The invention relates to a vertical-type
capacitor structure and a manufacturing method of the vertical-type
capacitor structure, and belongs to the technical field of micro-electronic passive devices. The vertical-type
capacitor structure structurally and specifically comprises a deep-groove structure, insulating
layers, conducting
layers and a
dielectric layer, wherein the deep-groove structure is located inside a
wafer substrate, the insulating
layers and the conducting layers are sequentially deposited on the inner side wall of a deep groove, and the
dielectric layer is filled between the conducting layers. The insulating layers, the conducting layers, the
dielectric layer and the deep groove are the same in height. On the basis of the principle that the area of a capacitor is expanded in the direction perpendicular to the substrate, the area of an
plate electrode in the
perpendicular direction is utilized, the processes such as
sputtering and
electroplating are adopted to manufacture a
metal plate electrode, and the
plate electrode is made of low electrical resistivity materials, like
metal. With the combination of a
silicon through hole technology, the vertical-type capacitor with a large depth-to-
width ratio is achieved. With the combination of a substrate back
thinning technology, the vertical-type capacitor structure penetrates through the substrate, the vertical-type capacitor structure can be used as a high-frequency channel between multi-layer chips, the area of the plate can be greatly saved, and the integration level of an
integrated circuit is improved.