The invention relates to a stick-slip
inertia based serial three-degree-of-freedom piezoelectric precision driving platform and the
linear motion along the x and y direction and the rotating motion around the z axis direction can be implemented. The stick-slip
inertia based serial three-degree-of-freedom piezoelectric precision driving platform comprises a lower layer of x axis linear driver
assembly, a middle layer of y axis linear driver
assembly and an upper layer of z axis rotating driver
assembly which are connected in turn and sawtooth
waves are input towards piezoelectric stacks based on the stick-slip
inertia principle to implement the stepping type
continuous feeding of an output terminal. The symmetry and the frequency of the sawtooth
waves are changed to change the feeding direction and speed. The positioning motion of the rapid feeding positioning and the precise feed positioning can be implemented through different
modes of control on the piezoelectric stacks and accordingly the rapid and high precision positioning can be obtained simultaneously. The stick-slip inertia based serial three-degree-of-freedom piezoelectric precision driving platform has the advantages of being small and compact in structure, large in output
stroke, adjustable in speed, large in
bearing capacity, stable and reliable in work, good in
repeatability and suitable for large
stroke of precision
motion control occasions with strict space size constraints.