signal model, creating a large
signal equivalent circuit model of the GaN power device, obtaining the parameters of the
large signal model, by using actually-measured multi-bias
scattering parameters and large
signal characteristic parameters as the goals, tuning and optimizing the parameters of the
large signal model; carrying out the modeling for multiple batches of GaN power devices, obtaining the
scattering parameters of a process line, and a large signal
statistical model. According to the modeling method of the
microwave GaN power device, the small signal
equivalent circuit model and large signal equivalent circuit model of the GaN power device are created, according to the
model parameter statistical characteristics, the scattering parameters of the GaN process line are thus obtained and the large
signal characteristic statistical model is created at the same time, therefore, the accurate modeling for the small signal characteristics and the large signal characteristics of a specific process line can be achieved, and the degree of accuracy of the model is improved.